US4382977A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing smooth metallic layers on a substrate
Assignee: United States Department of the Army
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Filing: 1982-01-11
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Granted: 1983-05-10
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Expires: 2002-01-11
Abstract
Abstract Smooth layers of a metal are produced on a glass substrate where a large ferential expansion coefficient of the metal relative to the substrate produces very large stresses in the metal when the metallized substrate is subjected to a post deposition anneal. The method involves depositing a layer of a metal having a very small self diffusion coefficient at the anneal temperature prior to depositing the metal having the large differential expansion coefficient.
Inventors
- 👤 Joseph Murphy
- 👤 William A. Hester
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:24
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/06; C03C17/09; C03C17/34; C03C17/36; C03C17/40; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K3/00; H05K3/38; H05K3/388; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12736; Y10T428/12743; Y10T428/1275
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
75 words
Method of producing a smooth layer of a metal on a glass substrate wherein a large differential expansion coefficient of the metal relative to the substrate produces very large stresses in the metal when the metallized substrate is subjected to a post deposition anneal, said method comprising depositing a layer of a metal having a very small self diffusion coefficient at the anneal temperature prior to depositing the metal having the large differential expansion coefficient.
Claim 2
Dependent Claim
75 words
Method of producing a smooth layer of a metal on a glass substrate wherein a large differential expansion coefficient of the metal relative to the substrate produces very large stresses in the metal when the metallized substrate is subjected to a post deposition anneal, said method comprising depositing a layer of a metal having a very small self diffusion coefficient at the anneal temperature prior to depositing the metal having the large differential expansion coefficient.
Claim 3
Dependent Claim
58 words
Method according to claim 1 wherein an amount of the metal having a very small self diffusion coefficient at the anneal temperature is added such that the migration rate through the metal having a very small self diffusion coefficient at the anneal temperature is greater than the migration rate in the metal having the large differential expansion coefficient.
Claim 4
Dependent Claim
23 words
Method according to claim 1 or claim 2 wherein the metal having the large differential expansion coefficient relative to the substrate is aluminum.
Claim 5
Dependent Claim
33 words
Method according to claim 1 or claim 2 wherein the metal having the very small self diffusion coefficient at the anneal temperature is selected from the group consisting of copper, nickel, and molybdenum.
Claim 6
Dependent Claim
10 words
Method according to claim 4 wherein the metal is copper.
Claim 7
Dependent Claim
10 words
Method according to claim 4 wherein the metal is nickel.
Claim 8
Dependent Claim
10 words
Method according to claim 4 wherein the metal is molybdenum.
Claim 9
Dependent Claim
50 words
Method of producing a smooth layer of aluminum on a glass substrate comprising depositing a layer of copper before depositing the aluminum so that the aluminum will be able to flow into the copper and will not develop spikes when the metallized substrate is subjected to a post deposition anneal.
Claim 10
Dependent Claim
50 words
Method of producing a smooth layer of aluminum on a glass substrate comprising depositing a layer of copper before depositing the aluminum so that the aluminum will be able to flow into the copper and will not develop spikes when the metallized substrate is subjected to a post deposition anneal.
Claim 11
Dependent Claim
59 words
Method of producing a smooth layer of aluminum on a glass substrate comprising depositing a layer of copper before depositing the aluminum, the layer of copper being deposited in such an amount that the migration rate through the copper is greater than the migration rate in the aluminum when the metallized substrate is subjected to a post deposition anneal.
Claim 12
Dependent Claim
59 words
Method of producing a smooth layer of aluminum on a glass substrate comprising depositing a layer of copper before depositing the aluminum, the layer of copper being deposited in such an amount that the migration rate through the copper is greater than the migration rate in the aluminum when the metallized substrate is subjected to a post deposition anneal.
Claim 13
Dependent Claim
69 words
Method of producing a smooth layer of aluminum of about 600 to 1200 angstroms in thickness on a glass substrate consisting of electron beam depositing a layer of copper of about 300 to 600 angstroms in thickness before depositing the aluminum so that the aluminum will be able to flow into the copper and will not develop spikes when the metallized substrate is subjected to a post deposition anneal.
Claim 14
Dependent Claim
69 words
Method of producing a smooth layer of aluminum of about 600 to 1200 angstroms in thickness on a glass substrate consisting of electron beam depositing a layer of copper of about 300 to 600 angstroms in thickness before depositing the aluminum so that the aluminum will be able to flow into the copper and will not develop spikes when the metallized substrate is subjected to a post deposition anneal.
References Cited (Backward Citations)
GB1067831A
Cited
US4302498A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-05-09 | 1986-11-08 | 1987-05-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-05-09 | 1990-11-08 | 1991-05-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-05-09 | 1994-11-08 | 1995-05-10 | $7700.00 | Window Closed / Lapsed |