Patent US5245422A successfully refreshed from Google Patents.
Patent US5010473A successfully refreshed from Google Patents.
US4384038A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing integrated optical waveguide circuits and circuits obtained by this method
Assignee: US Philips Corp
•
Filing: 1981-11-09
•
Granted: 1983-05-17
•
Expires: 2001-11-09
Abstract
Abstract Optical waveguide circuits, such as signal splitters, can be produced by etching grooves in a transparent, glass substrate and by filling the grooves with glass having a higher refractive index than the material of the substrate. The grooves have a semicircular cross-section and the filling glass is produced by a low temperature plasma-activated chemical vapor deposition process. Two substrates can be placed on top of each other, with the surfaces in which the filled grooves have been provided in contact, to form an integrated optical circuit.
Inventors
- 👤 Giok D. Khoe
- 👤 Hendrikus G. Kock
- 👤 Dieter Kuppers
- 👤 Hans-Jurgen Lydtin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 05:12
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/02; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/125; G02B6/13; G02B6/136
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
133 words
A method of producing an integrated optical waveguide circuit comprising the steps of: providing a glass substrate having a refractive index and having a surface; forming grooves in the substrate surface; and depositing glass, having a higher refractive index than the refractive index of the substrate, in the grooves; CHARACTERIZED IN THAT the grooves formed in the substrate have a substantially semicircular cross-section and are formed in a predetermined pattern by the steps of: providing a layer of metal on the substrate surface; providing a photomask on the metal layer, said photomask having apertures corresponding to the predetermined pattern of grooves; etching the metal layer, through the apertures in the photomask, down to the substrate to form apertures in the metal layer; and etching the substrate through the apertures in the metal layer.
Claim 2
Independent Claim
133 words
A method of producing an integrated optical waveguide circuit comprising the steps of: providing a glass substrate having a refractive index and having a surface; forming grooves in the substrate surface; and depositing glass, having a higher refractive index than the refractive index of the substrate, in the grooves; CHARACTERIZED IN THAT the grooves formed in the substrate have a substantially semicircular cross-section and are formed in a predetermined pattern by the steps of: providing a layer of metal on the substrate surface; providing a photomask on the metal layer, said photomask having apertures corresponding to the predetermined pattern of grooves; etching the metal layer, through the apertures in the photomask, down to the substrate to form apertures in the metal layer; and etching the substrate through the apertures in the metal layer.
Claim 3
Dependent Claim
32 words
A method as claim 1, CHARACTERIZED IN THAT the step of depositing glass comprises depositing glass directly from the gas phase by means of a nonisothermal plasma activated chemical vapor deposition process.
Claim 4
Independent Claim
191 words
A method of producing an integrated optical waveguide circuit comprising the steps of: providing a glass substrate having a refractive index and having a surface; forming grooves in the substrate surface; depositing glass, having a higher refractive index than the refractive index of the substrate, on the substrate and in the grooves so as to fill the grooves; and removing the excess deposited glass on the substrate so as to leave deposited glass in and filling the grooves; CHARACTERIZED IN THAT: the grooves formed in the substrate have a substantially semicircular cross-section and are formed in a predetermined pattern; the step of depositing glass comprises depositing glass directly from the gas phase by means of a nonisothermal plasma activated chemical vapor deposition process; and the grooves are formed by the steps of: providing a layer of metal on the substrate surface; providing a photomask on the metal layer, said photomask having apertures corresponding to the predetermined pattern of grooves; etching the metal layer, through the apertures in the photomask, down to the substrate to form apertures in the metal layer; and etching the substrate through the apertures in the metal layer.
Claim 5
Independent Claim
191 words
A method of producing an integrated optical waveguide circuit comprising the steps of: providing a glass substrate having a refractive index and having a surface; forming grooves in the substrate surface; depositing glass, having a higher refractive index than the refractive index of the substrate, on the substrate and in the grooves so as to fill the grooves; and removing the excess deposited glass on the substrate so as to leave deposited glass in and filling the grooves; CHARACTERIZED IN THAT: the grooves formed in the substrate have a substantially semicircular cross-section and are formed in a predetermined pattern; the step of depositing glass comprises depositing glass directly from the gas phase by means of a nonisothermal plasma activated chemical vapor deposition process; and the grooves are formed by the steps of: providing a layer of metal on the substrate surface; providing a photomask on the metal layer, said photomask having apertures corresponding to the predetermined pattern of grooves; etching the metal layer, through the apertures in the photomask, down to the substrate to form apertures in the metal layer; and etching the substrate through the apertures in the metal layer.
Claim 6
Dependent Claim
25 words
A method as claimed in claim 3, CHARACTERIZED IN THAT the deposited glass comprises a mixture of SiO 2 and Si 3 N 4 .
Claim 7
Dependent Claim
12 words
An integrated optical waveguide circuit made by the method of claim 4.
Claim 8
Dependent Claim
71 words
A method as claimed in claim 3, CHARACTERIZED IN THAT a second substrate having a surface with glass-filled grooves is prepared by the same method, the pattern of grooves in the second substrate being a mirror image of the pattern of grooves in the first substrate, and the substrate surfaces are placed in contact with each other such that the grooves are in registration and form waveguides having substantially circular cross-sections.
Claim 9
Dependent Claim
12 words
An integrated optical waveguide circuit made by the method of claim 6.
Claim 10
Dependent Claim
15 words
A method as claimed in claim 3, CHARACTERIZED IN THAT the metal layer comprises chromium.
Claim 11
Dependent Claim
12 words
An integrated optical waveguide circuit made by the method of claim 3.
References Cited (Backward Citations)
USRE30635E
Cited
US4296143A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-05-16 | 1986-11-15 | 1987-05-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-05-16 | 1990-11-15 | 1991-05-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-05-16 | 1994-11-15 | 1995-05-17 | $7700.00 | Window Closed / Lapsed |