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Method for galvanic deposition of copper

Assignee: Atotech Deutschland GmbH and Co KG
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Filing: 1981-03-17
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Granted: 1983-12-06
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Expires: 2001-03-17
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Abstract

Abstract In a method for galvanic deposition of smooth and ductile copper from acid copper baths, the metal content of the bath is kept constant by using inert anodes together with soluble anodes. The inert anodes are made of precious metal, precious metal alloys or their compounds. The ratio of the geometric surface of inert to soluble anode should amount to from 1:1 to 1:200, preferably from 1:5 to 1:20. The inert anode may be provided with additional potential, and the acid bath may contain organic thio compounds. The method is useful for building up conductor paths of printed circuits.

Inventors

  • 👤 Wolfgang Dahms

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 14:35
CPC Classifications
C; C25; C25D; C25D3/00; C25D3/02; C25D3/38; C25D17/00; C25D17/10

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 110 words
Method for galvanic deposition of smooth and ductile copper from acid copper baths, the metal content of which baths remains unchanged during the deposition, comprising the steps of providing an acid copper bath, inserting the object to be plated into said bath, connecting said object as a cathode, immersing into said bath a combination of soluble anode and inert anode composed of precious metal, precious metal alloys or their compounds, connecting said anodes to a source of electrical energy, using the anodes in which the ratio of the geometric surface of inert to soluble anode amounts to from 1:1 to 1:200, and providing the inert anode additionally with a potential.
Claim 2
Dependent Claim 110 words
Method for galvanic deposition of smooth and ductile copper from acid copper baths, the metal content of which baths remains unchanged during the deposition, comprising the steps of providing an acid copper bath, inserting the object to be plated into said bath, connecting said object as a cathode, immersing into said bath a combination of soluble anode and inert anode composed of precious metal, precious metal alloys or their compounds, connecting said anodes to a source of electrical energy, using the anodes in which the ratio of the geometric surface of inert to soluble anode amounts to from 1:1 to 1:200, and providing the inert anode additionally with a potential.
Claim 3
Dependent Claim 24 words
Method according to claim 1, wherein said inert anodes are made from platinum, iridium, rhodium, palladium, gold, ruthenium, rhenium, their alloys, oxides or carbides.
Claim 4
Dependent Claim 14 words
Method according to claim 1, wherein said ratio amounts to from 1:5 to 1:20.
Claim 5
Dependent Claim 14 words
Method according to claim 1, wherein said acid copper baths contain organic thio compounds.
Claim 6
Dependent Claim 14 words
Method according to claim 1 for building up the conductor paths of printed circuits.
Claim 7
Dependent Claim 11 words
Method according to claim 1, wherein said bath contains selenium compounds.
Claim 8
Dependent Claim 33 words
Method according to claim 1, wherein the operating conditions of said baths include pH-value of less than 1, temperature between 15° and 35° C. and cathode current density of 0.5-8 A/dm 2 .

References Cited (Backward Citations)

US1465034A Cited
US2133255A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1986-12-05 1987-06-06 1987-12-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1990-12-05 1991-06-06 1991-12-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1994-12-05 1995-06-06 1995-12-06 $7700.00 Window Closed / Lapsed

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