Shaping aperture for a charged particle forming system

Claim 2

A shaping aperture used in a charged particle forming system and provided with a slit for shaping the cross section of a charged particle beam emitted, comprising: at least two thin plates, each provided with a through-hole for passing said charged particle beam therethrough, said thin plates being piled and fixed in contact with each other so as to form a shaping slit of a desired form defined exclusively by linear edge portions of the thin plates bounding said through-holes.

Claim 3

A shaping aperture according to claim 1, wherein said through-hole has the form of a rectangle.

Claim 4

A shaping aperture according to claim 1, wherein said thin plates have the same form.

Claim 5

A shaping aperture according to claim 2, wherein said thin plates have the same form.

Claim 6

In a charged particle forming system comprising a source for producing a charged particle beam, first and second shaping apertures mounted in a column so as to be situated in alignment along the path of the charged particle beam produced by said source for shaping the cross section thereof, an electrostatic deflector disposed between said first and second shaping apertures for deflecting the charged particle beam, passing through said first shaping aperture, onto said second shaping aperture, and a target plane to be exposed with a shaped charged particle beam from said second shaping aperture, each of said first and second shaping apertures comprising at least two thin plates, each of which is provided with a through-hole for passing said charged particle beam therethrough, said thin plates of each shaping aperture being piled and fixed in direct contact with each other so as to form a shaping slit of a desired pattern defined only by linear edge portions of the thin plates bounding the through-holes therein.

Claim 7

In a charged particle forming system comprising a source for producing a charged particle beam, first and second shaping apertures mounted in a column so as to be situated in alignment along the path of the charged particle beam produced by said source for shaping the cross section thereof, an electrostatic deflector disposed between said first and second shaping apertures for deflecting the charged particle beam, passing through said first shaping aperture, onto said second shaping aperture, and a target plane to be exposed with a shaped charged particle beam from said second shaping aperture, each of said first and second shaping apertures comprising at least two thin plates, each of which is provided with a through-hole for passing said charged particle beam therethrough, said thin plates of each shaping aperture being piled and fixed in direct contact with each other so as to form a shaping slit of a desired pattern defined only by linear edge portions of the thin plates bounding the through-holes therein.

Claim 8

A shaping aperture according to claim 5, wherein each of said thin plates is provided with a projection or a groove for aligning the thin plates in a desired positional relation with respect to each other.

Claim 9

A shaping aperture according to claim 5, wherein said through-hole has the form of a rectangle.

Claim 10

A shaping aperture according to claim 5, wherein said thin plates have the same form.

Claim 11

A shaping aperture according to claim 7, wherein said thin plates have the same form.

Claim 12

A shaping aperture according to claim 5, wherein each of said thin plates is provided with a projection or a groove for indicating the positional relation between said thin plates.

Claim 13

A shaping aperture according to claim 7, wherein each of said thin plates is provided with a projection or a groove for aligning the thin plates in a desired positional relation with respect to each other.

Claim 14

A shaping aperture according to claim 8, wherein each of said thin plates is provided with a projection or a groove for aligning the thin plates in a desired positional relation with respect to each other.

Claim 15

A shaping aperture according to claim 6, wherein each of said thin plates is provided with a projection or a groove for aligning the thin plates in a desired positional relation with respect to each other.