Patent US4408874A successfully refreshed from Google Patents.
US4408874A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Projection aligner with specific means for bending mirror
Assignee: Applied Materials Inc
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Filing: 1981-05-07
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Granted: 1983-10-11
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Expires: 2001-05-07
Abstract
Abstract A projection aligner is provided wherein anamorphic metric distortion can be introduced in the projection image by employing a bending mirror that makes a slight change in magnification along one axis of the image. In one embodiment of the invention a pneumatic bending mechanism is employed and in another embodiment, a mechanical system is employed.
Inventors
- 👤 William Zinky
- 👤 Larry Rosenberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70233; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
197 words
In a projection printer wherein the image of a mask is projected through a narrow slit having a longitudinal axis extending from one side of the mask to the other and the image of the mask moves at a right angle to the longitudinal axis of the slit to expose the entire mask by means including at least one plane mirror into a sensitized wafer and wherein said mirror is anamorphically distorted to alter the image size in a direction perpendicular to the longitudinal axis of said slit, the improvement comprising: a. means for gripping said plane mirror only along points of contact which are parallel with the longitudinal axis of said slit whereby said mirror is held in a strain-free relationship, and whereby said mirror can only be deformed about axes parallel to the longitudinal axis of said slit; b. frame means supported by said mirror, said frame means extending across the back of said mirror in a direction perpendicular to the longitudinal axis of said slit; c. pressure means extending between said frame means and said mirror for distorting said mirror anamorphically about one or more axes parallel to the longitudinal axis of said slit.
Claim 2
Dependent Claim
197 words
In a projection printer wherein the image of a mask is projected through a narrow slit having a longitudinal axis extending from one side of the mask to the other and the image of the mask moves at a right angle to the longitudinal axis of the slit to expose the entire mask by means including at least one plane mirror into a sensitized wafer and wherein said mirror is anamorphically distorted to alter the image size in a direction perpendicular to the longitudinal axis of said slit, the improvement comprising: a. means for gripping said plane mirror only along points of contact which are parallel with the longitudinal axis of said slit whereby said mirror is held in a strain-free relationship, and whereby said mirror can only be deformed about axes parallel to the longitudinal axis of said slit; b. frame means supported by said mirror, said frame means extending across the back of said mirror in a direction perpendicular to the longitudinal axis of said slit; c. pressure means extending between said frame means and said mirror for distorting said mirror anamorphically about one or more axes parallel to the longitudinal axis of said slit.
Claim 3
Dependent Claim
14 words
The printer of claim 1 wherein said pressure means is an adjustable spring means.
Claim 4
Dependent Claim
11 words
The printer of claim 1 wherein said pressure means is pneumatic.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-10 | 1987-04-11 | 1987-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-10 | 1991-04-11 | 1991-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-10 | 1995-04-11 | 1995-10-11 | $7700.00 | Window Closed / Lapsed |