US4426237A
Expired / Lapsed
US
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Volatile metal oxide suppression in molecular beam epitaxy systems
Assignee: International Business Machines Corp
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Filing: 1981-10-13
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Granted: 1984-01-17
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Expires: 2001-10-13
Abstract
Abstract When growing GaAs by molecular beam epitaxy (MBE), a typical related reaction acts to affix Ga 2 O 3 to the growth surface and hence incorporates such oxide contaminants in the epitaxial layer as it is grown. Such contaminants may yield crystals of poor electrical and optical properties. When Al is added to the Ga source crucible, the Ga 2 O flux is reduced substantially thereby suppressing the formation of such oxide contaminants and remove a serious constraint to MBE growth. When doping GaAs with Mg to form a p-type GaAs layer, unity Mg doping efficiency is achieved by including 0.1% Al in the Ga effusion cell. Such an inclusion of Al improves the Mg doping efficiency by suppressing the formation of MgO, and allows MBE growth at lower substrate temperatures and at higher growth rates.
Inventors
- 👤 John L. Freeouf
- 👤 Peter D. Kirchner
- 👤 George D. Pettit
- 👤 Jerry M. Woodall
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 09:01
CPC Classifications
C; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/10; C30B29/40; Y; Y10; Y10S; Y10S118/00; Y10S118/90; Y10S438/00; Y10S438/961
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
77 words
In a molecular beam source for providing a molecular beam, wherein said source contains a source material having an inherent contaminant, the improvement comprising the addition in said source a second material having an affinity for said contaminant, said second material has the property that upon heating said second material combines with said contaminant thereby providing a molecular beam of said source material, said molecular beam being substantially free of both said contaminant and said second material.
Claim 2
Dependent Claim
77 words
In a molecular beam source for providing a molecular beam, wherein said source contains a source material having an inherent contaminant, the improvement comprising the addition in said source a second material having an affinity for said contaminant, said second material has the property that upon heating said second material combines with said contaminant thereby providing a molecular beam of said source material, said molecular beam being substantially free of both said contaminant and said second material.
Claim 3
Dependent Claim
27 words
In a molecular beam source as set forth in claim 1 wherein said second material is a non-doping oxygen gettering material having a low oxide vapor pressure.
Claim 4
Dependent Claim
18 words
In a molecular beam source as set forth in claim 2 wherein said oxygen gettering material is aluminum.
Claim 5
Dependent Claim
20 words
In a molecular beam source as set forth in claim 3 wherein said source material is a Group III(a)-V(a) compound.
Claim 6
Dependent Claim
17 words
In a molecular beam source as set forth in claim 3 wherein said source material is gallium.
Claim 7
Dependent Claim
95 words
In fabricating a magnesium doped p-type Group III(a)-V(a) layer by molecular beam epitaxy apparatus of the type wherein a source material is vaporized within a crucible to form a molecular beam which converges on a substrate to form said p-type Group III(a)-V(a) layer, the improvement of the magnesium doping efficiency to unity comprising the addition in said crucible a second material having an affinity for a contaminant introduced by said source material thereby providing a molecular beam of said source material, said molecular beam being substantially free of both said contaminant, and said second material.
Claim 8
Dependent Claim
95 words
In fabricating a magnesium doped p-type Group III(a)-V(a) layer by molecular beam epitaxy apparatus of the type wherein a source material is vaporized within a crucible to form a molecular beam which converges on a substrate to form said p-type Group III(a)-V(a) layer, the improvement of the magnesium doping efficiency to unity comprising the addition in said crucible a second material having an affinity for a contaminant introduced by said source material thereby providing a molecular beam of said source material, said molecular beam being substantially free of both said contaminant, and said second material.
Claim 9
Dependent Claim
31 words
In fabricating a magnesium doped p-type Group III(a)-V(a) layer as set forth in claim 6 wherein said second material is a non-doping oxygen gettering material having a low oxide vapor pressure.
Claim 10
Dependent Claim
22 words
In fabricating a magnesium doped p-type Group III(a)-V(a) layer as set forth in claim 7 wherein said oxygen gettering material is aluminum.
Claim 11
Dependent Claim
21 words
In fabricating a magnesium doped p-type Group III(a)-V(a) layer as set forth in claim 8 wherein said source material is gallium.
Claim 12
Dependent Claim
23 words
In fabricating a magnesium doped p-type Group III(a)-V(a) layer as set forth in claim 9 wherein said Group III(a)-V(a) layer is gallium arsenide.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-16 | 1987-07-18 | 1988-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-16 | 1991-07-18 | 1992-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-16 | 1995-07-18 | 1996-01-17 | $7700.00 | Window Closed / Lapsed |