US4448875A
Expired / Lapsed
US
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Electron beam sensitive mixture resist
Assignee: GAF Chemicals Corp
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Filing: 1983-03-31
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Granted: 1984-05-15
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Expires: 2003-03-31
Abstract
Abstract This invention describes an ionizing radiation sensitive material having high contrast, high sensitivity and comprised of the mixture of the half-ester or half amide product of reaction of an N-hydroxy or N-aminoalkyl amide with an alkylvinyl ether-maleic anhydride copolymer and the products of reaction of a hydroxy alkyl terminally unsaturated compound with an alkylvinyl ether-maleic anhydride copolymer. A typical material is made by mixing the product of reaction of hydroxyethyl pyrrolidone and octadecylvinyl ether--maleic anhydride copolymer with the products of reaction of the mixture of hydroxyethyl acrylate with octadecylvinyl ether-maleic anhydride copolymer.
Inventors
- 👤 David F. Lewis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 21:59
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0388; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
58 words
A high sensitivity electron beam resist material which is the mixture of the reaction product consisting essentially of a mixture of an alkyl vinyl ether-maleic anhydride copolymer with a terminally unsaturated alcohol and the reaction product consisting essentially of a compound selected from the group consisting of N-hydroxyalkyl amides and N-aminoalkyl amides mixed with alkylvinyl ether-maleic anhydride copolymer.
Claim 2
Dependent Claim
58 words
A high sensitivity electron beam resist material which is the mixture of the reaction product consisting essentially of a mixture of an alkyl vinyl ether-maleic anhydride copolymer with a terminally unsaturated alcohol and the reaction product consisting essentially of a compound selected from the group consisting of N-hydroxyalkyl amides and N-aminoalkyl amides mixed with alkylvinyl ether-maleic anhydride copolymer.
Claim 3
Dependent Claim
49 words
A high sensitivity electron beam resist material comprising the mixture of the reaction product consisting essentially of a mixture of an N-hydroxyalkyl amide with alkylvinyl ether-maleic anhydride copolymer and the reaction product consisting essentially of a mixture of a terminally unsaturated alcohol with an alkyl vinyl ether-maleic anhydride copolymer.
Claim 4
Dependent Claim
49 words
A high sensitivity electron beam resist material comprising the mixture of the reaction product consisting essentially of a mixture of an N-hydroxyalkyl amide with alkylvinyl ether-maleic anhydride copolymer and the reaction product consisting essentially of a mixture of a terminally unsaturated alcohol with an alkyl vinyl ether-maleic anhydride copolymer.
Claim 5
Dependent Claim
17 words
A resist material according to claim 2 in which said N-hydroxyalkyl amide is an N-hydroxyalkyl cyclic amide.
Claim 6
Dependent Claim
15 words
A resist material according to claim 3 in which said amide is a hydroxyalkyl pyrrolidone.
Claim 7
Dependent Claim
14 words
A resist material according to claim 3 in which said amide is a hydroxyalkyl-α-caprolactam.
Claim 8
Dependent Claim
21 words
A resist material according to claim 3 in which said amide is hydroxyethyl pyrrolidone, hydroxypropyl pyrrolidone, hydroxybutylpyrrolidone, hydroxyethyl-α-caprolactam, hydroxypropyl-α-caprolactam or hydroxybutyl-α-caprolactam.
Claim 9
Dependent Claim
17 words
A resist material according to claim 2 in which said N-hydroxyalkyl amide is an N-hydroxyalkyl linear amide.
Claim 10
Dependent Claim
17 words
A resist material according to claim 7 in which said amide is N-hydroxyethyl acetamide, or N-hydroxyethyl propionamide.
Claim 11
Dependent Claim
26 words
A resist material according to claim 2 in which said terminally unsaturated alcohol is hydroxyethyl acrylate, hydroxyethyl methacrylate, 3-hydroxypropyl acrylate, 3-hydroxypropylmethacrylate, 4-hydroxybutyl acrylate or 4-hydroxybutyl methacrylate.
Claim 12
Dependent Claim
35 words
A resist material according to claim 2 in which said hydroxyalkyl amide and terminally unsaturated alcohol reaction products are present in a molar ratio of about 40:60 to 60:40 to one another in said mixture.
Claim 13
Dependent Claim
35 words
A resist material according to claim 2 in which said hydroxyalkyl amide and terminally unsaturated alcohol reaction products are present in a molar ratio of about 10:90 to 90:10 to one another in said mixture.
Claim 14
Dependent Claim
33 words
A resist material according to claim 2 in which said hydroxyalkyl amide and terminally unsaturated alcohol reaction products are present in a molar ratio of about 50:50 to one another in said mixture.
Claim 15
Dependent Claim
51 words
A high sensitivity electron beam resist material comprising the mixture of the reaction product consisting essentially of a mixture of an N-aminoalkyl amide with an alkyl vinyl ether-maleic anhydride copolymer and the product of reaction consisting essentially of a mixture of a terminally unsaturated alcohol with an alkylvinyl ether-maleic anhydride copolymer.
Claim 16
Dependent Claim
51 words
A high sensitivity electron beam resist material comprising the mixture of the reaction product consisting essentially of a mixture of an N-aminoalkyl amide with an alkyl vinyl ether-maleic anhydride copolymer and the product of reaction consisting essentially of a mixture of a terminally unsaturated alcohol with an alkylvinyl ether-maleic anhydride copolymer.
Claim 17
Dependent Claim
17 words
A resist material according to claim 13 in which said N-aminoalkyl amide is an N-aminoalkyl cyclic amide.
Claim 18
Dependent Claim
15 words
A resist material according to claim 14 in which said amide is a aminoalkyl pryrolodone.
Claim 19
Dependent Claim
14 words
A resist material according to claim 14 in which said amide is a aminoalkyl-α-caprolactam.
Claim 20
Dependent Claim
21 words
A resist material according to claim 14 in which said amide is aminoethyl pyrrolidone, aminopropyl pyrrolidone, aminobutylpyrrolidone, aminoethyl-α-caprolactam, aminopropyl-α-caprolactam or aminobutyl-α-caprolactam.
Claim 21
Dependent Claim
17 words
A resist material according to claim 14 in which said N-aminoalkyl amide is an N-aminoalkyl linear amide.
Claim 22
Dependent Claim
17 words
A resist material according to claim 18 in which said amide is, N-aminoethyl acetamide, or N-aminoethyl propionamide.
Claim 23
Dependent Claim
26 words
A resist material according to claim 13 in which said terminally unsaturated alcohol is hydroxyethyl acrylate, hydroxyethyl methacrylate, 3-hydroxypropyl acrylate, 3-hydroxypropylmethacrylate, 4-hydroxybutyl acrylate or 4-hydroxybutyl methacrylate.
Claim 24
Dependent Claim
35 words
A resist material according to claim 13 in which said aminoalkyl amide and terminally unsaturated alcohol reaction products are present in a molar ratio of about 40:60 to 60:40 to one another in said mixture.
Claim 25
Dependent Claim
35 words
A resist material according to claim 13 in which said aminoalkyl amide and terminally unsaturated alcohol reaction products are present in a molar ratio of about 10:90 to 90:10 to one another in said mixture.
Claim 26
Dependent Claim
33 words
A resist material according to claim 13 in which said aminoalkyl amide and terminally unsaturated alcohol reaction products are present in a molar ratio of about 50:50 to one another in said mixture.
Claim 27
Dependent Claim
24 words
A resist material according to claim 2 in which the alkyl group of said alkylvinyl ether-maleic anhydride copolymer is a long chain alkyl group.
Claim 28
Dependent Claim
17 words
A resist material according to claim 24 in which said alkyl group has about 10-20 carbon atoms.
Claim 29
Dependent Claim
14 words
A resist material according to claim 24 in which said alkyl group is octadecyl.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-15 | 1987-11-14 | 1988-05-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-15 | 1991-11-14 | 1992-05-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-15 | 1995-11-14 | 1996-05-15 | $7700.00 | Window Closed / Lapsed |