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US4479060A
Expired / Lapsed
US
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Apparatus for irradiation with charged particle beams
Assignee: Hitachi Ltd
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Filing: 1982-12-28
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Granted: 1984-10-23
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Expires: 2002-12-28
Abstract
Abstract An apparatus according to the present invention for irradiating a specimen with charged particle beams comprises a single charged particle generating source from which the charged particle beams formed of electrons and negative ions, respectively, can be simultaneously derived; a specimen holder on which the specimen is placed; and charged particle irradiation means which is interposed between the charged particle generating source and the specimen holder in order to focus the charged particle beams and to irradiate the surface of the specimen with the focused beams, and which includes at least one magnetic lens and at least one electrostatic lens that are individually disposed.
Inventors
- 👤 Hifumi Tamura
- 👤 Tohru Ishitani
- 👤 Akira Shimase
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:30
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/10; H01J37/252
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
97 words
An apparatus for irradiation with charged particle beams, comprising a single charged particle generating source from which the charged particle beams formed of electrons and negative ions, respectively, can be simultaneously derived; a specimen holder on which a specimen is put; and charged particle irradiation means which is interposed between said charged particle generating source and said specimen holder in order to focus the charged particle beams and to irradiate a surface of the specimen with the focused beams, and which includes at least one magnetic lens and at least one electrostatic lens that are individually disposed.
Claim 2
Independent Claim
97 words
An apparatus for irradiation with charged particle beams, comprising a single charged particle generating source from which the charged particle beams formed of electrons and negative ions, respectively, can be simultaneously derived; a specimen holder on which a specimen is put; and charged particle irradiation means which is interposed between said charged particle generating source and said specimen holder in order to focus the charged particle beams and to irradiate a surface of the specimen with the focused beams, and which includes at least one magnetic lens and at least one electrostatic lens that are individually disposed.
Claim 3
Dependent Claim
37 words
An apparatus for irradiation with charged particle beams as defined in claim 1, wherein said charged particle irradiation means is constructed of a lens system in which two electrostatic lenses and two magnetic lenses are alternately arranged.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-23 | 1988-04-23 | 1988-10-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-23 | 1992-04-23 | 1992-10-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-23 | 1996-04-23 | 1996-10-23 | $7700.00 | Window Closed / Lapsed |