Patent US4448876A successfully refreshed from Google Patents.
US4448876A
Expired / Lapsed
US
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Electron beam sensitive resist
Assignee: GAF Chemicals Corp
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Filing: 1982-12-06
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Granted: 1984-05-15
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Expires: 2002-12-06
Abstract
Abstract This invention describes an ionizing radiation sensitive material having high contrast, high sensitivity and comprised of a mixed half-ester or half amide of the reaction of an N-hydroxy or N-aminoalkyl amide and a hydroxy alkyl terminally unsaturated compound with an alkylvinyl ether-maleic anhydride copolymer. A typical material is made by reacting hydroxyethyl pyrrolidone and hydroxyethyl acrylate with octadecylvinyl ether-maleic anhydride copolymer.
Inventors
- 👤 Donald H. Lorenz
- 👤 Earl P. Williams
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 11:06
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0388
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
62 words
In a method of recording information whereby a beam of electrons is scanned across a surface of an electron beam sensitive material comprising a polymer which is the mixed half-ester reaction product of a reaction between the maleic anhydride of a copolymer of maleic anhydride and a vinyl monomer with a mixture of a terminally unsaturated alcohol compound and an N-hydroxyalkyl amide.
Claim 2
Dependent Claim
62 words
In a method of recording information whereby a beam of electrons is scanned across a surface of an electron beam sensitive material comprising a polymer which is the mixed half-ester reaction product of a reaction between the maleic anhydride of a copolymer of maleic anhydride and a vinyl monomer with a mixture of a terminally unsaturated alcohol compound and an N-hydroxyalkyl amide.
Claim 3
Dependent Claim
61 words
In a method of recording information whereby a beam of electrons is scanned across a surface of an electron beam sensitive material comprising a polymer which is the mixed half-ester reaction product of a reaction between the maleic anhydride of a copolymer of maleic anhydride and a vinyl monomer with a mixture of terminally unsaturated alcohol compound and an N-aminoalkyl amide.
Claim 4
Dependent Claim
61 words
In a method of recording information whereby a beam of electrons is scanned across a surface of an electron beam sensitive material comprising a polymer which is the mixed half-ester reaction product of a reaction between the maleic anhydride of a copolymer of maleic anhydride and a vinyl monomer with a mixture of terminally unsaturated alcohol compound and an N-aminoalkyl amide.
Claim 5
Dependent Claim
11 words
The method of claim 1 wherein the amide is hydroxyalkyl pyrrolidone.
Claim 6
Dependent Claim
11 words
The method of claim 2 wherein the amide is aminoalkyl pyrrolidone.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-15 | 1987-11-14 | 1988-05-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-15 | 1991-11-14 | 1992-05-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-15 | 1995-11-14 | 1996-05-15 | $7700.00 | Window Closed / Lapsed |