US4444467A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Coated laser mirror and method of coating
Assignee: RTX Corp
•
Filing: 1981-08-10
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Granted: 1984-04-24
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Expires: 2001-08-10
Abstract
Abstract A method of applying an intermediate bond coat on a laser mirror substrate is described comprising surface polishing the mirror substrate followed by depositing a layer of amorphous silicon, amorphous germanium, or mixtures thereof on the mirror surface, and polishing the thus coated mirror surface to a substantially void-free surface finish. Laser mirror substrates such as graphite fiber reinforced glass, molybdenum and silicon carbide coated by such process are also described.
Inventors
- 👤 Alexander J. Shuskus
- 👤 Melvyn E. Cowher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 14:53
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/08; C; C03; C03C; C03C17/00; C03C17/06; C03C17/09; C03C17/22; G02B7/00; G02B7/18; G02B7/182; H; H01; H01S; H01S3/00; H01S3/05; H01S3/08; H01S3/08059; C03C2217/00; C03C2217/20; C03C2217/25; C03C2217/268; C03C2217/28; C03C2217/282; C03C2217/29; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/152; C03C2218/153; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
39 words
A laser mirror substrate suitable for subsequent deposition of a laser radiation reflecting outer layer comprising a laser mirror substrate coated with an intermediate bonding layer of plasma enhanced chemical vapor deposited amorphous silicon, amorphous germanium, or mixtures thereof.
Claim 2
Dependent Claim
39 words
A laser mirror substrate suitable for subsequent deposition of a laser radiation reflecting outer layer comprising a laser mirror substrate coated with an intermediate bonding layer of plasma enhanced chemical vapor deposited amorphous silicon, amorphous germanium, or mixtures thereof.
Claim 3
Dependent Claim
18 words
The article of claim 1 wherein the mirror substrate comprises graphite fiber reinforced glass, silicon carbide or molybdenum.
Claim 4
Dependent Claim
12 words
The article of claim 1 wherein the intermediate coating is amorphous silicon.
Claim 5
Dependent Claim
21 words
The article of claims 1, 2 or 3 wherein the intermediate coating is overcoated with a laser radiation reflecting outer layer.
Claim 6
Dependent Claim
14 words
The mirror of claim 3 wherein the coating is at least 15 microns thick.
Claim 7
Independent Claim
61 words
A method of coating a laser mirror substrate with an intermediate bonding layer comprising surface polishing the mirror surface, baking the polished mirror surface to remove impurities, depositing a layer of amorphous silicon, amorphous germanium, or mixtures thereof on the mirror surface by plasma enhanced chemical vapor deposition, and polishing the coated mirror to a substantially void-free, highly polished surface finish.
Claim 8
Independent Claim
61 words
A method of coating a laser mirror substrate with an intermediate bonding layer comprising surface polishing the mirror surface, baking the polished mirror surface to remove impurities, depositing a layer of amorphous silicon, amorphous germanium, or mixtures thereof on the mirror surface by plasma enhanced chemical vapor deposition, and polishing the coated mirror to a substantially void-free, highly polished surface finish.
Claim 9
Dependent Claim
22 words
The mirror of claim 6 wherein after polishing, the surface has a surface finish of about 10 to about 15 Å rms.
Claim 10
Dependent Claim
14 words
The method of claim 6 wherein the coating is at least 15 microns thick.
Claim 11
Dependent Claim
22 words
The method of claim 6 wherein after polishing, a laser radiation reflecting outer layer is deposited on the substantially void-free surface finish.
Claim 12
Dependent Claim
18 words
The method of claim 6 wherein the mirror substrate comprises graphite fiber reinforced glass, silicon carbide or molybdenum.
Claim 13
Dependent Claim
12 words
The method of claim 6 wherein the intermediate coating is amorphous silicon.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-04-24 | 1987-10-24 | 1988-04-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-04-24 | 1991-10-24 | 1992-04-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-04-24 | 1995-10-24 | 1996-04-24 | $7700.00 | Window Closed / Lapsed |