US4407708A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for operating a magnetron sputtering apparatus
Assignee: Eaton Corp
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Filing: 1981-08-06
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Granted: 1983-10-04
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Expires: 2001-08-06
Abstract
Abstract An improved magnetron sputter source (10) in which a temperature sensor (94) is placed within the cathode (18) adjacent the interface between the cathode and the sputter target (16) at the point of maximum erosion of the target. A relationship between the temperature of the cathode and the thickness of the target at that point is established so that the temperature reading can be used as an indication that the target is about to be eroded through.
Inventors
- 👤 Richard F. Landau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:27
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
67 words
A method for operating a magnetron sputtering apparatus of the type which includes a sputtering target having a flat surface in contact with a flat surface of a cathode of said apparatus, including monitoring the temperature of said cathode at a point adjacent said flat surface of said cathode, and ceasing operation of said apparatus and replacing said sputtering target when said temperature reaches a predetermined value.
Claim 2
Independent Claim
67 words
A method for operating a magnetron sputtering apparatus of the type which includes a sputtering target having a flat surface in contact with a flat surface of a cathode of said apparatus, including monitoring the temperature of said cathode at a point adjacent said flat surface of said cathode, and ceasing operation of said apparatus and replacing said sputtering target when said temperature reaches a predetermined value.
Claim 3
Dependent Claim
30 words
The method as claimed in claim 1, in which the temperature of said cathode is monitored at a location corresponding to the area of maximum erosion of said sputtering target.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-03 | 1987-04-04 | 1987-10-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-03 | 1991-04-04 | 1991-10-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-03 | 1995-04-04 | 1995-10-04 | $7700.00 | Window Closed / Lapsed |