Patent US4410408A successfully refreshed from Google Patents.
US4410408A
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Method of preparing zinc oxide film
Assignee: Murata Manufacturing Co Ltd
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Filing: 1982-01-05
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Granted: 1983-10-18
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Expires: 2002-01-05
Abstract
Abstract A method of making zinc oxide film comprises the steps of forming a zinc oxide layer on a substrate by carrying out radio-frequency sputtering with a target of zinc oxide, forming a zinc oxide layer on said zinc oxide layer by carrying out reactive, direct-current or radio-frequency sputtering with a target of zinc metal.
Inventors
- 👤 Suehiro Kato
- 👤 Kenji Ando
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 23:06
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/086; C23C14/0021; C23C14/0036; C23C14/02
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
64 words
A method of making zinc oxide film comprising the steps of forming a first zinc oxide layer on a substrate by radio-frequency sputtering of zinc oxide from a target of zinc oxide and then forming a second zinc oxide layer on said first zinc oxide layer by reactive direct-current or radio-frequency sputtering of zinc from a target of zinc metal in an oxidizing atmosphere.
Claim 2
Independent Claim
64 words
A method of making zinc oxide film comprising the steps of forming a first zinc oxide layer on a substrate by radio-frequency sputtering of zinc oxide from a target of zinc oxide and then forming a second zinc oxide layer on said first zinc oxide layer by reactive direct-current or radio-frequency sputtering of zinc from a target of zinc metal in an oxidizing atmosphere.
Claim 3
Dependent Claim
27 words
The method of claim 1 wherein the oxidizing atmosphere consists essentially of 50 to 90 volume percent of argon and 10 to 50 volume percent of oxygen.
Claim 4
Dependent Claim
26 words
The method of claim 2 wherein the reactive direct-current or radio-frequency sputtering of zinc is effected at a pressure of 10 -1 to 5×10 -4 Torr.
Claim 5
Dependent Claim
33 words
The method of claim 3 wherein the second zinc oxide layer is formed by reactive direct-current sputtering at a voltage of 1-7 KV and a current of 0.15 to 1.5 mA/cm 2 .
Claim 6
Dependent Claim
23 words
The method of claim 4 wherein the first zinc oxide layer is formed at a pressure of 10 -1 to 10 -3 Torr.
Claim 7
Dependent Claim
34 words
The method of claim 5 wherein the first zinc oxide layer is formed by radio-frequency sputtering of zinc oxide in an atmosphere consisting essentially of 80-90 volume percent argon and 20-10 volume percent oxygen.
References Cited (Backward Citations)
US4336120A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-17 | 1987-04-18 | 1987-10-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-17 | 1991-04-18 | 1991-10-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-17 | 1995-04-18 | 1995-10-18 | $7700.00 | Window Closed / Lapsed |