US4428871A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stripping compositions and methods of stripping resists
Assignee: Avantor Performance Materials LLC
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Filing: 1982-08-17
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Granted: 1984-01-31
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Expires: 2002-08-17
Abstract
Abstract Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a diethylene glycol monoalkyl ether compound. Polyethylene glycol may be added to provide even more effective stripping compositions.
Inventors
- 👤 Irl E. Ward
- 👤 Lisa G. Hallquist
- 👤 Thomas J. Hurley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 10:50
CPC Classifications
B; B41; B41C; B41C1/00; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
92 words
A stripping composition comprising from about 55 to about 80 weight percent of a 2-pyrrolidinone compound of the formula ##STR2## wherein R is selected from the group consisting of hydrogen, alkyl of 1 to 3 carbon atoms and hydroxyalkyl of 1 to 3 carbon atoms, from about 20 to about 45 weight percent of diethylene glycol monoalkylether of the formula HOCH 2 CH 2 --O--CH 2 CH 2 --O--R 1 wherein R 1 is alkyl of 1 to 4 carbon atoms, and from about 5 to about 25 weight percent polyethylene glycol.
Claim 2
Dependent Claim
92 words
A stripping composition comprising from about 55 to about 80 weight percent of a 2-pyrrolidinone compound of the formula ##STR2## wherein R is selected from the group consisting of hydrogen, alkyl of 1 to 3 carbon atoms and hydroxyalkyl of 1 to 3 carbon atoms, from about 20 to about 45 weight percent of diethylene glycol monoalkylether of the formula HOCH 2 CH 2 --O--CH 2 CH 2 --O--R 1 wherein R 1 is alkyl of 1 to 4 carbon atoms, and from about 5 to about 25 weight percent polyethylene glycol.
Claim 3
Dependent Claim
35 words
A composition of claim 1 comprising from about 55 to about 80 weight percent 1-methyl-2-pyrrolidinone, from about 20 to about 45 weight percent 2-(2-ethoxyethoxy)ethanol and from about 5 to about 25 weight percent polyethylene glycol.
Claim 4
Dependent Claim
22 words
A composition of claim 2 comprising about 60 to 75% 1-methyl-2-pyrrolidinone, 25 to 40% 2-(2-ethoxyethoxy)ethanol and 6 to 15 percent polyethylene glycol.
Claim 5
Dependent Claim
18 words
A composition of claim 2 comprising about 50% 1-methyl-2-pyrrolidinone, about 25% 2-(2-ethoxyethoxy) ethanol and about 25% polyethylene glycol.
Claim 6
Dependent Claim
18 words
A composition of claim 2 comprising about 70% 1-methyl-2-pyrrolidinone, about 24% 2-(2-ethoxyethoxy) ethanol and about 6% polyethylene glycol.
Claim 7
Dependent Claim
18 words
The composition of claim 1 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 8
Dependent Claim
18 words
The composition of claim 2 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 9
Dependent Claim
18 words
The composition of claim 3 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 10
Dependent Claim
18 words
The composition of claim 4 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 11
Dependent Claim
18 words
The composition of claim 5 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 12
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 1.
Claim 13
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 2.
Claim 14
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 3.
Claim 15
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 4.
Claim 16
Dependent Claim
30 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition of claim 5.
Claim 17
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 6.
Claim 18
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 7.
Claim 19
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 8.
Claim 20
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 9.
Claim 21
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 10.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-30 | 1987-08-01 | 1988-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-30 | 1991-08-01 | 1992-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-30 | 1995-08-01 | 1996-01-31 | $7700.00 | Window Closed / Lapsed |