Patent US4476601A successfully refreshed from Google Patents.
US4476601A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Washing apparatus
Assignee: Dainippon Screen Manufacturing Co Ltd
•
Filing: 1983-02-03
•
Granted: 1984-10-16
•
Expires: 2003-02-03
Abstract
Abstract A washing apparatus constructed for using a plurality of types of brushes, in a manner such that a brush is supported on an end of a swing lever, and with an object to be washed being washed by rotating the brush in contact with said object. The washing apparatus is characterized so that when a hard brush is used the swing lever is fixed. However when a soft brush is used the brush is constrained by applying to said lever a load which is balanced by, or is a little less than the weight of said brush.
Inventors
- 👤 Masahiko Oka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:49
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0412; B; B08; B08B; B08B1/00; B08B1/30; B08B1/32; B08B1/34; B08B11/00; B08B3/00; B08B3/02; B08B1/50; B08B1/52
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
216 words
In an apparatus for washing silicon wafer type articles, said apparatus comprising a chuck for supporting said article to be washed thereon, a rotary brush having a weight and movable between a first operational position in which said brush is forced against said article, and a second inoperative position in which said brush is spaced from said article, and moving means for alternately moving said brush between said first operational position and said second inoperative position, the improvement wherein, said means for alternately placing said brush between said first operational and second inoperative positions comprises in combination, an elongated arm pivotally attached to a stationary base at one end thereof, said brush being rotatably attached to and laterally extending from the other free end of said arm; adjustable weight means associated with said arm for counteracting the weight of said brush through said arm to reduce the amount of pressure exerted by said brush due to the weight upon said article and to permit said brush to repeatedly rebound on said article when the brush is in operation in said first operational position; and operation selecting means for selectively holding said brush fixed in said operational position and for selectively disabling said counter-acting weight means to force said brush against said article at a constant pressure.
Claim 2
Dependent Claim
216 words
In an apparatus for washing silicon wafer type articles, said apparatus comprising a chuck for supporting said article to be washed thereon, a rotary brush having a weight and movable between a first operational position in which said brush is forced against said article, and a second inoperative position in which said brush is spaced from said article, and moving means for alternately moving said brush between said first operational position and said second inoperative position, the improvement wherein, said means for alternately placing said brush between said first operational and second inoperative positions comprises in combination, an elongated arm pivotally attached to a stationary base at one end thereof, said brush being rotatably attached to and laterally extending from the other free end of said arm; adjustable weight means associated with said arm for counteracting the weight of said brush through said arm to reduce the amount of pressure exerted by said brush due to the weight upon said article and to permit said brush to repeatedly rebound on said article when the brush is in operation in said first operational position; and operation selecting means for selectively holding said brush fixed in said operational position and for selectively disabling said counter-acting weight means to force said brush against said article at a constant pressure.
Claim 3
Dependent Claim
17 words
An apparatus as in claim 1, wherein said chuck is rotatable about is own axis of rotation.
Claim 4
Dependent Claim
52 words
An apparatus as in claim 2, wherein said arm has at said one end a pinion meshing with a slidable rack with said slidable rack being actuatable by a pneumatic cylinder, and said pinion being mounted on a shaft extending from said stationary base for effecting the pivotal movement of said arm.
Claim 5
Dependent Claim
34 words
An apparatus as in claim 3, wherein said counteracting weight means comprises a weight attaching lever secured to said shaft and radially extending therefrom in a manner defining an angle relative to said arm.
Claim 6
Dependent Claim
44 words
An apparatus as in claim 4, wherein said operation selecting means for selectively holding said brush in said first operational position comprises means for connecting and alternatively disconnecting said rack to said pneumatic cylinder when said brush is placed in said first operational position.
Claim 7
Dependent Claim
59 words
An apparatus as in claim 5, wherein, when said brush is in said first operational position, said weight attaching lever is connected in a manner defining an acute angle relative to a horizontal plane including said shaft to which the lever is secured, and said arm defines an obtuse angle including said acute angle relative to said horizontal plane.
References Cited (Backward Citations)
US2156881A
Cited
SU638324A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-16 | 1988-04-16 | 1988-10-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-16 | 1992-04-16 | 1992-10-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-16 | 1996-04-16 | 1996-10-16 | $7700.00 | Window Closed / Lapsed |