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US4439685A
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Corpuscular beam blanking system
Assignee: Siemens AG
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Filing: 1981-08-06
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Granted: 1984-03-27
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Expires: 2001-08-06
Abstract
Abstract A corpuscular beam blanking system for generating high-frequency corpuscular pulses with monochromator effect utilizes a three-electrode Einzel-lens designed as a filter lens and which is employed as a blanking lens. A "breathing" effect of a probe spot of the corpuscular beam is avoided and a monochromator effect is achieved with a blanking pin-hole diaphragm positioned after the blanking lens.
Inventors
- 👤 Erich Plies
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:04
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/10; H01J37/12; H01J37/045; H01J37/30; H01J37/3002; H01J37/3007
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
94 words
A corpuscular beam blanking system, comprising: a source; a target; an electrostatic three-electrode Einzel-lens as a blanking lens between the source and target whose electrodes are designed in the manner of a filter lens; a center electrode of the Einzel-lens being provided at a high voltage and having a blanking signal supplied to it via a capacitor; and said blanking lens being inserted in the beam path in such manner that a nodal point K G (here≡principal point H G ) of a target side coincides with a virtual source image of the system.
Claim 2
Dependent Claim
94 words
A corpuscular beam blanking system, comprising: a source; a target; an electrostatic three-electrode Einzel-lens as a blanking lens between the source and target whose electrodes are designed in the manner of a filter lens; a center electrode of the Einzel-lens being provided at a high voltage and having a blanking signal supplied to it via a capacitor; and said blanking lens being inserted in the beam path in such manner that a nodal point K G (here≡principal point H G ) of a target side coincides with a virtual source image of the system.
Claim 3
Dependent Claim
21 words
A corpuscular beam blanking system according to claim 1 wherein the blanking lens has small radial dimensions and a low capacitance.
Claim 4
Dependent Claim
24 words
A corpuscular beam blanking system according to claim 1 wherein a potential saddle of the blanking lens is substantially flat in a radial direction.
Claim 5
Dependent Claim
26 words
A corpuscular beam blanking system according to claim 3 wherein a cathode-related potential of a saddle point of the saddle is slightly negative in blocking operation.
Claim 6
Dependent Claim
64 words
A corpuscular beam blanking system according to claim 1 wherein a blanking pin-hole diaphragm is disposed after the blanking lens at an intermediate image of the source such that a diameter d AB of the blanking diaphragm is matched to a source diameter d Q according to d AB =M·d Q where M is an enlargement of the source up to the intermediate image.
Claim 7
Dependent Claim
23 words
A corpuscular beam blanking system according to claim 1 wherein a beam-shaping diaphragm is positioned after the blanking lens and before the target.
Claim 8
Dependent Claim
26 words
A corpuscular beam blanking system according to claim 1 wherein a negative auxiliary dc voltage is also applied to the center electrode of the blanking lens.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-03-27 | 1987-09-26 | 1988-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-03-27 | 1991-09-26 | 1992-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-03-27 | 1995-09-26 | 1996-03-27 | $7700.00 | Window Closed / Lapsed |