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US4395435A
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Method for manufacturing information recording medium
Assignee: Toshiba Corp
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Filing: 1982-03-05
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Granted: 1983-07-26
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Expires: 2002-03-05
Abstract
Abstract An information recording medium is manufactured while placing, in a reaction region, a substrate on the surface of which is recorded information in the form of an indented pattern and the surface of which exhibits electrical conductivity. A plasma generating gas is introduced into a plasma generating region which is isolated from the reaction region. The plasma generating gas is activated by microwaves to generate a plasma. The plasma from the plasma generating region and an organic monomer are introduced into the reaction region independently of each other to initiate polymerization of the organic monomer. A dielectric layer of a polymer of the monomer and of a uniform, small thickness is formed along the indented pattern of the target.
Inventors
- 👤 Hideo Sanpei
- 👤 Kunio Matsuno
- 👤 Shyoji Hirano
- 👤 Katuya Kumagai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 18:50
CPC Classifications
C; C08; C08J; C08J7/00; C08J7/12; C08J7/123; G; G11; G11B; G11B9/00; G11B9/06; G11B9/061; G11B9/063; G11B9/067; Y; Y10; Y10S; Y10S261/00; Y10S261/88; Y10S261/89
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
117 words
A method for manufacturing an information recording medium, comprising: placing, in a reaction region, a target on a surface of which is recorded information in a form of an indented pattern and the surface of which exhibits electrical conductivity; introducing a plasma generating gas into a plasma generating region isolated from said reaction region, activating the plasma generating gas by microwaves to generate a plasma; and introducing the plasma from said plasma generating region and an organic monomer into said reaction region independently of each other to initiate polymerization of the organic monomer, thereby forming a dielectric layer of a polymer of the monomer and of a uniform, small thickness along the indented pattern of said target.
Claim 2
Independent Claim
117 words
A method for manufacturing an information recording medium, comprising: placing, in a reaction region, a target on a surface of which is recorded information in a form of an indented pattern and the surface of which exhibits electrical conductivity; introducing a plasma generating gas into a plasma generating region isolated from said reaction region, activating the plasma generating gas by microwaves to generate a plasma; and introducing the plasma from said plasma generating region and an organic monomer into said reaction region independently of each other to initiate polymerization of the organic monomer, thereby forming a dielectric layer of a polymer of the monomer and of a uniform, small thickness along the indented pattern of said target.
Claim 3
Dependent Claim
25 words
A method according to claim 1, wherein the organic monomer is introduced into said reaction region at a flow rate of 1 to 10 ml/min.
Claim 4
Dependent Claim
13 words
A method according to claim 2, wherein the organic monomer is a halide.
Claim 5
Dependent Claim
26 words
A method according to claim 3, wherein the halide is a member selected from the group consisting of tetrafluoroethylene, vinylidene fluoride, methylene chloride and mixtures thereof.
Claim 6
Dependent Claim
14 words
A method according to claim 2, wherein the organic monomer is a non-halide compound.
Claim 7
Dependent Claim
30 words
A method according to claim 5, wherein the non-halide compound is a member selected from the group consisting of silane compounds, styrene compounds, alkane compounds, cycloalkane compounds and mixtures thereof.
Claim 8
Dependent Claim
30 words
A method according to claim 1, wherein the organic monomer comprises the non-halide compound and 1 to 20% of an organic halide based on the weight of the non-halide compound.
Claim 9
Independent Claim
29 words
A method according to any one of claims 1 to 7, wherein the plasma is introduced into said reaction region at a flow rate of 100 to 300 ml/min.
Claim 10
Dependent Claim
24 words
A method according to claim 8, wherein the plasma generating gas is a member selected from the group consisting of argon, nitrogen and helium.
Claim 11
Dependent Claim
21 words
A method according to claim 8, wherein a total pressure of said reaction region is held at 1 to 3 Torr.
Claim 12
Dependent Claim
13 words
A method according to claim 10, wherein said target is rotated during polymerization.
Claim 13
Dependent Claim
13 words
A method according to claim 10, wherein said target is cooled during polymerization.
References Cited (Backward Citations)
US4018945A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-07-25 | 1987-01-24 | 1987-07-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-07-25 | 1991-01-24 | 1991-07-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-07-25 | 1995-01-24 | 1995-07-26 | $7700.00 | Window Closed / Lapsed |