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US4392228A Expired / Lapsed US ⏱️ 0.0 years remaining

Terraced substrate semiconductor laser

Assignee: Panasonic Holdings Corp
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Filing: 1981-05-11
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Granted: 1983-07-05
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Expires: 2001-05-11
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Abstract

Abstract A terraced semiconductor laser comprising semiconductor layers (10, 11, 12) including an active layer (11) formed on a terraced semiconductor substrate (9) in a manner to have an inclined part (111) ranging from the position above said step to the part shifted to the side of said thinner part, an overriding layer (13) having the opposite conductivity type to that of the uppermost layer (12) of said semiconductor layers (10, 11, 12) and formed on said uppermost layer (12), characterized by further comprising: a last layer (14) having the same conductivity type to that of the overriding layer (13) formed on the latter layer (13), said last layer (14) having a stripe-shaped through-opening (141) at the position which is a shifted position from the part immediately above said inclined part 111, thereby exposing a surface of said overriding layer (13) at the bottom of the through-opening (141), a conduction region (15) formed at least on the bottom and side faces of said stripe-shaped opening, in a manner to reach and contact said uppermost layer (12), a first electrode layer formed to contact to said conduction layer in said through-opening and a second electrode formed on the bottom face of said terraced semiconductor substrate. Short-circuiting of p-n junction is eliminated by the improved structure.

Inventors

  • 👤 Takako Okabe
  • 👤 Kunio Itoh
  • 👤 Takashi Sugino

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 07:58
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/20; H01S5/22; H01S5/223; H01S5/2238; H01S5/02; H01S5/0206; H01S5/0207; H01S5/022; H01S5/0233; H01S5/0234; H01S5/0235; H01S5/02355; H01S5/0237; H01S5/2054; H01S5/2059; H01S5/2072; H10; H10W; H10W72/00; H10W72/50; H10W72/531; H10W72/536; H10W72/551; H10W72/552; H10W72/5522; H10W72/851; H10W72/874; H10W72/884

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 220 words
In a semiconductor laser: a terraced semiconductor substrate (9) which has a thicker part and a thinner part with a step inbetween, semiconductor layers (10, 11, 12) including an active layer (11) formed on said terraced semiconductor substrate (9) in a manner to have an inclined part (111) ranging from the position above said step to the part shifted to the side of said thinner part, an overriding layer (13) having the opposite conductivity type to that of the uppermost layer (12) of said semiconductor layers (10, 11, 12) and formed on said uppermost layer (12), characterized by further comprising: a last layer (14) having the same conductivity type to that of the overriding layer (13) formed on the latter layer (13), said last layer (14) having a stripe-shaped through-opening (141) at the position which is a shifted position from the part immediately above said inclined part (111), thereby exposing a surface of said overriding layer (13) at the bottom of the through-opening (141), a conduction region (15) formed at least on the bottom and side faces of said stripe-shaped opening, in a manner to reach and contact said uppermost layer (12), a first electrode layer formed to contact to said conduction layer in said through-opening and a second electrode formed on the bottom face of said terraced semiconductor substrate.
Claim 2
Dependent Claim 220 words
In a semiconductor laser: a terraced semiconductor substrate (9) which has a thicker part and a thinner part with a step inbetween, semiconductor layers (10, 11, 12) including an active layer (11) formed on said terraced semiconductor substrate (9) in a manner to have an inclined part (111) ranging from the position above said step to the part shifted to the side of said thinner part, an overriding layer (13) having the opposite conductivity type to that of the uppermost layer (12) of said semiconductor layers (10, 11, 12) and formed on said uppermost layer (12), characterized by further comprising: a last layer (14) having the same conductivity type to that of the overriding layer (13) formed on the latter layer (13), said last layer (14) having a stripe-shaped through-opening (141) at the position which is a shifted position from the part immediately above said inclined part (111), thereby exposing a surface of said overriding layer (13) at the bottom of the through-opening (141), a conduction region (15) formed at least on the bottom and side faces of said stripe-shaped opening, in a manner to reach and contact said uppermost layer (12), a first electrode layer formed to contact to said conduction layer in said through-opening and a second electrode formed on the bottom face of said terraced semiconductor substrate.
Claim 3
Dependent Claim 23 words
A semiconductor laser in accordance with claim 1, wherein said first electrode (16) is bonded by a solder onto a heat sink (18).
Claim 4
Dependent Claim 16 words
A semiconductor laser in accordance with claim 1, wherein said second clad layer (12) is GaAlAs.
Claim 5
Dependent Claim 21 words
A semiconductor laser in accordance with claim 1, wherein said overriding layer (13) and said last layer (14) has different composition.
Claim 6
Dependent Claim 18 words
A semiconductor laser in accordance with claim 1, wherein said conduction layer (15) is a Zn diffused region.
Claim 7
Dependent Claim 14 words
A semiconductor laser in accordance with claim 1, wherein said active layer is GaAlAs.
Claim 8
Dependent Claim 13 words
A semiconductor laser in accordance with claim 1, wherein said substrate is GaAs.
Claim 9
Dependent Claim 17 words
A semiconductor laser in accordance with claim 1, wherein said second electrode has a wire bonded thereto.
Claim 10
Dependent Claim 23 words
A semiconductor laser in accordance with claim 2, wherein said solder is a low temperature metal and said heat sink is of copper.
Claim 11
Dependent Claim 20 words
A semiconductor laser in accordance with claim 4, wherein said overriding layer is GaAs and said last layer is GaAlAs.

References Cited (Backward Citations)

US4329661A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1986-07-04 1987-01-03 1987-07-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1990-07-04 1991-01-03 1991-07-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1994-07-04 1995-01-03 1995-07-05 $7700.00 Window Closed / Lapsed

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