US4416760A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for asymmetrically contouring the thickness of sputter coated layers
Assignee: Novellus Systems Inc
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Filing: 1981-11-27
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Granted: 1983-11-22
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Expires: 2001-11-27
Abstract
Abstract Apparatus for compensating for asymmetric signatures in semiconductor processes. An asymmetric thickness profile is obtained in a sputter coating system by using a shield placed in an asymmetric position with respect to the center of a symmetric sputtering system such as a circularly symmetric sputtering system. A sputter coated layer is obtained which has the asymmetric character of the shield and its placement. When the substrate is placed in subsequent equipment having asymmetric etch characteristics, the resultant film has a uniform thickness or a known contour.
Inventors
- 👤 Frederick T. Turner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 22:08
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/044; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
92 words
In a cathode sputtering apparatus for producing an asymmetrically contoured sputter coated layer on a substrate mounted on a substrate mounting means located in opposition to a sputter source comprising a target cathode, and blocking shield means positioned inbetween said cathode target and said substrate, said blocking shield serving to block a portion of said substrate from line-of-sight communication with said target cathode, THE IMPROVEMENT COMPRISING: said blocking shield being positioned asymmetrically and in a stationary location with respect to said substrate, said asymmetry being derived from the symmetry of said apparatus.
Claim 2
Dependent Claim
92 words
In a cathode sputtering apparatus for producing an asymmetrically contoured sputter coated layer on a substrate mounted on a substrate mounting means located in opposition to a sputter source comprising a target cathode, and blocking shield means positioned inbetween said cathode target and said substrate, said blocking shield serving to block a portion of said substrate from line-of-sight communication with said target cathode, THE IMPROVEMENT COMPRISING: said blocking shield being positioned asymmetrically and in a stationary location with respect to said substrate, said asymmetry being derived from the symmetry of said apparatus.
Claim 3
Dependent Claim
28 words
Apparatus for producing an asymmetrically sputter coated layer in accordance with claim 1 wherein said substrate mounting means is adapted to mount a semiconductor wafer having circular symmetry.
Claim 4
Dependent Claim
21 words
Apparatus for producing an asymmetrically sputter coated layer in accordance with claim 2 wherein sid blocking shield comprises a circular shield.
Claim 5
Dependent Claim
37 words
Apparatus for producing an asymmetrically sputter coated layer in accordance with claim 3 wherein the center of said block shield is displaced a fixed distance from a line normal to the center of said substrate mounting means.
Claim 6
Dependent Claim
21 words
Apparatus for producing an asymmetrically sputter coated layer in accordance with claim 2 wherein said blocking shield comprises an elliptical shield.
Claim 7
Dependent Claim
35 words
Apparatus for producing an asymmetrically sputter coated layer in accordance with claim 5 wherein the focii of the elliptical shape of said blocking shield lie in registration over a diameter of said substrate mounting means.
References Cited (Backward Citations)
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Cited
JPS5333531A
Cited
US4303489A
Cited
JPS5687664A
Cited
US4315960A
Cited
US4342901A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-11-21 | 1987-05-23 | 1987-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-11-21 | 1991-05-23 | 1991-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-11-21 | 1995-05-23 | 1995-11-22 | $7700.00 | Window Closed / Lapsed |