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US4481464A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for measuring time variant device impedance

Assignee: HP Inc
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Filing: 1982-10-20
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Granted: 1984-11-06
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Expires: 2002-10-20
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Abstract

Abstract An apparatus is disclosed which can accurately measure time variant non-ideal device impedance without unwanted delays caused by internal filters. A novel scheme is used which reduces both noise and drift so that the measurement of time variant capacitance and conductance can be made with increased precision for accurately determining such semiconductor characteristics as carrier lifetime and trap level.

Inventors

  • 👤 Hitoshi Noguchi
  • 👤 Tomoyuki Akiyama
  • 👤 Hideo Akama
  • 👤 Hideo Okara
  • 👤 Hisao Yoshino

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 12:21
CPC Classifications
G; G01; G01R; G01R27/00; G01R27/02; G01R27/26

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 124 words
An apparatus for measuring the impedance of an element, said apparatus comprising: input means for applying a measuring signal to said element; a current to voltage conversion means having a sampling integration type modulation amplifier for sampling a current flowing therethrough in a plurality of predetermined periods for integration and for converting the current flowing through said element into a voltage; and a vector voltage ratio measurement means having first means for selectively introducing the output signal of said current to voltage conversion circuit or said measuring signal, and second means for effecting an AC to DC conversion on said signals through phase detection for providing a vector ratio between said output signal of said current to voltage conversion circuit and said measuring signal.
Claim 2
Independent Claim 124 words
An apparatus for measuring the impedance of an element, said apparatus comprising: input means for applying a measuring signal to said element; a current to voltage conversion means having a sampling integration type modulation amplifier for sampling a current flowing therethrough in a plurality of predetermined periods for integration and for converting the current flowing through said element into a voltage; and a vector voltage ratio measurement means having first means for selectively introducing the output signal of said current to voltage conversion circuit or said measuring signal, and second means for effecting an AC to DC conversion on said signals through phase detection for providing a vector ratio between said output signal of said current to voltage conversion circuit and said measuring signal.
Claim 3
Dependent Claim 42 words
An apparatus as in claim 1 wherein said input means comprises: a sine wave signal source; a pulse signal source; and an adder means coupled to said sine wave and pulse signal sources for summing said sine wave and pulse signal sources.
Claim 4
Independent Claim 147 words
An apparatus for measuring the impedance of an element, said apparatus comprising: input means for applying a measuring signal to said element; a current to voltage conversion means having a sampling integration type modulation amplifier for sampling a current flowing therethrough in a plurality of predetermined periods for integration and for converting the current flowing through said element into a voltage; and a vector voltage ratio measurement means having first means for selectively introducing the output signal of said current to voltage conversion circuit or said measuring signal, second means for effecting an AC to DC conversion on said signals through phase detection, third means for sampling the DC signal output of said second means, and fourth means for integrating the sampled output of said third means, for providing a vector ratio between said output signal of said current to voltage conversion circuit and said measuring signal.
Claim 5
Independent Claim 147 words
An apparatus for measuring the impedance of an element, said apparatus comprising: input means for applying a measuring signal to said element; a current to voltage conversion means having a sampling integration type modulation amplifier for sampling a current flowing therethrough in a plurality of predetermined periods for integration and for converting the current flowing through said element into a voltage; and a vector voltage ratio measurement means having first means for selectively introducing the output signal of said current to voltage conversion circuit or said measuring signal, second means for effecting an AC to DC conversion on said signals through phase detection, third means for sampling the DC signal output of said second means, and fourth means for integrating the sampled output of said third means, for providing a vector ratio between said output signal of said current to voltage conversion circuit and said measuring signal.
Claim 6
Dependent Claim 42 words
An apparatus as in claim 3 wherein said input means comprises: a sine wave signal source; a pulse signal source; and an adder means coupled to said sine wave and pulse signal sources for summing said sine wave and pulse signal sources.
Claim 7
Independent Claim 144 words
An apparatus for measuring the impedance of an element, said apparatus comprising: input means for applying a measuring signal to said element, said input means having a sine wave signal source, a pulse signal source, and an adder means coupled to said sine wave and pulse signal sources for summing said sine wave and pulse signal sources; a current to voltage conversion means having a sampling integration type modulation amplifier for converting the current flowing through said element into a voltage; and a vector voltage ratio measurement means having first means for selectively introducing the output signal of said current to voltage conversion circuit or said measuring signal, and second means for effecting an AC to DC conversion on said signals through phase detection for providing a vector ratio between said output signal of said current to voltage conversion circuit and said measuring signal.
Claim 8
Independent Claim 144 words
An apparatus for measuring the impedance of an element, said apparatus comprising: input means for applying a measuring signal to said element, said input means having a sine wave signal source, a pulse signal source, and an adder means coupled to said sine wave and pulse signal sources for summing said sine wave and pulse signal sources; a current to voltage conversion means having a sampling integration type modulation amplifier for converting the current flowing through said element into a voltage; and a vector voltage ratio measurement means having first means for selectively introducing the output signal of said current to voltage conversion circuit or said measuring signal, and second means for effecting an AC to DC conversion on said signals through phase detection for providing a vector ratio between said output signal of said current to voltage conversion circuit and said measuring signal.
Claim 9
Independent Claim 156 words
An apparatus for measuring the impedance of an element, said apparatus comprising: input means for applying a measuring signal to said element, said input means having a sine wave signal source, a pulse signal source, and an adder means coupled to said sine wave and pulse signal sources for summing said sine wave and pulse signal sources; a current to voltage conversion means having a sampling integration type modulation amplifier for converting the current flowing through said element into a voltage; and a vector voltage ratio measurement means having first means for selectively introducing the output signal of said current to voltage conversion circuit or said measuring signal, second means for effecting an AC to DC conversion on said signals through phase detection, and third means for sampling the DC signal output of said second means for providing a vector ratio between said output signal of said current to voltage conversion circuit and said measuring signal.
Claim 10
Independent Claim 156 words
An apparatus for measuring the impedance of an element, said apparatus comprising: input means for applying a measuring signal to said element, said input means having a sine wave signal source, a pulse signal source, and an adder means coupled to said sine wave and pulse signal sources for summing said sine wave and pulse signal sources; a current to voltage conversion means having a sampling integration type modulation amplifier for converting the current flowing through said element into a voltage; and a vector voltage ratio measurement means having first means for selectively introducing the output signal of said current to voltage conversion circuit or said measuring signal, second means for effecting an AC to DC conversion on said signals through phase detection, and third means for sampling the DC signal output of said second means for providing a vector ratio between said output signal of said current to voltage conversion circuit and said measuring signal.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-11-06 1988-05-07 1988-11-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-11-06 1992-05-07 1992-11-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-11-06 1996-05-07 1996-11-06 $7700.00 Window Closed / Lapsed

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