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US4423959A
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US
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Positioning apparatus
Assignee: Nikon Corp
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Filing: 1983-03-07
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Granted: 1984-01-03
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Expires: 2003-03-07
Abstract
Abstract A positioning apparatus includes a projecting means for projecting plural coherent light beams onto an object to be aligned. The projecting means comprises plural converging means for forming each coherent light beam into a stripe-shaped beam extended in a direction substantially perpendicularly to the scanning direction of said scanning means, and each of said alignment marks comprises plural short line segments arranged in a stripe extended in a direction substantially perpendicular to the scanning direction of said scanning means and each inclined approximately by 45° with respect to said scanning direction. Therefore, the alignment mark can be clearly identified from the circuit patterns by relatively rough preliminary alignment even if such mark is positioned in a narrow space between the chips for example for LSI.
Inventors
- 👤 Kiwao Nakazawa
- 👤 Kyoichi Suwa
- 👤 Shoichiro Yoshida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:59
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; B; B23; B23K; B23K26/00; B23K26/02; B23K26/04; B23K26/042
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
141 words
In a positioning apparatus having plural alignment marks provided in determined positions on an object to be aligned, means for projecting plural coherent light beams onto said object, means for causing two-dimensional relative scanning motion between said object and said coherent light beams, and plural detecting means for photoelectrically detecting the light diffracted from each of said coherent light beams by each of said alignment marks; the improvement wherein said projecting means comprises plural converging means for forming each coherent light beam into a stripe-shaped beam extended in a direction substantially perpendicular to the scanning direction of said scanning means, and each of said alignment marks comprises plural short line segments arranged in a stripe extended in a direction substantially perpendicular to the scanning direction of said scanning means and each inclined approximately by 45° with respect to said scanning direction.
Claim 2
Dependent Claim
141 words
In a positioning apparatus having plural alignment marks provided in determined positions on an object to be aligned, means for projecting plural coherent light beams onto said object, means for causing two-dimensional relative scanning motion between said object and said coherent light beams, and plural detecting means for photoelectrically detecting the light diffracted from each of said coherent light beams by each of said alignment marks; the improvement wherein said projecting means comprises plural converging means for forming each coherent light beam into a stripe-shaped beam extended in a direction substantially perpendicular to the scanning direction of said scanning means, and each of said alignment marks comprises plural short line segments arranged in a stripe extended in a direction substantially perpendicular to the scanning direction of said scanning means and each inclined approximately by 45° with respect to said scanning direction.
Claim 3
Dependent Claim
46 words
A positioning apparatus according to claim 1, wherein said scanning means comprises two-dimensional displacing means capable of supporting said object and displacing the same in at least two mutually perpendicular directions in a plane, said directions being perpendicular to the extended directions of said stripe-shaped beams.
Claim 4
Dependent Claim
63 words
A positioning apparatus according to claim 2, wherein said object comprises plural circuit pattern areas divided at least by a street line, and said alignment marks comprise first and second marks of which extended direction is substantially parallel to the direction of said street line, and a third mark of which extended direction is substantially perpendicular to the direction of said street line.
Claim 5
Dependent Claim
43 words
A positioning apparatus according to claim 3, wherein said object comprises at least a street line perpendicular to the first mentioned street line, and the first, second third marks are respectively positioned on the first mentioned street line and said perpendicular street line.
Claim 6
Dependent Claim
44 words
A positioning apparatus according to claim 3, wherein said converging means comprises first, second and third converging means positioned respectively corresponding to said first, second and third marks and adapted to form stripe-shaped beams substantially parallel respectively to the extended directions of said marks.
Claim 7
Dependent Claim
37 words
A positioning apparatus according to claim 5, wherein said detecting means comprises first detecting means for detecting said first mark, second detecting means for detecting said second mark, and third detecting means for detecting said third mark.
Claim 8
Dependent Claim
49 words
A positioning apparatus according to claim 3, wherein said two-dimensional displacing means comprises means for rotating said object around a point on said plane, and said detecting means comprises means for detecting the relative positional relation of said first and second marks resulting from the rotation of said object.
Claim 9
Dependent Claim
129 words
In a positioning apparatus having plural alignment marks provided in determined positions on an object to be aligned, means for projecting plural coherent light beams onto said object, means for causing two-dimensional relative scanning motion between said object and said coherent light beams, and plural detecting means for photoelectrically detecting the light diffracted from each of said coherent light beams by each of said alignment marks; the improvement wherein said projecting means comprises plural converging means for forming each coherent light beam into a stripe-shaped beam extended in a direction substantially perpendicular to the scanning direction of said scanning means, and each of said alignment marks comprises plural short line segments arranged in a stripe extended in a direction substantially perpendicular to the scanning direction of said scanning means.
Claim 10
Dependent Claim
129 words
In a positioning apparatus having plural alignment marks provided in determined positions on an object to be aligned, means for projecting plural coherent light beams onto said object, means for causing two-dimensional relative scanning motion between said object and said coherent light beams, and plural detecting means for photoelectrically detecting the light diffracted from each of said coherent light beams by each of said alignment marks; the improvement wherein said projecting means comprises plural converging means for forming each coherent light beam into a stripe-shaped beam extended in a direction substantially perpendicular to the scanning direction of said scanning means, and each of said alignment marks comprises plural short line segments arranged in a stripe extended in a direction substantially perpendicular to the scanning direction of said scanning means.
Claim 11
Dependent Claim
27 words
A positioning apparatus according to claim 8, wherein each of said plural short line segments is inclined by a determined angle with respect to said scanning direction.
Claim 12
Dependent Claim
118 words
A positioning apparatus for aligning an object comprising: (a) alignment mark means provided in determined position on said object and having a plurality of short line segments arranged in a stripe pattern extended in a linear direction; (b) means for projecting a coherent light beam onto said object including converging means for forming said light beam into an elongated beam extended in the same direction as said linear direction of said stripe pattern; (c) scanning means for causing two-dimensional relative scanning motion between said object and said coherent light beam in a direction substantially perpendicular to said linear direction; and (d) means for photoelectrically detecting the light diffracted from said coherent light beam by said alignment mark means.
Claim 13
Dependent Claim
118 words
A positioning apparatus for aligning an object comprising: (a) alignment mark means provided in determined position on said object and having a plurality of short line segments arranged in a stripe pattern extended in a linear direction; (b) means for projecting a coherent light beam onto said object including converging means for forming said light beam into an elongated beam extended in the same direction as said linear direction of said stripe pattern; (c) scanning means for causing two-dimensional relative scanning motion between said object and said coherent light beam in a direction substantially perpendicular to said linear direction; and (d) means for photoelectrically detecting the light diffracted from said coherent light beam by said alignment mark means.
Claim 14
Dependent Claim
31 words
A positioning apparatus according to claim 10, wherein said detecting means includes a pair of photoelectric detectors receiving diffracted light beams emitted to opposite sides of said coherent light beam respectively.
Claim 15
Dependent Claim
27 words
A positioning apparatus according to claim 10, wherein each of said plural short line segments is inclined by a determined angle with respect to said scanning direction.
Claim 16
Dependent Claim
13 words
A positioning apparatus according to claim 11, wherein said angle is approximately 45°.
Claim 17
Dependent Claim
42 words
A positioning apparatus according to claim 10, wherein said projecting means further includes a condenser lens and said coherent light beam is focused by said condenser lens onto said object, and said detecting means receives said diffracted light through said condenser lens.
References Cited (Backward Citations)
US3861798A
Cited
US4252442A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-01-02 | 1987-07-04 | 1988-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-01-02 | 1991-07-04 | 1992-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-01-02 | 1995-07-04 | 1996-01-03 | $7700.00 | Window Closed / Lapsed |