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US4430152A
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US
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Process for fabricating a semiconductor device
Assignee: Fujitsu Ltd
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Filing: 1982-10-21
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Granted: 1984-02-07
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Expires: 2002-10-21
Abstract
Abstract A metal layer exposed by dry etching a phosphosilicate glass (PSG) layer covering the metal layer is insufficiently reliable when an electrical connection is made by bonding wire to the metal layer or depositing another metal layer on the metal layer. This insufficiency is due to the presence of a phosphorous residue on the surface of the exposed metal layer. The phosphorous residue is preferably removed by treating the surface of the metal layer with an alkaline solution so that the PSG layer, the metal layer, and the semiconductor device in which the connection is made are not affected.
Inventors
- 👤 Takashi Okano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:59
CPC Classifications
H; H10; H10P; H10P52/00; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P50/60; H10P50/66; H10P50/663; H10P50/667; H10W; H10W20/00; H10W20/01; H10W20/031; H10W70/00; H10W70/60; H10W72/00; H10W72/01; H10W72/015; H10W72/01571; H10W72/071; H10W72/075; H10W72/07511; H10W72/50; H10W72/531; H10W72/5363; H10W72/551; H10W72/552; H10W72/5522; H10W72/59; H10W72/90; H10W72/921; H10W72/923; H10W72/931; H10W72/934; H10W72/951; H10W72/952; H10W72/981; H10W72/983
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
66 words
A process for fabricating a semiconductor device having a semiconductor substrate, comprising the steps of: (a) forming a metal layer on the semiconductor substrate; (b) forming a phosphosilicate glass layer on the metal layer; (c) dry etching a part of the phosphosilicate glass layer to expose a portion of the metal layer; and (d) treating the exposed portion of the metal layer with an alkaline solution.
Claim 2
Dependent Claim
66 words
A process for fabricating a semiconductor device having a semiconductor substrate, comprising the steps of: (a) forming a metal layer on the semiconductor substrate; (b) forming a phosphosilicate glass layer on the metal layer; (c) dry etching a part of the phosphosilicate glass layer to expose a portion of the metal layer; and (d) treating the exposed portion of the metal layer with an alkaline solution.
Claim 3
Dependent Claim
32 words
A process according to claim 1, wherein said dry etching step (c) comprises selecting the dry etching method from the group consisting of parallel plane-type plasma etching, ion etching and sputter etching.
Claim 4
Dependent Claim
46 words
A process according to claim 1, wherein said step (a) comprises the step of forming the metal layer from a metal selected from the group consisting of aluminum, aluminum-based alloy, molybdenum, molybdenum-based alloy, tungsten, tungsten-based alloy, tantalum, tantalum-based alloy, titanium, titanium-based alloy, niobium and niobium-based alloy.
Claim 5
Dependent Claim
39 words
A process according to claim 1, wherein said step (d) comprises treating the exposed surface of the metal layer with an alkaline solution selected from the group of solutions consisting of ammonia, organic amines and salts of organic amines.
Claim 6
Dependent Claim
46 words
A process according to claim 2, wherein said step (a) comprises the step of forming the metal layer from a metal selected from the group consisting of aluminum, aluminum-based alloy, molybdenum, molybdenum-based alloy, tungsten, tungsten-based alloy, tantalum, tantalum-based alloy, titanium, titanium-based alloy, niobium and niobium-based alloy.
Claim 7
Dependent Claim
39 words
A process according to claim 5, wherein said step (d) comprises treating the exposed surface of the metal layer with an alkaline solution selected from the group of solutions consisting of ammonia, organic amines and salts of organic amines.
Claim 8
Dependent Claim
23 words
A process according to claim 6, wherein said step (d) comprises treating the exposed surface of the metal layer for approximately 30 seconds.
Claim 9
Dependent Claim
23 words
A process according to claim 1, wherein said step (d) comprises treating the exposed surface of the metal layer for approximately 30 seconds.
References Cited (Backward Citations)
US4354897A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-06 | 1987-08-08 | 1988-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-06 | 1991-08-08 | 1992-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-06 | 1995-08-08 | 1996-02-07 | $7700.00 | Window Closed / Lapsed |