Optical vibration sensor

Claim 2

A vibration sensor including: a body to which the vibrations to be sensed are applied; a first grating having: parallel lines aligned on a plane thereon which extend in a first predetermined direction; and a predetermined mass; support means connecting said first grating to said body for movement generally perpendicular to said parallel lines; light source means to produce a first light beam; and means to direct said first light beam to said first grating for modulation into first and second output signals which vary in intensity with the vibrations being sensed and are 90° out of phase.

Claim 3

The vibration sensor as defined in claim 1 wherein said means to direct said first light beam to said first grating for modulation into first and second output signals include: means to produce a second light beam; a first optical fiber having input and output ends; means to couple said first light beam into said input end of said first optical fiber; a second optical fiber having input and output ends; means to couple said second light beam into said input end of said second optical fiber, said first and second light beams projecting out of said output ends of said first and second optical fibers respectively and said output ends of said first and second optical fibers being positioned a first predetermined distance apart; and lens means to image said first and second light beams projecting out of said output ends of said first and second optical fibers onto said first grating to produce said first and second output signals.

Claim 4

The vibration sensor as defined in claim 2 wherein said parallel lines on said first grating are alternate opaque and transparent lines of a predetermined width, said output ends of said first and second optical fibers being spaced apart at least one half said predetermined width in the direction of said predetermined width.

Claim 5

The vibration sensor as defined in claim 3 wherein said lens means include: a first graded index lens having an odd number of half pitches.

Claim 6

The vibration sensor as defined in claim 4 further including: a second lens positioned opposite said first grating from said first graded index lens to reimage said first and second light beams into said first and second output signals.

Claim 7

The vibration sensor as defined in claim 4 further including: a dual detector; and a second lens positioned opposite said first grating from said first graded index lens to reimage said first and second light beams into said first and second output signals on said dual detector.

Claim 8

The vibration sensor as defined in claim 4 further including: a third optical fiber having an input end; a fourth optical fiber having an input end; and a second lens positioned opposite said first grating from said first graded index lens to reimage said first and second light beams into said first and second output signals on said input ends of said third and fourth optical fibers respectively.

Claim 9

The vibration sensor as defined in claim 7 wherein said light source is a laser diode.

Claim 10

The vibration sensor as defined in claim 3 wherein said first and second optical fibers are positioned in a ferrule perpendicular to said first grating.

Claim 11

The vibration sensor as defined in claim 3 wherein said support means include a seismometer.

Claim 12

The vibration sensor as defined in claim 3 wherein said means to produce a second light beam include: a beamsplitter positioned to split said second light beam out of said first light beam.

Claim 13

The vibration sensor as defined in claim 1 wherein said means to direct said first light beam to said first grating for modulation into first and second output signals include: a first optical fiber having: an input end positioned to receive said first light beam from said light source means; and an output end; a first lens having an odd number of quarter pitches positioned to expand said first light beam into parallel rays and project said expanded first light beam through said first grating to form a grated first light beam; a second grating similar to said first grating fixed to said body; a third grating similar to said first grating fixed to said body positioned 90° out of phase with said second grating; and means to split said grated first light beam into second and third light beams, project said second light beam through said second grating, and project said third light beam through said third grating.

Claim 14

The vibration sensor as defined in claim 12 wherein said means to split said grated first light beam into second and third light beams, project said second light beam through said second grating, and project said third light beam through said third grating include: a beamsplitter cube.

Claim 15

The vibration sensor as defined in claim 12 wherein said means to direct said first light beam to said first grating for modulation into first and second output signals further include: a second optical fiber having an input end; a third optical fiber having an input end; a second lens having an odd number of quarter pitches positioned to focus said grated second beam of light into said input end of said second optical fiber to form said first output signal; and a third lens having an odd number of quarter pitches positioned to focus said grated third beam of light into said input end of said third optical fiber to form said second output signal.

Claim 16

The vibration sensor as defined in claim 14 wherein said means to direct said first light beam to said first grating for modulation into first and second output signals include: a planar plate fixedly connected to said body on which both said second and third gratings are positioned, and wherein said means to split said grated first light beam into second and third light beams, project said second light beam through said second grating, and project said third light beam through said third grating projects said second and third light beams parallel to each other.

Claim 17

The vibration sensor as defined in claim 15 wherein said means to split said grated first light beam into second and third light beams, project said second light beam through said second grating, and project said third light beam through said third grating include: a beamsplitter cube positioned to split said grated first light beam into second and third light beams; and a mirror positioned to reflect said second light beam parallel to said third light beam.

Claim 18

The vibration sensor as defined in claim 16 wherein said second grating includes parallel lines and said third grating includes parallel lines parallel to said parallel grating lines of said second grating.

Claim 19

The vibration sensor as defined in claim 14 wherein said first, second and third lens are graded index lens.

Claim 20

The vibration sensor as defined in claim 13 wherein said second and third gratings are positioned at right angles to each other.

Claim 21

The vibration sensor as defined in claim 19 wherein said parallel lines on said first, second, and third gratings are alternate opaque and transparent lines of a predetermined width.