Apparatus and method for preparing an abrasive coated substrate

Claim 2

In a method for preparing a coating in a magnetically enhanced glow discharge apparatus, comprising subjecting gaseous precursors to a glow discharge and depositing the coating onto a substrate; the improvement comprising mounting said substrate onto a ferromagnetic backing plate whereby the rate of deposition of said coating in the electrode area is increased.

Claim 3

A method in accordance with claim 1 wherein the ferromagnetic backing plate consists of cold-rolled steel.

Claim 4

In a method for preparing an abrasive SiO x coating wherein 1≦×≦2, comprising subjecting silane and a gaseous oxygen containing compound selected from the group consisting of N 2 O, CO 2 and H 2 O to a glow discharge and depositing the SiO x product onto a substrate; the improvement comprising mounting said substrate onto a ferromagnetic backing plate whereby the rate of deposition of said SiO x material in the electrode area is increased.

Claim 5

In a method for preparing an abrasive SiO x coating wherein 1≦×≦2, comprising subjecting silane and a gaseous oxygen containing compound selected from the group consisting of N 2 O, CO 2 and H 2 O to a glow discharge and depositing the SiO x product onto a substrate; the improvement comprising mounting said substrate onto a ferromagnetic backing plate whereby the rate of deposition of said SiO x material in the electrode area is increased.

Claim 6

A method in accordance with claim 3 wherein deposition is continued until the SiO x thickness is at least about 250 Angstroms.

Claim 7

A method in accordance with claim 1 wherein the substrate is a polymer of vinyl chloride.

Claim 8

In a magnetically enhanced glow discharge apparatus for use in coating a substrate which apparatus comprises a vacuum chamber; one or more electrodes within said chamber connected to a, power source for energizing said electrodes; magnets behind, but electrically insulated from, said electrodes; outlet means for evacuating said chamber; inlet means for introducing appropriate precursors into said vacuum chamber; and means for holding the substrate between, but not in contact with said electrodes; the improvement comprising mounting said substrate onto a ferromagnetic backing plate, whereby the rate of deposition of the coating onto the substrate within the electrode area is increased.

Claim 9

In a magnetically enhanced glow discharge apparatus for use in coating a substrate which apparatus comprises a vacuum chamber; one or more electrodes within said chamber connected to a, power source for energizing said electrodes; magnets behind, but electrically insulated from, said electrodes; outlet means for evacuating said chamber; inlet means for introducing appropriate precursors into said vacuum chamber; and means for holding the substrate between, but not in contact with said electrodes; the improvement comprising mounting said substrate onto a ferromagnetic backing plate, whereby the rate of deposition of the coating onto the substrate within the electrode area is increased.

Claim 10

The apparatus according to claim 5 wherein the ferromagnetic backing plate consists of cold-rolled steel.