Method for producing nuclear traces or microholes originating from nuclear traces of an individual ion

Claim 2

Method for producing at least one nuclear trace, or a microhole originating from a nuclear trace, of a single ion or a countable number of ions at a desired location in a solid body by means of a beam of heavy ions in a heavy ion accelerator comprising the steps of: directing a defocused portion of a beam of accelerated ions onto a surface of a solid body via an aperture aligned with a desired location on the surface of said body; directly detecting the number of individual ion particles passing through said aperture and impinging on said body; and preventing other ion particles from passing through said aperture when a predetermined number of individual ion particles is detected by: initially blocking the entire beam by actuating a fast acting beam cut-off switch disposed in the slow portion of the beam path; thereafter actuating a slower acting beam cut-off switch, which is able to receive greater beam energies than the first switch and is disposed in the beam path behind the first switch and in said defocused portion of the beam path, to block said defocused portion of the beam path; and thereafter opening the first switch.

Claim 3

A method as defined in claim 1 further comprising etching said solid body, after irradiating of same with the predetermined number of individual ion particles, to expose the resulting nuclear trace and produce a microhole.

Claim 4

The method defined in claim 1 wherein said step of directly detecting includes disposing an individual ion detector behind said body to detect the number of individual ion particles passing through said body.

Claim 5

The method defined in claim 1 wherein said step of directly detecting includes disposing an individual ion detector between said aperture and said body to detect the number of impinging individual ion particles before they pass through the solid body.

Claim 6

The method defined in claim 1, 3 or 4 wherein said predetermined number is one.

Claim 7

Apparatus for producing at least one nuclear trace of a single ion or a countable number of ions at a desired location in a solid body by means of heavy ions including: a heavy ion accelerator having a locus for the solid body disposed in a downstream diverted portion of its beam path for impingement by same; a preliminary aperture disposed in said diverted downstream portion of said beam path in front of said locus for the solid body; detector means disposed adjacent said locus for the solid body for detecting individual ion particles passing through said aperture and impinging on the solid body and for providing a signal corresponding to the number of detected individual ion particles; a first fast acting electrostatic or electromagnetic shutter disposed in the upstream slow main portion of said beam path; a second slower shutter, which is able to receive greater beam energies than said first shutter, disposed in said downstream, diverted portion of said beam path; and means responsive to the signal from said detector means indicating the detection of a predetermined number of ion particles for actuating said first shutter to close same, and for simultaneously actuating said second shutter to close same.

Claim 8

Apparatus for producing at least one nuclear trace of a single ion or a countable number of ions at a desired location in a solid body by means of heavy ions including: a heavy ion accelerator having a locus for the solid body disposed in a downstream diverted portion of its beam path for impingement by same; a preliminary aperture disposed in said diverted downstream portion of said beam path in front of said locus for the solid body; detector means disposed adjacent said locus for the solid body for detecting individual ion particles passing through said aperture and impinging on the solid body and for providing a signal corresponding to the number of detected individual ion particles; a first fast acting electrostatic or electromagnetic shutter disposed in the upstream slow main portion of said beam path; a second slower shutter, which is able to receive greater beam energies than said first shutter, disposed in said downstream, diverted portion of said beam path; and means responsive to the signal from said detector means indicating the detection of a predetermined number of ion particles for actuating said first shutter to close same, and for simultaneously actuating said second shutter to close same.

Claim 9

Apparatus as defined in claim 6 wherein said second shutter is a Faraday cup.

Claim 10

Apparatus as defined in claim 6 wherein said means for actuating includes means for releasing said first shutter to open same when said second shutter has closed.

Claim 11

Apparatus as defined in claim 6 wherein said preliminary aperture is an already completely fabricated single hole membrane having a microhole.

Claim 12

The apparatus defined in claim 6 wherein said detector means is disposed in front of the solid body.

Claim 13

The apparatus defined in claim 6 wherein said detector means is disposed behind the solid body.