Film forming method

Claim 2

A film forming method for forming a film on a substrate comprising the steps of: preparing a target plate having at least a center region and a second region around said center region of different materials, and forming a plasma above said target plate for sputtering said materials out of said target plate and depositing onto said substrate, and controlling excitation current flowing in a solenoid to shift said plasma across a boundary between said two regions in a planar magnetron sputtering structure whereby said film is provided with desired composition of said materials.

Claim 3

A film forming method according to claim 1 further comprising a step of heat-treating to form said film of an alloy.

Claim 4

A film forming method according to claim 2 wherein said materials include a refractory metal and a Si material and said alloy film is a refractory metal silicide film.

Claim 5

A film forming method according to claim 3 wherein said center and second regions are concentric in said target plate.

Claim 8

A method for forming a refractory metal alloy film according to claim 5, wherein said other metal material is Si.

Claim 9

A method for forming a refractory metal alloy film according to claim 6, wherein said refractory material is any one of Mo, Ta, Wo, Cr, Nb, V, Zr, Tc, Ru, Rh, Hf, Ir, Os and Re.

Claim 10

A method for forming a refractory metal alloy film accoridng to claim 7, wherein said refractory metal alloy film is refractory metal silicide.

Claim 13

A method of forming a film in a planar magnetron sputtering apparatus according to claim 9, wherein said first and second materials are silicon and refractory metal.

Claim 14

A method of forming a film in a planar magnetron sputtering apparatus according to claim 10, wherein a thickness of each of said two layers of the materials deposited alternately is below 500A.

Claim 15

A method of forming a film in a planar magnetron sputtering apparatus according to claim 11, further comprising a step of heat-treating said film to change said layers into refractory metal silicide.

Claim 16

A film forming method for forming a film on a substrate in a planar magnetron sputtering apparatus provided with at least two magnetic field generating means, including at least one solenoid to be energized by a controlled current source, means for magnetically coupling said at least two magnetic field generating means to form an integrated magnetic flux source together with said at least two magnetic field generating means including a magnetic member bridging said at least two magnetic field generating means and formed of a soft magnetic material, and said at least two magnetic field generating means being disposed on one side of the magnetic coupling means, and means for supplying a controlled current to said at least one solenoid for generating controlled magnetic flux so as to control a plasma confined in said integrated magnetic flux at least in the neighborhood of said integrated magnetic flux source, said method comprising the steps of: preparing a target plate having a center, a second and a third region, each of which being arranged concentrically in the order thereof, said second region being made of a material different from that of the other regions, flowing first exciting current in said solenoid to magnetically shift said plasma to a first position substantially above said center region for sputtering mainly said first material, flowing second exciting current in said solenoid to shift said plasma to a second position substantially above said second region for sputtering mainly said second material, and flowing third exciting current in said solenoid to shift said plasma to a position substantially above said third region for sputtering mainly said third material, whereby said substrate is provided with repetitive layers of said materials and said film has desired composition of said materials after a heat-treatment.

Claim 17

A film forming method for forming a film on a substrate in a planar magnetron sputtering apparatus provided with at least two magnetic field generating means, including at least one solenoid to be energized by a controlled current source, means for magnetically coupling said at least two magnetic field generating means to form an integrated magnetic flux source together with said at least two magnetic field generating means including a magnetic member bridging said at least two magnetic field generating means and formed of a soft magnetic material, and said at least two magnetic field generating means being disposed on one side of the magnetic coupling means, and means for supplying a controlled current to said at least one solenoid for generating controlled magnetic flux so as to control a plasma confined in said integrated magnetic flux at least in the neighborhood of said integrated magnetic flux source, said method comprising the steps of: preparing a target plate having a center, a second and a third region, each of which being arranged concentrically in the order thereof, said second region being made of a material different from that of the other regions, flowing first exciting current in said solenoid to magnetically shift said plasma to a first position substantially above said center region for sputtering mainly said first material, flowing second exciting current in said solenoid to shift said plasma to a second position substantially above said second region for sputtering mainly said second material, and flowing third exciting current in said solenoid to shift said plasma to a position substantially above said third region for sputtering mainly said third material, whereby said substrate is provided with repetitive layers of said materials and said film has desired composition of said materials after a heat-treatment.

Claim 18

A film forming method according to claim 13 wherein said third material is same as said first material.

Claim 19

A film forming method for forming a film on a substrate in a planar magnetron sputtering apparatus provided with at least two magnetic field generating means, including at least one solenoid to be energized by a controlled current source, means for magnetically coupling said at least two magnetic field generating means to form an integrated magnetic flux source together with said at least two magnetic field generating means including a magnetic member bridging said at least two magnetic field generating means and formed of a soft material, and said at least two magnetic field generating means being disposed on one side of the magnetic coupling means, and means for supplying a controlled current to said at least one solenoid for generating controlled magnetic flux so as to control a plasma confined in said integrated magnetic flux at least in the neighborhood of said integrated magnetic flux source, said method comprising the steps of: preparing a target plate having a center, a second and a third region, each of which being arranged concentrically in the order thereof, said center and third regions being formed of a first material, said second region being formed of a second material different from said first material, flowing a first exciting current in said solenoid to magnetically shift said plasma to a first position above a first boundary between said center and second regions for sputtering both of said two materials, and flowing second exciting current in said solenoid to shift said plasma to a second position above a second boundary between said second and third regions for sputtering both of said two materials, whereby said film is provided with a uniform thickness of said two materials.

Claim 20

A film forming method for forming a film on a substrate in a planar magnetron sputtering apparatus provided with at least two magnetic field generating means, including at least one solenoid to be energized by a controlled current source, means for magnetically coupling said at least two magnetic field generating means to form an integrated magnetic flux source together with said at least two magnetic field generating means including a magnetic member bridging said at least two magnetic field generating means and formed of a soft material, and said at least two magnetic field generating means being disposed on one side of the magnetic coupling means, and means for supplying a controlled current to said at least one solenoid for generating controlled magnetic flux so as to control a plasma confined in said integrated magnetic flux at least in the neighborhood of said integrated magnetic flux source, said method comprising the steps of: preparing a target plate having a center, a second and a third region, each of which being arranged concentrically in the order thereof, said center and third regions being formed of a first material, said second region being formed of a second material different from said first material, flowing a first exciting current in said solenoid to magnetically shift said plasma to a first position above a first boundary between said center and second regions for sputtering both of said two materials, and flowing second exciting current in said solenoid to shift said plasma to a second position above a second boundary between said second and third regions for sputtering both of said two materials, whereby said film is provided with a uniform thickness of said two materials.

Claim 21

A film forming method for forming a film on a substrate according to claim 3, wherein said first material is silicon and said second material is refractory metal including any one of Mo, Ta, Wo, Cr, Nb, V, Zr, Tc, Ru, Rh, Hf, Ir, Os and Re.