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US4468284A
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Process for etching an aluminum-copper alloy
Assignee: PSI Star Inc
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Filing: 1983-07-06
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Granted: 1984-08-28
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Expires: 2003-07-06
Abstract
Abstract Plasma etching process for etching aluminum-copper alloys. The aluminum is reacted with a reactive chlorine specie, and the copper is oxidized by a nitrogen compound to form a CuCl 2 .Al 2 Cl 6 complex by which the copper is readily removed.
Inventors
- 👤 Norvell J. Nelson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 11:29
CPC Classifications
C; C23; C23F; C23F4/00; H; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
73 words
In a process for etching an aluminum-copper alloy containing up to about 6% copper by weight, the steps of: reacting the aluminum with a reactive chlorine specie in a gas plasma to produce Al 2 Cl 6 , and including a source of NO + in the plasma to oxidize the copper to form CuCl 2 which combines with the Al 2 Cl 6 to form CuCl 2 .Al 2 Cl 6 .
Claim 2
Dependent Claim
73 words
In a process for etching an aluminum-copper alloy containing up to about 6% copper by weight, the steps of: reacting the aluminum with a reactive chlorine specie in a gas plasma to produce Al 2 Cl 6 , and including a source of NO + in the plasma to oxidize the copper to form CuCl 2 which combines with the Al 2 Cl 6 to form CuCl 2 .Al 2 Cl 6 .
Claim 3
Dependent Claim
26 words
The process of claim 1 wherein the source of NO + is selected from the group consisting of NO, NO 2 , NOCl and combinations thereof.
Claim 4
Dependent Claim
38 words
The process of claim 1 wherein the reactive chlorine specie is provided by a gas selected from the group consisting of BCl 3 , SiCl 4 , CHCl 3 , CCl 4 , Cl 2 and combinations therof.
References Cited (Backward Citations)
JPS53146939A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-08-28 | 1988-02-27 | 1988-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-08-28 | 1992-02-27 | 1992-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-08-28 | 1996-02-27 | 1996-08-28 | $7700.00 | Window Closed / Lapsed |