US4401748A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stripping compositions and methods of stripping resists
Assignee: Avantor Performance Materials LLC
•
Filing: 1982-09-07
•
Granted: 1983-08-30
•
Expires: 2002-09-07
Abstract
Abstract Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and tetrahydrofuran compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions.
Inventors
- 👤 Irl E. Ward, Jr.
- 👤 Lisa G. Hallquist
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:03
CPC Classifications
C; C11; C11D; C11D7/00; C11D7/50; C11D7/5004; C11D7/5013; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425; C11D7/22; C11D7/26; C11D7/263; C11D7/32; C11D7/3281
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
56 words
A stripping composition comprising from about 30 to about 90 weight percent of a 2-pyrrolidinone compound of the formula ##STR2## wherein R is selected from the group consisting of hydrogen, alkyl of 1 to 3 carbon atoms and hydroxyalkyl of 1 to 3 carbon atoms, and from about 10 to about 70 weight percent of tetrahydrofuran.
Claim 2
Dependent Claim
56 words
A stripping composition comprising from about 30 to about 90 weight percent of a 2-pyrrolidinone compound of the formula ##STR2## wherein R is selected from the group consisting of hydrogen, alkyl of 1 to 3 carbon atoms and hydroxyalkyl of 1 to 3 carbon atoms, and from about 10 to about 70 weight percent of tetrahydrofuran.
Claim 3
Dependent Claim
26 words
A composition of claim 1 comprising from about 45 to about 90 weight percent of a 2-pyrrolidinone and from about 10 to about 55 weight tetrahydrofuran.
Claim 4
Dependent Claim
12 words
A composition of claim 2 comprising about 70% 1-methyl-2-pyrrolidinone and 30% tetrahydrofuran.
Claim 5
Dependent Claim
39 words
A composition of claim 1 having from about 10 to about 30 weight percent of a diethylene glycol monoalkyl ether of the formula HOCH.sub.2 CH.sub.2 --O--CH.sub.2 CH.sub.2 --O--R.sup.2 wherein R 2 is alkyl of 1 to 4 carbon atoms.
Claim 6
Dependent Claim
20 words
A composition of claim 4 having from about 2 to about 30 weight percent 2-(2-ethoxyethoxy)ethanol also present in the composition.
Claim 7
Dependent Claim
12 words
A composition of claim 2 comprising about 70% 2-pyrrolidinone and 30% tetrahydrofuran.
Claim 8
Dependent Claim
21 words
A composition of claim 1 having from about 3 to about 20 weight percent polyethylene glycol also present in the composition.
Claim 9
Dependent Claim
17 words
A composition of claim 7 comprising about 62% 1-methyl-2-pyrrolidinone, about 32% tetrahydrofuran and about 6% polyethylene glycol.
Claim 10
Dependent Claim
21 words
A composition of claim 5 having from about 3 to about 20 weight percent polyethylene glycol also present in the composition.
Claim 11
Dependent Claim
20 words
A composition of claim 9 comprising about 51% 1-methyl-2-pyrrolidinone, about 26% tetrahydrofuran about 17% 2-(2-ethoxyethoxy)ethanol, and about 6% polyethylene glycol.
Claim 12
Dependent Claim
17 words
A composition of claim 9 comprising about 62% 1-methyl-2-pyrrolidinone, about 32% tetrahydrofuran and about 20% polyethylene glycol.
Claim 13
Dependent Claim
18 words
The composition of claim 7 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 14
Dependent Claim
18 words
The composition of claim 8 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 15
Dependent Claim
18 words
The composition of claim 9 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 16
Dependent Claim
18 words
The composition of claim 10 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 17
Dependent Claim
18 words
The composition of claim 11 wherein the polyethylene glycol is polyethylene glycol of molecular weight of about 200.
Claim 18
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 1.
Claim 19
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 2.
Claim 20
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 3.
Claim 21
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 4.
Claim 22
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 5.
Claim 23
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 6.
Claim 24
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 7.
Claim 25
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 8.
Claim 26
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 9.
Claim 27
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 10.
Claim 28
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 11.
Claim 29
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 12.
Claim 30
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 13.
Claim 31
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 14.
Claim 32
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 15.
Claim 33
Dependent Claim
32 words
A method wherein unexposed photoresist is stripped from a substrate by contacting the unexposed photoresist with a stripping composition, the improvement comprising utilizing as the stripping composition the composition of claim 16.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-08-29 | 1987-02-28 | 1987-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-08-29 | 1991-02-28 | 1991-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-08-29 | 1995-02-28 | 1995-08-30 | $7700.00 | Window Closed / Lapsed |