Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
151 words
An improved multi-layer ion modulating electrode, comprising: first and second conductive layers between which a high frequency voltage is operatively applied to generate an ion flow; a first dielectric layer interposed between said first and second conductive layers; a third conductive layer to which a control voltage is operatively applied for regulating the ion flow; a second dielectric layer interposed between said second and third conductive layers; said first, second and third conductive layers, and said first and second dielectric layers, being stacked together to form an integral electrode structure, and said integral structure further including a plurality of apertures defined through all of said layers of the electrode stack to delineate passages for the ion flow; and a thin film coating of, at most, limited conductivity over the entire exposed surface area of said first conductive electrode including those surface portions of the first conductive electrode disposed within said apertures.
Claim 2
Dependent Claim
151 words
An improved multi-layer ion modulating electrode, comprising: first and second conductive layers between which a high frequency voltage is operatively applied to generate an ion flow; a first dielectric layer interposed between said first and second conductive layers; a third conductive layer to which a control voltage is operatively applied for regulating the ion flow; a second dielectric layer interposed between said second and third conductive layers; said first, second and third conductive layers, and said first and second dielectric layers, being stacked together to form an integral electrode structure, and said integral structure further including a plurality of apertures defined through all of said layers of the electrode stack to delineate passages for the ion flow; and a thin film coating of, at most, limited conductivity over the entire exposed surface area of said first conductive electrode including those surface portions of the first conductive electrode disposed within said apertures.
Claim 3
Dependent Claim
18 words
An improved ion modulation electrode in accordance with claim 1, said thin film coating being of dielectric material.
Claim 4
Dependent Claim
16 words
An improved ion modulation electrode in accordance with claim 1, said thin film coating being semiconductive.
Claim 5
Dependent Claim
23 words
An improved ion modulation electrode in accordance with claim 3, said semiconductive thin film coating comprising a mixture of conductive and dielectric materials.
Claim 6
Dependent Claim
18 words
An improved ion modulation electrode in accordance with claim 4, said conductive material comprising a conductive carbon black.
Claim 7
Dependent Claim
47 words
An improved ion modulation electrode in accordance with claim 1, said thin film coating further extending within said apertures onto exposed surface portions of said first dielectric layer to thereby assure complete coverage by said film of the entire exposed surface area of said first conductive electrode.