Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
90 words
A slow wave transmission line for transmitting electronic signals comprising: a semi-insulating support substrate, line conducting elements overying at least one surface of said support substrate to define a signal propagation path, and thin metallic film disposed in said signal propagation path, wherein said thin metallic film has a thickness which is less than the skin depth of said signals within said thin metallic film and is sufficiently thin to increase the specific capacitance of said transmission line without decreasing the specific inductance at the operating frequency of the line.
Claim 2
Dependent Claim
90 words
A slow wave transmission line for transmitting electronic signals comprising: a semi-insulating support substrate, line conducting elements overying at least one surface of said support substrate to define a signal propagation path, and thin metallic film disposed in said signal propagation path, wherein said thin metallic film has a thickness which is less than the skin depth of said signals within said thin metallic film and is sufficiently thin to increase the specific capacitance of said transmission line without decreasing the specific inductance at the operating frequency of the line.
Claim 3
Dependent Claim
28 words
A transmission line as in claim 1 wherein said thin metallic film has a thickness less than 10% of the skin depth of the signals within said film.
Claim 4
Dependent Claim
20 words
A transmission line as in claim 1 wherein said thin metallic film is electrically isolated from all line conducting elements.
Claim 5
Dependent Claim
24 words
A transmission line as in claim 1 wherein said thin metallic film is formed in electrical contact with at least one line conducting element.
Claim 6
Dependent Claim
41 words
A transmission as in claim 1 wherein said line conducting elements are formed by a coplanar waveguide having a central conducting strip lying between outer conducting strips all of which strips are disposed on the same side of said substrate layer.
Claim 7
Dependent Claim
35 words
A transmission line as in claim 1 wherein said line conducting elements are provided by microstrip conductors consisting of a conducting strip overlying a first surface of said substrate which overlies a conducting ground plane.
Claim 8
Dependent Claim
18 words
A transmission line as in claim 5 wherein a semiconducting layer is included in the signal propagation path.
Claim 9
Dependent Claim
28 words
A transmission line as in claim 7 wherein said thin metallic film is insulated from said semiconducting layer by at least one depletion region in said semiconducting layer.
Claim 10
Dependent Claim
51 words
A transmission line as in claim 8 wherein said central conducting strip overlies a semiconducting strip and said thin metallic film is formed in two areas, each area being in contact with an outer conducting strip at one side and with a depletion region in said semiconducting strip at another side.