US4465565A
Expired / Lapsed
US
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CdTe passivation of HgCdTe by electrochemical deposition
Assignee: Lockheed Martin Tactical Systems Inc
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Filing: 1983-03-28
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Granted: 1984-08-14
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Expires: 2003-03-28
Abstract
Abstract A thin passivating layer (14) of CdTe is formed on a layer of photoconductive HgCdTe (4) by means of electrochemical deposition. The photoconductive layer (4) is used as a cathode. A first anode (26) is fabricated of tellurium and a second anode (28) is fabricated of an inert substance such as graphite. An electrolyte (30) comprises an aqueous solution of CdSO 4 and unsaturated TeO 2 . Alternatively, electrolyte (30) can be saturated with TeO 2 , in which case a first anode is fabricated of an inert substance, and an optional second anode is fabricated of cadmium. After purifying the cathode (1) and the electrolyte (30), cadmium and tellurium are simultaneously deposited upon cathode (1). Stoichiometric balance is maintained to maximize the resistivity of the passivating CdTe layer (14). This is accomplished by regulating the deposition voltage of cathode (1) with respect to a saturated calomel electrode (22). In a first embodiment, an n-type region (16) is formed in the p-type photoconductive layer (4) subsequent to electrochemical deposition of the passivating CdTe layer (14). In a second embodiment, the n-type region (16) is formed in the p-type layer (4) prior to electrochemical deposition of the CdTe passivating layer (14).
Inventors
- 👤 Kenneth R. Zanio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:51
CPC Classifications
C; C25; C25D; C25D9/00; C25D9/04; C25D9/08; C25D5/00; C25D5/02; H; H10; H10F; H10F71/00; H10F71/125; H10F71/1253; H10F77/00; H10F77/30; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/265; H10P14/29; H10P14/2901; H10P14/2913; H10P14/2917; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3432; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; H10P14/60; H10P14/69; Y; Y10; Y10S; Y10S205/00; Y10S205/915
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
128 words
A method for passivating a layer of photoconductive crystalline HgCdTe, comprising the step of lattice-matching a thin passivating layer of electrically insulating crystalline CdTe onto an exposed surface of the HgCdTe by means of cathodic electrochemical deposition; wherein: the HgCdTe layer is a cathode immersed in a liquid electrolyte containing cadmium ions and tellurium ions in solution; the deposition is performed at a temperature of between room temperature and 150° C.; the concentration of the cadmium ions in solution is between 0.5 mole/liter and 1 mole/liter; the concentration of tellurium ions in solution is between 10 -5 moles/liter and 10 -3 moles/liter; the pH of the solution is approximately 1.4 to 3.5; and the plating current density is nominally between 0.1 ma/cm 2 and 0.5 ma/cm 2 .
Claim 2
Independent Claim
128 words
A method for passivating a layer of photoconductive crystalline HgCdTe, comprising the step of lattice-matching a thin passivating layer of electrically insulating crystalline CdTe onto an exposed surface of the HgCdTe by means of cathodic electrochemical deposition; wherein: the HgCdTe layer is a cathode immersed in a liquid electrolyte containing cadmium ions and tellurium ions in solution; the deposition is performed at a temperature of between room temperature and 150° C.; the concentration of the cadmium ions in solution is between 0.5 mole/liter and 1 mole/liter; the concentration of tellurium ions in solution is between 10 -5 moles/liter and 10 -3 moles/liter; the pH of the solution is approximately 1.4 to 3.5; and the plating current density is nominally between 0.1 ma/cm 2 and 0.5 ma/cm 2 .
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein the thickness of the deposited layer of CdTe is between 400 angstroms and 2000 angstroms.
Claim 4
Dependent Claim
10 words
The method of claim 1 wherein the HgCdTe is p-type.
Claim 5
Dependent Claim
105 words
The method of claim 3 wherein prior to the step of forming the layer of CdTe, a mesa of photoresist is formed on a portion of the exposed surface of the HgCdTe, and a conductive contact is formed on another portion of the exposed surface of the HgCdTe; said method further comprising, subsequent to the step of forming the passivating layer of CdTe, the following steps: forming in the p-type HgCdTe an n-type region underneath the mesa of photoresist that covers more of the surface of the p-type HgCdTe than does the mesa; removing the mesa; and forming a conductive contact on the n-type region.
Claim 6
Dependent Claim
134 words
The method of claim 3 further comprising the following steps: prior to the step of forming the passivating CdTe layer, forming an n-type region in the p-type HgCdTe at a portion of its exposed surface; forming a conductive contact on another portion of the exposed surface of the p-type HgCdTe; and forming a mesa of photoresist over part of the n-type region; wherein, at the conclusion of the passivating step, the CdTe layer covers remaining portions of the exposed surface of the p-type HgCdTe and that portion of the n-type region not covered with photoresist, but the CdTe layer does not cover the mesa of photoresist; and, subsequent to the step of forming the passivating CdTe layer, the photoresist is removed from the n-type region and an electrical contact is formed in its stead.
Claim 7
Dependent Claim
17 words
The method of claim 1 wherein an anode fabricated of cadmium is also immersed in the electrolyte.
Claim 8
Dependent Claim
36 words
The method of claim 1 wherein the deposition voltage, as measured between the cathode and a saturated calomel electrode, is kept constant at a value that will preserve substantial stoichiometry in the deposited CdTe passivating layer.
Claim 9
Dependent Claim
27 words
The method of claim 1 wherein a first anode made of tellurium and a second anode made of an inert substance are also immersed in the electrolyte.
Claim 10
Dependent Claim
34 words
The method of claim 8 wherein during the deposition of the CdTe the current flowing through the first anode is made to be substantially equal to twice the current flowing through the second anode.
References Cited (Backward Citations)
US3492167A
Cited
US3489658A
Cited
US3977018A
Cited
US3988774A
Cited
US4005472A
Cited
GB1532616A
Cited
GB2006268A
Cited
US4260427A
Cited
US4418096A
Cited
US4318217A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-08-14 | 1988-02-13 | 1988-08-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-08-14 | 1992-02-13 | 1992-08-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-08-14 | 1996-02-13 | 1996-08-14 | $7700.00 | Window Closed / Lapsed |