Apparatus and method for generating high current negative ions

Claim 1

An apparatus for generating a charged ion stream comprising: a plasma generator having a chamber for receiving an ionizing gas, an anode and cathode, each connected to provide an ionizing current whereby a plasma is generated, a first screen located at an exit aperture of said generator for accelerating ions formed in said chamber along a trajectory path, a target material located along said trajectory path, said target material having apertures for passing said ions, said material comprising a material having the properties of emitting an ion with a charge polarity opposite an incident ion polarity, a second screen adjacent said target material having a plurality of apertures located in facing relation to an ion emitting surface of said target material, and means for applying a voltage potential between said second screen and said target material having a polarity for directing ions passing through said target apertures against said target material as they exit said target apertures whereby an oppositely charged ion is emitted from said target material and is accelerated by said voltage potential through the apertures in said second screen.

Claim 2

An apparatus for generating a charged ion stream comprising: a plasma generator having a chamber for receiving an ionizing gas, an anode and cathode, each connected to provide an ionizing current whereby a plasma is generated, a first screen located at an exit aperture of said generator for accelerating ions formed in said chamber along a trajectory path, a target material located along said trajectory path, said target material having apertures for passing said ions, said material comprising a material having the properties of emitting an ion with a charge polarity opposite an incident ion polarity, a second screen adjacent said target material having a plurality of apertures located in facing relation to an ion emitting surface of said target material, and means for applying a voltage potential between said second screen and said target material having a polarity for directing ions passing through said target apertures against said target material as they exit said target apertures whereby an oppositely charged ion is emitted from said target material and is accelerated by said voltage potential through the apertures in said second screen.

Claim 3

An apparatus for forming a stream of ions having a negative polarity comprising: an ion generator for producing a stream of accelerated positively charged ions from a plasma, said generator including a plurality of exit apertures for emitting said ions; a target material having apertures for passing ions incident on one side of said target material, and a target surface located on an opposite side of said target material; said target surface comprising an ion emitting material responsive to an incident ion; and means for establishing an electric field on said opposite side of said target material for forcing ions passing through said target material apertures against said target surface whereby an ion is emitted from said target material and subsequently accelerated by said field away from said target material.

Claim 4

An apparatus for forming a stream of ions having a negative polarity comprising: an ion generator for producing a stream of accelerated positively charged ions from a plasma, said generator including a plurality of exit apertures for emitting said ions; a target material having apertures for passing ions incident on one side of said target material, and a target surface located on an opposite side of said target material; said target surface comprising an ion emitting material responsive to an incident ion; and means for establishing an electric field on said opposite side of said target material for forcing ions passing through said target material apertures against said target surface whereby an ion is emitted from said target material and subsequently accelerated by said field away from said target material.

Claim 9

An apparatus for generating negative ions comprising: a plasma generator comprising a chamber receiving a gas for ionization, an electron emitter and anode connected to ionize said gas whereby a plasma bordered by a plasma sheath is produced, said chamber having an exit port bounded by an exit grid having a voltage potential for accelerating positive ions in said chamber through said grid, said plasma generator further including a magnetic field for constraining energetic electrons generated in the plasma; a target having a plurality of apertures for passing ions emitted by said grid, said target having a surface on the exit side of said target apertures for emitting negative ions along a predetermined trajectory in response to bombardment by positive ions exiting said target apertures; a second grid for receiving ions emitted by said target surface; and means for applying between said target surface and second grid a voltage potential for establishing a field for reversing the direction of travel of said positive ions exiting said target apertures whereby collisions with said emitting surface occur to produce negative ions that are swept by said field through said second grid thereby to form a stream of negative ions.

Claim 10

An apparatus for generating negative ions comprising: a plasma generator comprising a chamber receiving a gas for ionization, an electron emitter and anode connected to ionize said gas whereby a plasma bordered by a plasma sheath is produced, said chamber having an exit port bounded by an exit grid having a voltage potential for accelerating positive ions in said chamber through said grid, said plasma generator further including a magnetic field for constraining energetic electrons generated in the plasma; a target having a plurality of apertures for passing ions emitted by said grid, said target having a surface on the exit side of said target apertures for emitting negative ions along a predetermined trajectory in response to bombardment by positive ions exiting said target apertures; a second grid for receiving ions emitted by said target surface; and means for applying between said target surface and second grid a voltage potential for establishing a field for reversing the direction of travel of said positive ions exiting said target apertures whereby collisions with said emitting surface occur to produce negative ions that are swept by said field through said second grid thereby to form a stream of negative ions.