Abstract A base member is disposed in a reaction chamber and a raw material gas is introduced thereinto which contains at least a compound gas of a first magnetic material, or the compound gas of the first magnetic material and an oxidizing or nitriding gas, or the compound gas of the first magnetic material and a compound gas of a second magnetic material. A plasma generating electrical energy is applied to the raw material gas to obtain therein a stream of plasma of the raw material gas, by which a stream of active reaction products is passed over the base member. As a result of this, the first magnetic material, an oxide or nitride of the first magnetic material, or a magnetic material containing the first and second magnetic materials is deposited on the base member, forming thereon a magnetic material layer which consists principally of the first magnetic material, the oxide or nitride of the first magnetic material, or the magnetic material containing the first and second materials.
A magnetic medium comprising: a base member; and a magnetic material layer formed thereon and composed principally of amorphous or semi-amorphous particles of a magnetic material selected from a group consisting of Fe, Ni, and Co.
Claim 2
Dependent Claim
36 words
A magnetic medium comprising: a base member; and a magnetic material layer formed thereon and composed principally of amorphous or semi-amorphous particles of a magnetic material selected from a group consisting of Fe, Ni, and Co.
Claim 3
Dependent Claim
38 words
A magnetic medium comprising: a base member; and a magnetic material layer formed thereon and composed principally of amorphous or semi-amorphous particles of nitride of a magnetic material selected from a group consisting of Fe, Ni and Co.
Claim 4
Dependent Claim
38 words
A magnetic medium comprising: a base member; and a magnetic material layer formed thereon and composed principally of amorphous or semi-amorphous particles of nitride of a magnetic material selected from a group consisting of Fe, Ni and Co.
Claim 5
Dependent Claim
58 words
A magnetic medium comprising: a base member; and a magnetic material layer formed thereon and composed principally of amorphous or semi-amorphous of a magnetic material mixture or alloy containing a first magnetic material selected from a group consisting of Fe, Ni, or Co and a second magnetic material selected from the remaining two of Fe, Ni and Co.
Claim 6
Dependent Claim
58 words
A magnetic medium comprising: a base member; and a magnetic material layer formed thereon and composed principally of amorphous or semi-amorphous of a magnetic material mixture or alloy containing a first magnetic material selected from a group consisting of Fe, Ni, or Co and a second magnetic material selected from the remaining two of Fe, Ni and Co.
Claim 7
Dependent Claim
33 words
A magnetic medium according to one of claims 1 to 3, wherein the amorphous or semi-amorphous particles are columnarshaped and diposited on the base member in a direction vertical to the surface thereof.
Claim 8
Dependent Claim
33 words
A magnetic medium according to one of claims 1 to 3, wherein the amorphous or semi-amorphous particles are acicularshaped and deposited on the base member in a direction lateral to the surface thereof.