Programmable read-only memory device

Claim 2

A PROM device, comprising: a semiconductor bulk, both PROM cells and peripheral circuits cooperating therewith formed in and on the same semiconductor bulk, and wherein each of the PROM cells comprise: a first pn junction and a second pn junction in series, both formed in said bulk; a metal electrode for use as a bit line, formed on the surface of the bulk adjacent to the second pn junction, the second pn junction being broken or not broken in accordance with data to be stored, said bulk being formed free of metal which acts as a life time killer; and a buffer layer, made of semiconductor material and formed between said metal electrode and the surface of said bulk, for preventing a metal-semiconductor eutectic from smoothly and deeply entering into the bulk toward said second pn junction, which metal-semiconductor eutectic grows, in the usual manner, between said metal electrode and said buffer layer during a heating process.

Claim 3

A device as set forth in claim 1, wherein said semiconductor bulk comprises a silicon substrate and an epitaxial layer formed thereon.

Claim 4

A device as set forth in claim 1, wherein said peripheral circuits are fabricated as Schottky TTL (transistor transistor logic) circuits.

Claim 5

A device as set forth in claim 1, wherein said buffer layer comprises polycrystalline silicon.

Claim 6

A device as set forth in claim 4, wherein said buffer layer further comprises monocrystalline silicon.

Claim 7

A device as set forth in claim 1, further comprising isolation areas formed in said bulk, said isolation areas isolating each PROM cell from neighboring PROM cells.

Claim 8

A device as set forth in claim 6, wherein each of said isolation areas is made in the form a V shaped groove.

Claim 9

A device as set forth in claim 1, wherein said second pn junction is formed by injecting impurities into the bulk through the buffer layer.

Claim 10

A device as set forth in claim 1 further comprising a parasitic vertical pnp transistor formed in the bulk beneath the PROM cell, the base of said transistor being connected to a word line (WL).

Claim 11

A PROM cell of the type having first and second junctions opposed in series, information being permanently stored in said PROM cell by selectively short circuiting said first junction, said PROM cell comprising: a substrate, comprising a semiconductor material of a first conductivity type; a epitaxial layer atop said substrate, comprising a semiconductor material of a second conductivity type; a first region in said epitaxial layer and spaced from said substrate, said first region comprising a semiconductor material of said first conductivity type and forming a first pn junction with said second conductivity type semiconductor material of said epitaxial layer; a second region in and spaced from said first pn junction, said second region comprising a semiconductor material of said second conductivity type and forming a second pn junction with said first conductivity type semiconductor material of said first region; a buffer layer atop said second region; and a metallic contact atop said buffer layer; said buffer layer preventing a metal-type semiconductor eutectic, formed of the metallic material of said metallic contact and the semiconductor material of said second region and which grows in the absence of said buffer layer during normal heating processes, from entering deeply into said epitaxial layer and towards said second pn junction.

Claim 12

A PROM cell of the type having first and second junctions opposed in series, information being permanently stored in said PROM cell by selectively short circuiting said first junction, said PROM cell comprising: a substrate, comprising a semiconductor material of a first conductivity type; a epitaxial layer atop said substrate, comprising a semiconductor material of a second conductivity type; a first region in said epitaxial layer and spaced from said substrate, said first region comprising a semiconductor material of said first conductivity type and forming a first pn junction with said second conductivity type semiconductor material of said epitaxial layer; a second region in and spaced from said first pn junction, said second region comprising a semiconductor material of said second conductivity type and forming a second pn junction with said first conductivity type semiconductor material of said first region; a buffer layer atop said second region; and a metallic contact atop said buffer layer; said buffer layer preventing a metal-type semiconductor eutectic, formed of the metallic material of said metallic contact and the semiconductor material of said second region and which grows in the absence of said buffer layer during normal heating processes, from entering deeply into said epitaxial layer and towards said second pn junction.

Claim 13

The device of claim 10, wherein said substrate and said epitaxial layer do not include gold or copper doping.

Claim 14

The device of claim 11, wherein said substrate and said epitaxial layer are free of metal which acts as a lifetime killer.

Claim 15

The device of claim 10, wherein said first conductivity type comprises type P, and said second conductivity type comprises type N.

Claim 16

The device of claim 10, wherein said first conductivity type comprises type N, and said second conductivity type comprises type P.

Claim 17

The device of claim 10, further comprising: a buried layer of said second conductivity type, positioned atop said substrate and beneath said epitaxial layer.

Claim 18

The device of claim 10, wherein said buffer layer comprises polysilicon.

Claim 19

The device of claim 10, wherein said metallic contact comprises aluminum.

Claim 20

The device of claim 10, wherein said metallic contact comprises an alloy of titanium and aluminum.

Claim 21

The device of claim 10, wherein said metallic contact comprises an alloy of titanium, tungsten, and aluminum.

Claim 22

The device of claim 10, wherein said epitaxial layer comprises a thickness significantly less than seven microns.

Claim 23

The device of claim 20, wherein said first region comprises a thickness significantly less than 2 microns.

Claim 24

The device of claim 21, wherein said second region comprises a thickness significantly less than 1 micron.

Claim 25

A PROM using PROM cells of the type having first and second junctions opposed in series, information being permanently stored in each said PROM cell by selectively short circuiting said first junction, each said PROM cell comprising: a substrate, comprising a semiconductor material of a first conductivity type; an epitaxial layer atop said said substrate, comprising a semiconductor material of a second conductivity type; a first region in said epitaxial layer and spaced from said substrate, said first region comprising a semiconductor material of a second conductivity type and forming a first pn junction; a second region in said first region and spaced from said first pn junction, said second region comprising a semiconductor material of said second conductivity type and forming a second pn junction; a buffer layer, atop said second region; and a metallic contact atop said buffer layer; said buffer layer preventing a metal-type semiconductor eutectic, formed of the metallic material of said metallic contact and the semiconductor material of said second region and which grows in the absence of said buffer layer during normal heating processes, from entering deeply into said epitaxial layer and towards said second pn junction said PROM device further comprising: a word line, comprising a semiconductor material having relatively high conductivity and being of said second conductivity type, said word line being adjacent to and in contact with said epitaxial layer.

Claim 26

A PROM using PROM cells of the type having first and second junctions opposed in series, information being permanently stored in each said PROM cell by selectively short circuiting said first junction, each said PROM cell comprising: a substrate, comprising a semiconductor material of a first conductivity type; an epitaxial layer atop said said substrate, comprising a semiconductor material of a second conductivity type; a first region in said epitaxial layer and spaced from said substrate, said first region comprising a semiconductor material of a second conductivity type and forming a first pn junction; a second region in said first region and spaced from said first pn junction, said second region comprising a semiconductor material of said second conductivity type and forming a second pn junction; a buffer layer, atop said second region; and a metallic contact atop said buffer layer; said buffer layer preventing a metal-type semiconductor eutectic, formed of the metallic material of said metallic contact and the semiconductor material of said second region and which grows in the absence of said buffer layer during normal heating processes, from entering deeply into said epitaxial layer and towards said second pn junction said PROM device further comprising: a word line, comprising a semiconductor material having relatively high conductivity and being of said second conductivity type, said word line being adjacent to and in contact with said epitaxial layer.

Claim 27

A PROM using PROM cells of the type having first and second junctions opposed in series, information being permanently stored in each said PROM cell by selectively short circuiting said first junction, each said PROM cell comprising: a substrate, comprising a semiconductor material of a first conductivity type; an epitaxial layer in said said substrate, comprising a semiconductor material of a second conductivity type; a first region in said epitaxial layer and spaced from said substrate, said first region comprising a semiconductor material of a second conductivity type and forming a first pn junction; a second region in said first region and spaced from said first pn junction, said second region comprising a semiconductor material of said second conductivity type and forming a second pn junction; a buffer layer atop said second region; and a metallic contact atop said buffer layer; said buffer layer preventing a metal-type semiconductor eutectic of the metallic material of said metallic contact and the semiconductor material of said second region which grows in the absence of said buffer layer during normal heating processes, from entering deeply into said epitaxial layer and towards said second pn junction; said PROM device further comprising: a word line comprising a semiconductor material having relatively high conductivity and being of said second conductivity type, said word line being adjacent to and in contact with said epitaxial layer; first isolation regions, parallel to said word line, extending vertically upward from said substrate; and second isolation regions, perpendicular to said word line, extending vertically upward from said word line and from said substrate without breaking and continuity of said word line.

Claim 28

A PROM using PROM cells of the type having first and second junctions opposed in series, information being permanently stored in each said PROM cell by selectively short circuiting said first junction, each said PROM cell comprising: a substrate, comprising a semiconductor material of a first conductivity type; an epitaxial layer in said said substrate, comprising a semiconductor material of a second conductivity type; a first region in said epitaxial layer and spaced from said substrate, said first region comprising a semiconductor material of a second conductivity type and forming a first pn junction; a second region in said first region and spaced from said first pn junction, said second region comprising a semiconductor material of said second conductivity type and forming a second pn junction; a buffer layer atop said second region; and a metallic contact atop said buffer layer; said buffer layer preventing a metal-type semiconductor eutectic of the metallic material of said metallic contact and the semiconductor material of said second region which grows in the absence of said buffer layer during normal heating processes, from entering deeply into said epitaxial layer and towards said second pn junction; said PROM device further comprising: a word line comprising a semiconductor material having relatively high conductivity and being of said second conductivity type, said word line being adjacent to and in contact with said epitaxial layer; first isolation regions, parallel to said word line, extending vertically upward from said substrate; and second isolation regions, perpendicular to said word line, extending vertically upward from said word line and from said substrate without breaking and continuity of said word line.

Claim 29

The device of claim 23 or 24, wherein said first and said second isolation regions each comprise: a V-groove formed in said epitaxial layer; a silicon dioxide layer lining the sides of said V-groove; and polysilicon, filling the centers of said V-grooves.

Claim 30

The device of claim 23 or 24, further comprising: decoding means operatively connected to said word line for selectively providing a current to said word line and to the PROM cell.

Claim 31

The device of claim 23 or 24, further comprising: decoding means operatively connected to said word line for selectively providing a current to said word line and to the PROM cell, said decoding means supplying said current in the amount of approximately 4 mA.

Claim 32

The device of claim 23 or 24, further comprising: decoding means operatively connected to said word line for selectively providing a current to said word line and to the PROM cell, said decoding means comprising a Schottky clamped transistor.