US4445384A
Expired / Lapsed
US
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Piezoelectric pressure sensor
Assignee: Honeywell Inc
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Filing: 1982-03-30
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Granted: 1984-05-01
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Expires: 2002-03-30
Abstract
Abstract A pressure sensor comprising a piezoelectric material formed in a geometry which provides a piezoelectric output signal when subjected to a pressure. The piezoelectric material also has a pyroelectric output signal. The present sensor further comprises conductive contacts having a geometry for enhancing the piezoelectric output signal and for substantially eliminating the pyroelectric output signal.
Inventors
- 👤 Michele Royer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 04:50
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0041; G01L9/008; G01L9/0072; G01L9/0073
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
88 words
A pressure sensor comprising: piezoelectric means comprising a piezoelectric material for providing a piezoelectric output signal when subjected to a pressure and for providing an undesirable pyroelectric output signal, the piezoelectric means having first and second surfaces; and electrode means comprising a first contact covering at least a portion of the first surface, the electrode means further comprising a pair of contacts covering a portion of the second surface, the contacts having a geometry for enhancing the piezoelectric output signal and for substantially eliminating the pyroelectric output signal.
Claim 2
Dependent Claim
88 words
A pressure sensor comprising: piezoelectric means comprising a piezoelectric material for providing a piezoelectric output signal when subjected to a pressure and for providing an undesirable pyroelectric output signal, the piezoelectric means having first and second surfaces; and electrode means comprising a first contact covering at least a portion of the first surface, the electrode means further comprising a pair of contacts covering a portion of the second surface, the contacts having a geometry for enhancing the piezoelectric output signal and for substantially eliminating the pyroelectric output signal.
Claim 3
Dependent Claim
14 words
The sensor of claim 1 wherein the pair of contacts have a concentric geometry.
Claim 4
Dependent Claim
15 words
The sensor of claim 2 wherein the pair of contacts have substantially equal surface areas.
Claim 5
Dependent Claim
36 words
The sensor of claim 3 wherein: the electrode means comprises a diaphragm of semiconductor material etched out of a semiconductor body; and the pair of contacts are located between the piezoelectric means and the semiconductor body.
Claim 6
Dependent Claim
11 words
The sensor of claim 4 wherein the piezoelectric material comprises ZnO.
Claim 7
Dependent Claim
15 words
The sensor of claim 1 wherein the pair of contacts have substantially equal surface areas.
Claim 8
Dependent Claim
36 words
The sensor of claim 6 wherein: the electrode means comprises a diaphragm of semiconductor material etched out of a semiconductor body; and the pair of contacts are located between the piezoelectric means and the semiconductor body.
Claim 9
Dependent Claim
11 words
The sensor of claim 7 wherein the piezoelectric material comprises ZnO.
Claim 10
Dependent Claim
36 words
The sensor of claim 1 wherein: the electrode means comprises a diaphragm of semiconductor material etched out of a semiconductor body; and the pair of contacts are located between the piezoelectric means and the semiconductor body.
Claim 11
Dependent Claim
11 words
The sensor of claim 9 wherein the piezoelectric material comprises ZnO.
Claim 12
Dependent Claim
11 words
The sensor of claim 1 wherein the piezoelectric material comprises ZnO.
References Cited (Backward Citations)
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US3940974A
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US4060729A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-01 | 1987-10-31 | 1988-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-01 | 1991-10-31 | 1992-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-01 | 1995-10-31 | 1996-05-01 | $7700.00 | Window Closed / Lapsed |