Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
185 words
A method of manufacturing a stamper for information storage discs, comprising the steps of: providing a master of glass including a photoresist layer having pits thereon which represent information signals; depositing a film of metal on said photoresist layer; depositing in a vacuum a first polymerized release film of non-metallic material having low surface energy capable of facilitating physical separation of a stamper blank therefrom on said film of metal to thereby provide a stamper-forming master having a first signal surface containing said pits; placing a substantially transparent plate on said signal surface with a layer of radiation curing resin interposed therebetween; irradiating said layer of radiation curing resin with radiation through said substantially transparent plate to harden said layer of radiation curing resin; separating said substantially transparent plate and said hardened layer as a unitary stamper blank from said first film of said stamper-forming master, said unitary stamper blank having a second signal surface complementary to said first signal surface; and depositing a second polymerized release film having low surface energy on said second signal surface of said stamper blank, thereby forming a stamper.
Claim 2
Independent Claim
185 words
A method of manufacturing a stamper for information storage discs, comprising the steps of: providing a master of glass including a photoresist layer having pits thereon which represent information signals; depositing a film of metal on said photoresist layer; depositing in a vacuum a first polymerized release film of non-metallic material having low surface energy capable of facilitating physical separation of a stamper blank therefrom on said film of metal to thereby provide a stamper-forming master having a first signal surface containing said pits; placing a substantially transparent plate on said signal surface with a layer of radiation curing resin interposed therebetween; irradiating said layer of radiation curing resin with radiation through said substantially transparent plate to harden said layer of radiation curing resin; separating said substantially transparent plate and said hardened layer as a unitary stamper blank from said first film of said stamper-forming master, said unitary stamper blank having a second signal surface complementary to said first signal surface; and depositing a second polymerized release film having low surface energy on said second signal surface of said stamper blank, thereby forming a stamper.
Claim 3
Dependent Claim
32 words
A method according to claim 1, wherein said film of metal is approximately 400 angstroms thick and deposited by sputtering in an inactive gas under the pressure of approximately 5×10 -4 Torr.
Claim 4
Dependent Claim
16 words
A method according to claim 1, wherein said film of metal is deposited by vacuum evaporation.
Claim 5
Dependent Claim
22 words
A method according to claim 1, wherein said first film is made of polymerized octafluorocyclobutane and has a thickness of 200 angstroms.
Claim 6
Dependent Claim
22 words
A method according to claim 4, wherein said first film is deposited by glow discharge under the pressure of 10 -1 Torr.
Claim 7
Dependent Claim
22 words
A method according to claim 1, wherein said layer of radiation curing resin has a thickness of the order of 200 microns.
Claim 8
Dependent Claim
25 words
A method according to claim 6, wherein said layer of radiation curing resin is hardened by exposure to ultraviolet radiation and is made of oligoesteracrylate.
Claim 9
Dependent Claim
22 words
A method according to claim 7, wherein said layer of radiation curing resin is exposed to ultraviolet radiation for about one minute.
Claim 10
Dependent Claim
28 words
A method according to claim 1, wherein said second film is made of polymerized octafluorocyclobutane and has a thickness in the range of from 100 to 400 angstroms.
Claim 11
Dependent Claim
22 words
A method according to claim 9, wherein said second film is deposited by glow discharge under the pressure of 10 -1 Torr.
Claim 12
Dependent Claim
16 words
A method according to claim 1, wherein said substantially transparent plate is made of acrylic resin.