Pressure sensor and method of producing same

Claim 2

In a fluid pressure sensing device for measuring the pressure of a fluid in a vessel, said sensing device being adapted for mounting in an opeing in a wall portion of said vessel and having a diaphragm defining an end thereof, the improvement wherein said diaphragm is composed of a non-elastomeric material, and said sensing device includes sealing means for sealing said opening substantially in the plane of the inside surface of said wall portion with at least the periphery of said diaphragm disposed generally in said plane and being exposed to said fluid in said vessel, said sealing means including an O-ring disposed about the periphery of said sensing device and a laser fusion joint between said diaphragm and said sensing device.

Claim 3

In a fluid pressure sensing device for measuring the pressure of a fluid in a vessel, said sensing device being adapted to be mounted in a wall of said vessel and having a diaphragm on one end thereof, the improvement wherein said diaphragm is composed of a non-elastomeric material and is secured and sealed to said sensing device by means of laser fusion in order to define the end surface thereof, said sensing device being adapted for mounting in said wall such that at least the periphery of said diaphragm is generally flush with the adjacent inside surface of said wall with a first side of said diaphragm exposed to said fluid in said vessel, said sensing device including sealing means adapted to be sealingly disposed between said sensing device and said wall of said vessel.

Claim 4

In a fluid pressure sensing device for measuring the pressure of a fluid in a vessel, said sensing device being adapted to be mounted in a wall of said vessel and having a diaphragm on one end thereof, the improvement wherein said diaphragm is composed of a non-elastomeric material and is secured and sealed to said sensing device by means of laser fusion in order to define the end surface thereof, said sensing device being adapted for mounting in said wall such that at least the periphery of said diaphragm is generally flush with the adjacent inside surface of said wall with a first side of said diaphragm exposed to said fluid in said vessel, said sensing device including sealing means adapted to be sealingly disposed between said sensing device and said wall of said vessel.

Claim 5

The improvement according to claim 2, wherein said diaphragm is composed of a metallic material.

Claim 6

In a fluid pressure sensing device for measuring the pressure of a fluid in a vessel, said sensing device being adapted to be mounted in an opening in a wall of said vessel and having a diaphragm on one end thereof, the improvement wherein said diaphragm is composed of a non-elastomeric material and is secured to said sensing device by means of laser fusion in order to define the end surface thereof, said sensing device being adapted for mounting in said opening in said wall of said vessel such that at least the periphery of said diaphragm is generally flush with the adjacent inside surface of said wall of said vessel with a first side of said diaphragm being exposed to said fluid in said vessel when said sensing device is mounted therein, said diaphragm including a central portion indented in a direction toward said sensing device, an intermediate annular portion protruding in a direction away from said sensing device, said annular portion generally surrounding said central portion, and a peripheral annular portion generally coplanar with said end of said sensing device, said diaphragm being continuous from said central portion through said peripheral portion, and sealing means for sealing said sensing device in said opening in said wall in said vessel.

Claim 7

In a fluid pressure sensing device for measuring the pressure of a fluid in a vessel, said sensing device being adapted to be mounted in an opening in a wall of said vessel and having a diaphragm on one end thereof, the improvement wherein said diaphragm is composed of a non-elastomeric material and is secured to said sensing device by means of laser fusion in order to define the end surface thereof, said sensing device being adapted for mounting in said opening in said wall of said vessel such that at least the periphery of said diaphragm is generally flush with the adjacent inside surface of said wall of said vessel with a first side of said diaphragm being exposed to said fluid in said vessel when said sensing device is mounted therein, said diaphragm including a central portion indented in a direction toward said sensing device, an intermediate annular portion protruding in a direction away from said sensing device, said annular portion generally surrounding said central portion, and a peripheral annular portion generally coplanar with said end of said sensing device, said diaphragm being continuous from said central portion through said peripheral portion, and sealing means for sealing said sensing device in said opening in said wall in said vessel.

Claim 8

The improvement according to claim 4, wherein said sensing device comprises passage means extending therethrough communicating with a second side of said diaphragm opposite said first side, said passage means having a nozzle on one end thereof, an inner end of said nozzle being juxtaposed with, but spaced from, said central portion of said diaphragm, said passage means being adapted for connection to a source of an indicator fluid for measuring the pressure of said fluid in said vessel.

Claim 9

The improvement according to claim 5, wherein said diaphragm is composed of a metallic material.

Claim 10

A fluid pressure sensing device adapted for installation in a wall portion of a fluid-containing vessel, said sensing device including an annular lip on one end thereof, a metallic diaphragm laser-fused to said annular lip to define the end surface of said sensing device, a central portion of said diaphragm being indented toward said sensing device, an intermediate annular portion of said diaphragm surrounding said central portion and protruding away from said sensing device, a peripheral annular portion of said diaphragm surrounding said intermediate portion and being substantially coplanar with said annular lip with at least the periphery of said diaphragm being generally flush with the interior surface of said wall portion of said vessel when said sensing device is installed therein.

Claim 11

A fluid pressure sensing device adapted for installation in a wall portion of a fluid-containing vessel, said sensing device including an annular lip on one end thereof, a metallic diaphragm laser-fused to said annular lip to define the end surface of said sensing device, a central portion of said diaphragm being indented toward said sensing device, an intermediate annular portion of said diaphragm surrounding said central portion and protruding away from said sensing device, a peripheral annular portion of said diaphragm surrounding said intermediate portion and being substantially coplanar with said annular lip with at least the periphery of said diaphragm being generally flush with the interior surface of said wall portion of said vessel when said sensing device is installed therein.

Claim 12

The improvement according to claim 7, wherein said sensing device includes a fluid passageway therethrough communicating with said diaphragm, said passageway being adapted for exposing said diaphragm to an indicator fluid for measuring the fluid in said vessel, said fluid passageway including a nozzle located adjacent to, but spaced from, said diaphragm.

Claim 13

The improvement according to claim 8, wherein the spacing between said nozzle and said diaphragm is adjustable for pre-calibrating said sensing device to obtain a predetermined relationship between the pressure of said fluid in said vessel and the pressure of said indicator fluid.

Claim 14

In an apparatus for measuring fluid pressure in a fluid-containing vessel having a wall with a substantially smooth inside surface, a fluid pressure sensing device for measuring the pressure of the fluid in said vessel, the improvement wherein said wall of said vessel includes a beveled opening therein, said sensing device including a non-elastomeric diaphragm defining an end thereof and being exposed to said fluid in said vessel, said sensing device further including a sealing member thereon, said sealing member sealingly engaging said beveled opening substantially in the plane of the inside surface of said wall, and at least the periphery of said diaphragm being generally flush with the adjacent inside surface of said wall.

Claim 15

In an apparatus for measuring fluid pressure in a fluid-containing vessel having a wall with a substantially smooth inside surface, a fluid pressure sensing device for measuring the pressure of the fluid in said vessel, the improvement wherein said wall of said vessel includes a beveled opening therein, said sensing device including a non-elastomeric diaphragm defining an end thereof and being exposed to said fluid in said vessel, said sensing device further including a sealing member thereon, said sealing member sealingly engaging said beveled opening substantially in the plane of the inside surface of said wall, and at least the periphery of said diaphragm being generally flush with the adjacent inside surface of said wall.

Claim 16

An apparatus according to claim 10, wherein said diaphragm is composed of a metallic material.

Claim 17

An apparatus according to claim 11, wherein said diaphragm is secured to said sensing device by means of laser fusion.