US4445775A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Registration blocks for a photomask assembly
Assignee: PPG Industries Inc
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Filing: 1982-03-29
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Granted: 1984-05-01
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Expires: 2002-03-29
Abstract
Abstract An alignment system for providing simple, efficient, repeatable and precise registration of a pair of plates in a photomask assembly for use in photolithographic imaging processes is disclosed, wherein registration blocks are attached to the edges of one plate and block stops are attached to the other plate in appropriate positions to engage said registration blocks when the plates are brought into parallel facing relationship in contact with a substrate to be processed.
Inventors
- 👤 Richard R. Tongel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 01:37
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F9/703; G03F9/7049; G03F9/7053; H; H05; H05K; H05K3/00; H05K3/0073; H05K3/0082
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
82 words
A precisely registerable assembly for use in a photolithographic imaging process which comprises: a. a first rigid plate to which are affixed a plurality of registration blocks about the perimeter thereof; and b. a second plate to which are affixed an equal number of block stops positioned to engage said registration blocks when said plates are brought into facing spaced relationship, wherein the number of blocks and stops is sufficient to prevent relative lateral movement of the plates in their respective planes.
Claim 2
Dependent Claim
82 words
A precisely registerable assembly for use in a photolithographic imaging process which comprises: a. a first rigid plate to which are affixed a plurality of registration blocks about the perimeter thereof; and b. a second plate to which are affixed an equal number of block stops positioned to engage said registration blocks when said plates are brought into facing spaced relationship, wherein the number of blocks and stops is sufficient to prevent relative lateral movement of the plates in their respective planes.
Claim 3
Dependent Claim
11 words
An article according to claim 1, wherein said plates are glass.
Claim 4
Dependent Claim
19 words
An article according to claim 2, wherein said first plate is attached to said second plate by hinge means.
Claim 5
Dependent Claim
21 words
An article according to claim 3, wherein said glass plates are joined by hinge means comprising a flexible polymeric hinge material.
Claim 6
Dependent Claim
34 words
An article according to claim 4, wherein said hinge means further comprises a hinge plate flexibly bonded to said first plate by means of said hinge material and fixedly bonded to said second plate.
Claim 7
Dependent Claim
17 words
An article according to claim 4, wherein at least one of said plates is a glass photomask.
Claim 8
Dependent Claim
134 words
A precisely registerable, hinged photomask assembly for use in a photolithographic imaging process which comprises: a. a first glass plate attached along one edge to hinge means; b. affixed to said first glass plate a plurality of registration blocks attached about the perimeter of said plate elsewhere than along the edge attached to said hinge means; c. a second glass plate joined to said first plate by said hinge means; d. affixed to said second glass plate an equal number of block stops positioned to engage said registration blocks when said first and second plates are in facing relation spaced at a distance substantially equivalent to the thickness of substrates to be processed, wherein the number of blocks and stops is sufficient to prevent relative lateral movement of said plates in their respective planes.
Claim 9
Dependent Claim
134 words
A precisely registerable, hinged photomask assembly for use in a photolithographic imaging process which comprises: a. a first glass plate attached along one edge to hinge means; b. affixed to said first glass plate a plurality of registration blocks attached about the perimeter of said plate elsewhere than along the edge attached to said hinge means; c. a second glass plate joined to said first plate by said hinge means; d. affixed to said second glass plate an equal number of block stops positioned to engage said registration blocks when said first and second plates are in facing relation spaced at a distance substantially equivalent to the thickness of substrates to be processed, wherein the number of blocks and stops is sufficient to prevent relative lateral movement of said plates in their respective planes.
Claim 10
Dependent Claim
44 words
An article according to claim 7, wherein said hinge means comprises a flexible polymeric hinge joining said first glass plate and a hinge plate which is affixed to said second glass plate, and at least one of said glass plates comprises a photomask image.
Claim 11
Dependent Claim
183 words
A precisely registerable, hinged photomask assembly for use in a photolithographic imaging process which comprises: a. a first glass plate attached along one edge to hinge means; b. affixed to said first glass plate a plurality of registration blocks attached about the perimeter of said plate elsewhere than along the edge attached to said hinge means; c. a second glass plate joined to said first plate by said hinge means; and d. affixed to said second glass plate an equal number of block stops positioned to engage said registration blocks when said first and second plates are in facing relation spaced at a distance substantially equivalent to the thickness of substrates to be processed, wherein the number of blocks and stops is sufficient to prevent lateral movement of said plates in their respective planes, said hinge means comprises a flexible polymeric hinge which is a silicone composition joining said first glass plate and a hinge plate which is affixed to said second glass plate, and at least one of said glass plates comprises a photomask image comprising a stain pattern within the glass.
Claim 12
Dependent Claim
183 words
A precisely registerable, hinged photomask assembly for use in a photolithographic imaging process which comprises: a. a first glass plate attached along one edge to hinge means; b. affixed to said first glass plate a plurality of registration blocks attached about the perimeter of said plate elsewhere than along the edge attached to said hinge means; c. a second glass plate joined to said first plate by said hinge means; and d. affixed to said second glass plate an equal number of block stops positioned to engage said registration blocks when said first and second plates are in facing relation spaced at a distance substantially equivalent to the thickness of substrates to be processed, wherein the number of blocks and stops is sufficient to prevent lateral movement of said plates in their respective planes, said hinge means comprises a flexible polymeric hinge which is a silicone composition joining said first glass plate and a hinge plate which is affixed to said second glass plate, and at least one of said glass plates comprises a photomask image comprising a stain pattern within the glass.
Claim 13
Dependent Claim
31 words
An article according to claim 7, wherein said registration block and said block stop are produced from a durable material selected from the group consisting of brass, stainless steel and nylon.
Claim 14
Independent Claim
94 words
A method for precise registration of a pair of plates in a photomask assembly for use in a photolithographic imaging process comprising the steps of: a. affixing to designated locations on a first plate a plurality of registration blocks; b. affixing to corresponding locations on a second plate an equal number of block stops; c. bringing said plates together, whereby said blocks engage said stops to register said plates in spaced facing relation, wherein the number of blocks and stops is sufficient to prevent relative lateral movement of said plates in their respective planes.
Claim 15
Independent Claim
94 words
A method for precise registration of a pair of plates in a photomask assembly for use in a photolithographic imaging process comprising the steps of: a. affixing to designated locations on a first plate a plurality of registration blocks; b. affixing to corresponding locations on a second plate an equal number of block stops; c. bringing said plates together, whereby said blocks engage said stops to register said plates in spaced facing relation, wherein the number of blocks and stops is sufficient to prevent relative lateral movement of said plates in their respective planes.
Claim 16
Dependent Claim
11 words
The method according to claim 11, wherein said plates are glass.
Claim 17
Independent Claim
116 words
A method for precise registration of a pair of glass plates in a photomask assembly for use in a photolithographic imaging process comprising the steps of: a. affixing to designated locations on a first plate a plurality of registration blocks; b. affixing to corresponding locations on a second plate an equal number of block stops; c. bringing said plates together, whereby said blocks engage said stops to register said plates in spaced facing relation, wherein the number of blocks and stops is sufficient to prevent relative lateral movement of said plates in their respective planes and at least one of said glass plates comprises a photomask image present as a stain pattern within said glass plate.
Claim 18
Independent Claim
116 words
A method for precise registration of a pair of glass plates in a photomask assembly for use in a photolithographic imaging process comprising the steps of: a. affixing to designated locations on a first plate a plurality of registration blocks; b. affixing to corresponding locations on a second plate an equal number of block stops; c. bringing said plates together, whereby said blocks engage said stops to register said plates in spaced facing relation, wherein the number of blocks and stops is sufficient to prevent relative lateral movement of said plates in their respective planes and at least one of said glass plates comprises a photomask image present as a stain pattern within said glass plate.
Claim 19
Dependent Claim
13 words
The method according to claim 13, wherein both glass plates are glass photomasks.
Claim 20
Dependent Claim
15 words
The method according to claim 12, wherein said glass plates are joined by hinge means.
Claim 21
Dependent Claim
16 words
The method according to claim 15, wherein said hinge means comprises a flexible polymeric hinge material.
Claim 22
Dependent Claim
15 words
The method according to claim 16, wherein said polymeric hinge material is a silicone composition.
Claim 23
Dependent Claim
32 words
The method according to claim 16, wherein said hinge means further comprises a hinge plate flexibly joined to said first plate by said polymeric hinge material and affixed to said second plate.
Claim 24
Dependent Claim
14 words
The method according to claim 8, wherein said first plate is a glass photomask.
Claim 25
Dependent Claim
14 words
The method according to claim 19, wherein said second plate is a glass photomask.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-01 | 1987-10-31 | 1988-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-01 | 1991-10-31 | 1992-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-01 | 1995-10-31 | 1996-05-01 | $7700.00 | Window Closed / Lapsed |