Patent US4466766A successfully refreshed from Google Patents.
US4466766A
Expired / Lapsed
US
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Transfer apparatus
Assignee: Ruska Instrument Corp
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Filing: 1983-05-24
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Granted: 1984-08-21
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Expires: 2003-05-24
Abstract
Abstract An apparatus for transferring wafers between a process carrier and a furnace carrier. The apparatus lifts a plurality of wafers from one carrier and deposits them into another carrier without damage to the wafers or touching any more than the edge surfaces and adjacent areas of the wafers.
Inventors
- 👤 Lorenzo D. Geren, deceased
- 👤 Raymond D. Worden
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 21:58
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3411; H10P72/3412; C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C30; C30B; C30B35/00; C30B35/005; H10P72/10; H10P72/13
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
183 words
A transfer device for transferring a plurality of wafers between carriers comprising: a support for a first carrier, a support for a second carrier positioning the planes of the wafer grooves in the two carriers parallel to each other and on the same plane, a wafer support system having opposed wafer support means including alternate lands and grooves therein with said grooves being alternately provided with and without lower portions of reduced depth such that the alternate grooves having such lower portions engage and support wafers at their periphery below the horizontal centerline of the wafers while the side walls of the grooves above the lower portions maintain the wafer substantially vertical, means for moving said lower portions of reduced depth toward each other to support wafers therebetween and away from each other to release said wafers, and means for moving said wafer support system and carriers vertically and transversely relative to each other to transfer wafers on said wafer supports between carriers, said alternate grooves without said lower portions sized to pass over wafers in any position of the wafer support means.
Claim 2
Dependent Claim
183 words
A transfer device for transferring a plurality of wafers between carriers comprising: a support for a first carrier, a support for a second carrier positioning the planes of the wafer grooves in the two carriers parallel to each other and on the same plane, a wafer support system having opposed wafer support means including alternate lands and grooves therein with said grooves being alternately provided with and without lower portions of reduced depth such that the alternate grooves having such lower portions engage and support wafers at their periphery below the horizontal centerline of the wafers while the side walls of the grooves above the lower portions maintain the wafer substantially vertical, means for moving said lower portions of reduced depth toward each other to support wafers therebetween and away from each other to release said wafers, and means for moving said wafer support system and carriers vertically and transversely relative to each other to transfer wafers on said wafer supports between carriers, said alternate grooves without said lower portions sized to pass over wafers in any position of the wafer support means.
Claim 3
Dependent Claim
18 words
The device of claim 1 wherein the lower portions of reduced depth have surfaces diverging upwardly and outwardly.
Claim 4
Dependent Claim
39 words
The device of claim 1 or 2 wherein means is associated with one of said supports and movable vertically relative thereto for supporting wafers and transferring them between wafer support means and a carrier associated with said one support.
Claim 5
Dependent Claim
43 words
The device of claim 1 or 2 wherein means is provided for indexing one of said wafer support systems and a selected one of said carrier supports to transfer a plurality of wafers to and from selected carriers at a second indexed position.
Claim 6
Dependent Claim
41 words
The device of claim 3 wherein means is provided for indexing one of said wafer support systems and a selected one of said carrier supports to transfer a plurality of wafers to and from selected carriers at a second indexed position.
Claim 7
Dependent Claim
155 words
A transfer device for wafers comprising: a support for a carrier, a wafer support system having opposed wafer support means including alternate lands and grooves therein with said grooves being alternately provided within and without lower portions of reduced depth such that the alternate grooves having such lower portions engage and support wafers at their periphery below the horizontal centerline of the wafers while the side walls of the grooves above the lower portions maintain the wafer substantially vertical, means for moving said lower portions of reduced depths toward each other to support wafers therebetween and away from each other to release said wafers, and means associated with said carrier support and movable vertical relative thereto for supporting wafers and transferring them between said wafer support system and a carrier associated with said carrier support, said alternate grooves without said lower portions sized to pass over wafers in any position of the wafer support means.
Claim 8
Dependent Claim
155 words
A transfer device for wafers comprising: a support for a carrier, a wafer support system having opposed wafer support means including alternate lands and grooves therein with said grooves being alternately provided within and without lower portions of reduced depth such that the alternate grooves having such lower portions engage and support wafers at their periphery below the horizontal centerline of the wafers while the side walls of the grooves above the lower portions maintain the wafer substantially vertical, means for moving said lower portions of reduced depths toward each other to support wafers therebetween and away from each other to release said wafers, and means associated with said carrier support and movable vertical relative thereto for supporting wafers and transferring them between said wafer support system and a carrier associated with said carrier support, said alternate grooves without said lower portions sized to pass over wafers in any position of the wafer support means.
Claim 9
Dependent Claim
170 words
A transfer device for transferring a plurality of wafers between carriers comprising: a support for a carrier, a wafer support system having opposed wafer support means including alternate lands and grooves therein with said grooves being alternately provided within and without lower portions of reduced depth such that the alternate grooves having such lower portions engage and support wafers at their periphery below the horizontal centerline of the wafers while the side walls of the grooves above the lower portions maintain the wafer substantially vertical, means for moving said lower portions of reduced depths toward each other to support wafers therebetween and away from each other to release said wafers, and means for moving said carrier support and wafer support system vertically away from each other to remove wafers from a carrier on the carrier support and toward each other to deposit wafers in a carrier on said carrier support, said alternate grooves without said lower portions sized to pass over wafers in any position of the wafer support means.
Claim 10
Dependent Claim
170 words
A transfer device for transferring a plurality of wafers between carriers comprising: a support for a carrier, a wafer support system having opposed wafer support means including alternate lands and grooves therein with said grooves being alternately provided within and without lower portions of reduced depth such that the alternate grooves having such lower portions engage and support wafers at their periphery below the horizontal centerline of the wafers while the side walls of the grooves above the lower portions maintain the wafer substantially vertical, means for moving said lower portions of reduced depths toward each other to support wafers therebetween and away from each other to release said wafers, and means for moving said carrier support and wafer support system vertically away from each other to remove wafers from a carrier on the carrier support and toward each other to deposit wafers in a carrier on said carrier support, said alternate grooves without said lower portions sized to pass over wafers in any position of the wafer support means.
Claim 11
Dependent Claim
18 words
The device of claim 7 wherein said lower portions of reduced depths have surfaces diverging upwardly and outwardly.
Claim 12
Dependent Claim
39 words
The device of claim 7 or 8 wherein transfer means is associated with said carrier support and movable vertical relative thereto for supporting wafers and transferring them between said wafer support system and a carrier on said carrier support.
Claim 13
Dependent Claim
40 words
The device of claim 7 or 8 wherein means is provided for indexing one of said wafer support system and said carrier support to transfer a plurality of wafers to or from a selected carrier at a second indexed position.
Claim 14
Dependent Claim
38 words
The device of claim 9 wherein means is provided for indexing one of said wafer support system and said carrier support to transfer a plurality of wafers to or from a selected carrier at a second indexed position.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-08-21 | 1988-02-20 | 1988-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-08-21 | 1992-02-20 | 1992-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-08-21 | 1996-02-20 | 1996-08-21 | $7700.00 | Window Closed / Lapsed |