Auger spectroscopic technique measuring the number of electrons emitted from a surface as a function of the energy level of those electrons

Claim 2

In a method of Auger spectroscopy wherein a material surface whose characteristics are desired to be determined is bombarded by an electron beam and a resulting quantity of Auger electrons emitted from the surface are measured as a function of their energy level, the improvement comprising the steps of: (a) Determining a small region of interest of energy level for emitting electrons; (b) Determining a base line number of electrons emitted from the material that is at or near a lower edge of said energy region of interest; and (c) Determining the difference between the actual number of electrons emitted from the material at various energy levels within said region of interest and the baseline number of electrons, whereby these differences are accurately and quickly determined over the region of interest in order to detect the existence and shape of any small peaks in the number of electrons emitted within said small region.

Claim 3

The improved method according to claim 1 wherein steps (a), (b) and (c) are repeated for a second region of interest of electron energy that is non-overlapping with the first region.

Claim 4

The improved method according to claim 1 wherein each of the steps (b) and (c) are accomplished by detecting voltage level of a magnitude proportional to the number of electrons being detected to be emitted from said surface, said voltage level being referenced to a high voltage supply of an electron detecting system.

Claim 5

In an Auger spectroscopic system of a type having a detector of electrons at various selectable energy levels coupled with an electron multiplier that is operated with a high voltage supply, a voltage level of an electron collector at the output of the electron multiplier giving an indication of the number of electrons entering the detector at the selected energy level, an improved electronic system for detecting and measuring the number of electrons through said collector voltage level, comprising: means directly coupled to the electron collector for receiving a voltage signal between the collector and a positive terminal of the high voltage supply, said voltage signal being proportional to the number of Auger electrons being detected, means responsive to a designation of an operator for establishing a baseline reference voltage at one of many particular selectable levels representing a number of background electrons normally detected at the selected energy level, and means receiving said voltage signal and said baseline reference voltage for determining a difference voltage there between over at least a portion of the range of electron energy level selectable by said detector, whereby the existence of peaks in energy level can be identified with a high degree of accuracy.

Claim 6

In an Auger spectroscopic system of a type having a detector of electrons at various selectable energy levels coupled with an electron multiplier that is operated with a high voltage supply, a voltage level of an electron collector at the output of the electron multiplier giving an indication of the number of electrons entering the detector at the selected energy level, an improved electronic system for detecting and measuring the number of electrons through said collector voltage level, comprising: means directly coupled to the electron collector for receiving a voltage signal between the collector and a positive terminal of the high voltage supply, said voltage signal being proportional to the number of Auger electrons being detected, means responsive to a designation of an operator for establishing a baseline reference voltage at one of many particular selectable levels representing a number of background electrons normally detected at the selected energy level, and means receiving said voltage signal and said baseline reference voltage for determining a difference voltage there between over at least a portion of the range of electron energy level selectable by said detector, whereby the existence of peaks in energy level can be identified with a high degree of accuracy.

Claim 7

The improved detecting and measuring system according to claim 4 wherein claim said baseline reference voltage establishing means and said difference determining means are isolated from ground potential, each having a common connected to a positive terminal of said electron multiplier high voltage supply, and additional measuring and central circuits operating with reference to ground potential being connected therewith through electrical isolating elements.

Claim 8

For an Auger electron detector capable of measuring electrons emitted from a sample surface at various selectable energy levels, an improved electronic system for processing a signal output of the detector in order to determine the number of electrons entering said detector at various energy levels, comprising: means responsive to a designation for establishing a baseline reference signal corresponding to a particular number of background electrons normally detected at a particular energy level, and means receiving detector signal and said baseline signal for determining a difference there between over at least a portion of a range of electron energy level selectable by said detector, whereby peaks and energy levels can be measured quickly with a high degree of accuracy.

Claim 9

For an Auger electron detector capable of measuring electrons emitted from a sample surface at various selectable energy levels, an improved electronic system for processing a signal output of the detector in order to determine the number of electrons entering said detector at various energy levels, comprising: means responsive to a designation for establishing a baseline reference signal corresponding to a particular number of background electrons normally detected at a particular energy level, and means receiving detector signal and said baseline signal for determining a difference there between over at least a portion of a range of electron energy level selectable by said detector, whereby peaks and energy levels can be measured quickly with a high degree of accuracy.