US4401367A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for pattern masking objects and the products thereof
Assignee: Breed Automotive Technology Inc
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Filing: 1980-11-03
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Granted: 1983-08-30
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Expires: 2000-11-03
Abstract
Abstract A method is provided for pattern masking objects preparatory to subsequent working of the objects. The invention also includes those objects prepared in accordance with the method. The method is especially suited to the pattern-masking of relatively large and/or complexly shaped optical elements preparatory to the production of diffraction gratings thereat for use with laser radiation. The object to be worked, such as a mirror, is coated with a semiconductive masking material. Electrolytic etchant is placed on the masking material. Electromagnetic radiation of suitable wavelength and patterned in accordance with the desired pattern of the mask is projected through the etchant and onto the masking material. The radiation effects photoelectrochemical etching of the semiconductive masking material in the desired pattern to a desired depth. An etch-stop layer may be interposed between the object and the masking material to limit the etching action. The desired working of the substrate object, as for instance the formation of diffraction gratings thereat, may then be achieved, as by ion milling, deposition, or the like. The mask, and etch stop, if any, may finally be totally removed by suitable etch baths.
Inventors
- 👤 Daniel H. Grantham
- 👤 James L. Swindal
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:11
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0041; G02; G02B; G02B5/00; G02B5/18; G02B5/1847; G02B5/1857; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
149 words
A method for pattern-masking a surface of an object comprising the steps of: applying a thin, substantially uniform coating of a semiconductive mask material over said surface of said object; applying and maintaining an electrolytic etchant on the outer surface of said semiconductive mask material; projecting through said etchant and onto said semiconductive mask material electromagnetic radiation patterned in accordance with the pattern to be formed in the mask, the energy corresponding with wavelength of said electromagnetic radiation being at least as great as the band gap energy of said semiconductive mask material, whereby said semiconductive mask material, whereby said semiconductive mask material electrochemically reacts with and is etched by said etchant at a rate which is substantially faster where said radiation is incident thereon than where it is not; and continuing said photoelectrochemical etching of said semiconductive mask material until a desired depth of etch has been attained.
Claim 2
Independent Claim
149 words
A method for pattern-masking a surface of an object comprising the steps of: applying a thin, substantially uniform coating of a semiconductive mask material over said surface of said object; applying and maintaining an electrolytic etchant on the outer surface of said semiconductive mask material; projecting through said etchant and onto said semiconductive mask material electromagnetic radiation patterned in accordance with the pattern to be formed in the mask, the energy corresponding with wavelength of said electromagnetic radiation being at least as great as the band gap energy of said semiconductive mask material, whereby said semiconductive mask material, whereby said semiconductive mask material electrochemically reacts with and is etched by said etchant at a rate which is substantially faster where said radiation is incident thereon than where it is not; and continuing said photoelectrochemical etching of said semiconductive mask material until a desired depth of etch has been attained.
Claim 3
Dependent Claim
29 words
The method of claim 1 including the step of establisting an external conductive circuit between said etchant and a surface of said semiconductive mask material removed from said etchant.
Claim 4
Dependent Claim
44 words
The method of claim 2 wherein said step of establishing said external conductive circuit includes the step of connecting externally a source of electrical bias of suitable polarity and sufficient potential for maintaining said etching of said semiconductive mask material at a desired rate.
Claim 5
Dependent Claim
23 words
The method of claim 3 wherein said semiconductive mask material is amorphous silicon and said electrical bias in said external circuit is nil.
Claim 6
Dependent Claim
13 words
The method of claim 1 wherein said patterned electromagnetic radiation comprises an interferogram.
Claim 7
Dependent Claim
25 words
The method of claim 1 wherein the thickness of said coating of semiconductive mask material is in a range between about 1,000 and 10,000 A.
Claim 8
Dependent Claim
25 words
The method of claim 1 wherein said electromagnetic radiation is substantially monochromatic and has a wavelength in the range of 3,000 to about 40,000 A.
Claim 9
Dependent Claim
22 words
The method of claim 7 wherein said electromagnetic radiation has a wavelength in the range of about 4,000 to about 10,000 A.
Claim 10
Dependent Claim
22 words
The method of claim 1 wherein said semiconductive mask material is germanium, gallium arsenide, silicon, indium arsenide, gallium antimonide or indium antimonide.
Claim 11
Dependent Claim
29 words
The method of claim 9 wherein said semiconductive mask material is silicon and the wavelength of said electromagnetic radiation is in a range between about 4,000 and 10,000 A.
Claim 12
Dependent Claim
18 words
The method of claim 10 wherein the wavelength of said electromagnetic radiation is at least about 6300 A.
Claim 13
Dependent Claim
25 words
The method of claim 9 wherein said semiconductive mask material is germanium and the wavelength of said electromagnetic radiation is at least about 6300 A.
Claim 14
Dependent Claim
16 words
The method of claim 1 wherein said coating of semiconductive mask material is applied by deposition.
Claim 15
Dependent Claim
54 words
The method of claim 1 further including the step of applying a thin coating of etch stop material to said object surface prior to applying said coating of semiconductive mask material, said etch stop material serving to substantially prevent etching of said object by said etchant when said semiconductive mask material is etched through.
Claim 16
Dependent Claim
25 words
The method of claim 14 wherein said etchant reacts with said etch stop material to form a compound thereat which is insoluble by said etchant.
Claim 17
Dependent Claim
25 words
The method of claim 15 wherein said etch stop material is aluminum and said compound formed by reaction thereof with said etchant is aluminum oxide.
Claim 18
Dependent Claim
29 words
The method of claim 15 including a step of establishing an external conductive circuit between said etchant and a surface of said semiconductive mask material removed from said etchant.
Claim 19
Dependent Claim
38 words
The method of claim 17 wherein prior to said formation of said etchant-insoluble compound said etch stop material and said object are each electrically conductive and the external conductive circuit includes said object and said etch stop material.
Claim 20
Dependent Claim
33 words
The method of claim 14 wherein said photoelectrochemical etching of said object is continued until the pattern is etched through said semiconductive mask material to said etch stop material and is stopped thereby.
Claim 21
Dependent Claim
47 words
The method of claim 1 wherein said object is a curved mirror having a reflective surface area greater than about 25 square inches and said pattern corresponds with diffraction gratings to be formed in said mirror, said grating pattern being suitable for diffracting an infrared laser beam.
Claim 22
Dependent Claim
34 words
The method of claim 1 wherein the intensity of the electromagnetic radiation is varied within said pattern so as to thereby correspondingly vary the rate of said photoelectrochemical etching of said semiconductive mask material.
Claim 23
Dependent Claim
14 words
An object having a pattern-masked surface prepared according to the method of claim 1.
Claim 24
Independent Claim
176 words
A method for modifying the surface of an object in accordance with a particular pattern comprising: applying a thin, substantially uniform coating of a semiconductive mask material over said surface of said object; applying and maintaining an electrolytic etchant on the outer surface of said semiconductive mask material; projecting through said etchant and onto said semiconductive mask material electromagnetic radiation patterned in accordance with the particular pattern by which the surface of the object is to be modified, the wavelength of said electromagnetic radiation being sufficiently short to produce electron-hole pairs in said semiconductive mask material whereby said semiconductive mask material electrochemically reacts with and is etched by said etchant at a rate which is substantially faster where said rotation is incident thereon than where it is not; continuing said photoelectrochemical etching of said semiconductive mask material at least until said particular pattern has been etched therein; and selectively working the surface of said object in accordance with the pattern etched in said mask material thereby to modify said surface in accordance with said particular pattern.
Claim 25
Independent Claim
176 words
A method for modifying the surface of an object in accordance with a particular pattern comprising: applying a thin, substantially uniform coating of a semiconductive mask material over said surface of said object; applying and maintaining an electrolytic etchant on the outer surface of said semiconductive mask material; projecting through said etchant and onto said semiconductive mask material electromagnetic radiation patterned in accordance with the particular pattern by which the surface of the object is to be modified, the wavelength of said electromagnetic radiation being sufficiently short to produce electron-hole pairs in said semiconductive mask material whereby said semiconductive mask material electrochemically reacts with and is etched by said etchant at a rate which is substantially faster where said rotation is incident thereon than where it is not; continuing said photoelectrochemical etching of said semiconductive mask material at least until said particular pattern has been etched therein; and selectively working the surface of said object in accordance with the pattern etched in said mask material thereby to modify said surface in accordance with said particular pattern.
Claim 26
Dependent Claim
20 words
The method of claim 23 wherein said step of working the surface of said object comprises eroding said object surface.
Claim 27
Dependent Claim
16 words
The method of claim 24 wherein said step of eroding said object surface comprises ion milling.
Claim 28
Dependent Claim
29 words
The method of claim 24 including the step of establishing an external conductive circuit between said etchant and a surface of said semiconductive mask material removed from said etchant.
Claim 29
Dependent Claim
28 words
The method of claim 26 including the step of removing the remainder of said semiconductive mask material following said step of eroding said pattern into said object surface.
Claim 30
Dependent Claim
54 words
The method of claim 27 further including the step of applying a thin coating of etch stop material over said object surface prior to applying said coating of semiconductive mask material, said etch stop material serving to substantially prevent etching of said object by said etchant when said semiconductive mask material is etched through.
Claim 31
Dependent Claim
13 words
An object having a surface modified according to the method of claim 23.
Claim 32
Independent Claim
189 words
The method for producing gratings at a surface of an optical element comprising: applying a thin, substantially uniform coating of a semiconductive mask material over said surface of said optical element; applying and maintaining an electrolytic etchant on the outer surface of said semiconductive mask material; establishing an external conductive circuit between said etchant and a surface of said semiconductive mask material remote from said etchant; projecting through said etchant and onto said semiconductive mask material electromagnetic radiation patterned in accordance with the pattern to be formed in the mask, the wavelength of said electromagnetic radiation being less than the wavelength corresponding with the band gap energy of said semiconductive mask material, whereby said semiconductive mask material electrochemically reacts with and is etched by said etchant at a rate which is substantially faster where said radiation is incident thereon than where it is not; continuing said photoelectrochemical etching of said semiconductive mask material at least until the desired optical grating pattern has been etched therein; eroding said pattern-masked optical element surface to form said gradings therein; and removing the remainder of said semiconductive mask material comprising said pattern mask.
Claim 33
Independent Claim
189 words
The method for producing gratings at a surface of an optical element comprising: applying a thin, substantially uniform coating of a semiconductive mask material over said surface of said optical element; applying and maintaining an electrolytic etchant on the outer surface of said semiconductive mask material; establishing an external conductive circuit between said etchant and a surface of said semiconductive mask material remote from said etchant; projecting through said etchant and onto said semiconductive mask material electromagnetic radiation patterned in accordance with the pattern to be formed in the mask, the wavelength of said electromagnetic radiation being less than the wavelength corresponding with the band gap energy of said semiconductive mask material, whereby said semiconductive mask material electrochemically reacts with and is etched by said etchant at a rate which is substantially faster where said radiation is incident thereon than where it is not; continuing said photoelectrochemical etching of said semiconductive mask material at least until the desired optical grating pattern has been etched therein; eroding said pattern-masked optical element surface to form said gradings therein; and removing the remainder of said semiconductive mask material comprising said pattern mask.
Claim 34
Dependent Claim
56 words
The method of claim 30 further including the step of applying a thin coating of etch stop material over said optical element surface prior to applying said coating of semiconductive mask material, said etch stop material serving to substantially prevent etching of said optical element by said etchant when said semiconductive mask material is etched through.
Claim 35
Dependent Claim
22 words
The method of claim 31 wherein said coatings of etch stop material and semiconductive mask material are each applied by respective depositions.
Claim 36
Dependent Claim
15 words
A grating in an optical element prepared in accordance with the method of claim 32.
Claim 37
Dependent Claim
17 words
The method of claim 30 wherein said eroding of said pattern-masked optical element surface comprises ion milling.
Claim 38
Dependent Claim
51 words
The method of claim 30 wherein the intended optical gratings are of varying depth and the intensity of said electromagnetic radiation is varied within said pattern in accordance with said variations in intended grating depth so as to correspondingly vary the rate of said photoelectrochemical etching of said semiconductive mask material.
Claim 39
Dependent Claim
33 words
The method of claim 30 wherein said optical element is curved and has a reflective surface area greater than 25 square inches and said gratings are structured for diffracting an infrared laser beam.
Claim 40
Dependent Claim
15 words
A grating in an optical element prepared in accordance with the method of claim 36.
Claim 41
Dependent Claim
15 words
A grating in an optical element prepared in accordance with the method of claim 30.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-08-29 | 1987-02-28 | 1987-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-08-29 | 1991-02-28 | 1991-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-08-29 | 1995-02-28 | 1995-08-30 | $7700.00 | Window Closed / Lapsed |