Patent US4466696A successfully refreshed from Google Patents.
US4466696A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Self-aligned coupling of optical fiber to semiconductor laser or LED
Assignee: Honeywell Inc
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Filing: 1982-03-29
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Granted: 1984-08-21
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Expires: 2002-03-29
Abstract
Abstract The disclosure is directed to the self-aligned coupling of the core of an optical fiber to the narrow stripe emitting spot in the active layer of a narrow stripe semiconductor laser. In this invention a V-groove is etched into the same substrate onto which the epitaxial layers for the narrow stripe laser have been grown.
Inventors
- 👤 James K. Carney
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 09:23
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4219; G02B6/4228; G02B6/423; G02B6/26; G02B6/30; G02B6/4202; H; H01; H01S; H01S5/00; H01S5/02; H01S5/022; H01S5/0225; H01S5/02251; H01S5/023; H01S5/02325; H01S5/02326
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
131 words
In a self-aligned coupling of an optical fiber to an integrated stripe laser including a semiconductor substrate with epitaxial layers deposited thereon in which one of the epitaxial layers is an active light emitting layer, the light being edge emitted through a processed laser mirror facet in the region defined by the laser stripe, the improvement comprising: an area of the semiconductor substrate extending beyond the processed laser mirror facet; and, an etched V-groove in the surface of said extended substrate and centered in line with the light emitting stripe, said V-groove being of a depth compatible with the diameter of optical fiber to be coupled so that when such fiber is positioned in said groove, the core of said fiber is at the same elevation as said light emitting region.
Claim 2
Dependent Claim
131 words
In a self-aligned coupling of an optical fiber to an integrated stripe laser including a semiconductor substrate with epitaxial layers deposited thereon in which one of the epitaxial layers is an active light emitting layer, the light being edge emitted through a processed laser mirror facet in the region defined by the laser stripe, the improvement comprising: an area of the semiconductor substrate extending beyond the processed laser mirror facet; and, an etched V-groove in the surface of said extended substrate and centered in line with the light emitting stripe, said V-groove being of a depth compatible with the diameter of optical fiber to be coupled so that when such fiber is positioned in said groove, the core of said fiber is at the same elevation as said light emitting region.
Claim 3
Dependent Claim
146 words
An edge-emitting stripe laser providing a self-aligned coupling of the laser to an optical fiber comprising: a semiconductor substrate having a planar surface; a plurality of epitaxial layers grown onto a portion of said planar surface to form a stripe laser therein, one of said layers being an active light emitting layer, the light being edge-emitted through a processed laser mirror facet in the region defined by the laser stripe; an area of the substrate planar surface extending beyond the processed laser mirror facet; and, an anisotropically etched V-groove in the surface of said extended substrate and centered in line with the light emitting stripe, said V-groove being of a depth compatible with the diameter of optical fiber to be coupled so that when such fiber is positioned in said groove, the core of said fiber is at the same elevation as said light emitting region.
Claim 4
Dependent Claim
146 words
An edge-emitting stripe laser providing a self-aligned coupling of the laser to an optical fiber comprising: a semiconductor substrate having a planar surface; a plurality of epitaxial layers grown onto a portion of said planar surface to form a stripe laser therein, one of said layers being an active light emitting layer, the light being edge-emitted through a processed laser mirror facet in the region defined by the laser stripe; an area of the substrate planar surface extending beyond the processed laser mirror facet; and, an anisotropically etched V-groove in the surface of said extended substrate and centered in line with the light emitting stripe, said V-groove being of a depth compatible with the diameter of optical fiber to be coupled so that when such fiber is positioned in said groove, the core of said fiber is at the same elevation as said light emitting region.
Claim 5
Dependent Claim
20 words
The article according to claim 2 in which said substrate and said epitaxial layers are in the gallium arsenide family.
Claim 6
Dependent Claim
41 words
The article according to claim 2 in which said substrate is GaAs, said active light emitting epitaxial layer is Al x Ga 1-x As and the epitaxial layer next to the active layer is Al x' Ga 1-x' As where x'>x.
Claim 7
Dependent Claim
39 words
The article according to claim 2 in which the thickness of said active light emitting layer is less than one micron and the width of the stripe emitting spot in said active layer is less than about 6 microns.
Claim 8
Dependent Claim
22 words
The article according to claim 2 in which the combined thickness of said epitaxial layers is on the order of 3-10 microns.
Claim 9
Dependent Claim
58 words
The article according to claim 2 in which the crystal orientation of the substrate is chosen so that the direction of light propagation in the laser is parallel to a line formed by the intersection of the wafer surface and the crystal slow-etch planes, whereby the sides of the anisotropically etched groove lies in the crystal slow-etch planes.
Claim 10
Independent Claim
198 words
A method of providing a self-aligned coupling of an optical fiber to an integrated stripe laser comprising the steps of: providing an edge emitting stripe laser formed in epitaxial layers on a planar surface of a semiconductor substrate having proper crystal orientation; providing a processed laser mirror facet at the edge of said epitaxial layers in the region defined by the laser stripe, the facet being located at a distance from the edge of said planar surface so that an area of the semiconductor substrate extends beyond the processed laser mirror facet; applying photoresist over the surface of said extended planar surface, exposing through a mask and developing to remove a strip of resist colinear with the laser stripe; and, etching with anisotropic etch a linear V-groove into the surface of the extended substrate where said strip of resist is removed, said etched V-groove being centered in line with the light emitting stripe, said etching continuing until said V-groove reaches a depth compatible with the diameter of an optical fiber to be coupled so that when such fiber is positioned in said groove, the core of said fiber is at the same elevation as said light emitting region.
Claim 11
Independent Claim
198 words
A method of providing a self-aligned coupling of an optical fiber to an integrated stripe laser comprising the steps of: providing an edge emitting stripe laser formed in epitaxial layers on a planar surface of a semiconductor substrate having proper crystal orientation; providing a processed laser mirror facet at the edge of said epitaxial layers in the region defined by the laser stripe, the facet being located at a distance from the edge of said planar surface so that an area of the semiconductor substrate extends beyond the processed laser mirror facet; applying photoresist over the surface of said extended planar surface, exposing through a mask and developing to remove a strip of resist colinear with the laser stripe; and, etching with anisotropic etch a linear V-groove into the surface of the extended substrate where said strip of resist is removed, said etched V-groove being centered in line with the light emitting stripe, said etching continuing until said V-groove reaches a depth compatible with the diameter of an optical fiber to be coupled so that when such fiber is positioned in said groove, the core of said fiber is at the same elevation as said light emitting region.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-08-21 | 1988-02-20 | 1988-08-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-08-21 | 1992-02-20 | 1992-08-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-08-21 | 1996-02-20 | 1996-08-21 | $7700.00 | Window Closed / Lapsed |