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US4362767A
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Magnetic thin film and method of making it
Assignee: Panasonic Holdings Corp
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Filing: 1979-11-21
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Granted: 1982-12-07
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Expires: 1999-11-21
Abstract
Abstract A magnetic thin film is composed of an oxide of FexCoyCuz having spinel structure wherein x, y and z represent respective atomic ratios, x+y+z=1, 0.50</=x<0.95, 0.05<y</=0.30 and 0</=z<0.20. Such film exhibits high coercive force and good squareness. The film is made by vapor depositing a material containing at least one of FexCoyCuz alloys and oxides thereof onto a substrate held at a temperature between 200 DEG and 500 DEG C. under an oxygen atmosphere with the pressure of above 10-4 Torr but below 10-3 Torr.
Inventors
- 👤 Norimoto Nouchi
- 👤 Kenji Kanai
- 👤 Nobuyuki Kaminaka
- 👤 Noboru Nomura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:56
CPC Classifications
H; H01; H01F; H01F10/00; H01F10/08; H01F10/10; H01F10/12; H01F10/16; G; G11; G11B; G11B5/00; G11B5/84; G11B5/851; H01F41/00; H01F41/14; H01F41/20; Y; Y10; Y10S; Y10S428/00; Y10S428/90
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
126 words
A method of making a magnetic thin film consisting essentially of the steps of: (a) preparing a deposition material including at least one of Fe x Co y Cu z alloys and oxides of said alloys, wherein x, y and z represent the respective atomic ratios, x+y+z=1, 0.50≦x<0.95, 0.05<y≦0.30 and 0<z≦0.20; (b) in a container, vapor depositing a film of said deposition material into a substrate held at a temperature between 200° and 500° C. under oxygen pressure in the range above 10 -4 Torr, but below 10 -3 Torr; and, (c) annealing said deposited film for at least 18 minutes under an oxygen pressure above 10 -4 Torr, but below 760×(1/5) Torr, with said substrate being held at a temperature between 200° and 500° C.
Claim 2
Independent Claim
126 words
A method of making a magnetic thin film consisting essentially of the steps of: (a) preparing a deposition material including at least one of Fe x Co y Cu z alloys and oxides of said alloys, wherein x, y and z represent the respective atomic ratios, x+y+z=1, 0.50≦x<0.95, 0.05<y≦0.30 and 0<z≦0.20; (b) in a container, vapor depositing a film of said deposition material into a substrate held at a temperature between 200° and 500° C. under oxygen pressure in the range above 10 -4 Torr, but below 10 -3 Torr; and, (c) annealing said deposited film for at least 18 minutes under an oxygen pressure above 10 -4 Torr, but below 760×(1/5) Torr, with said substrate being held at a temperature between 200° and 500° C.
Claim 3
Dependent Claim
21 words
The method according to claim 1 wherein the annealing step is performed in the same container as the vapor deposition step.
Claim 4
Independent Claim
23 words
The method according to any one of claims 2 or 1 wherein the resultant film exhibits a coercive force (Hc) of 3000 Oe.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-12-06 | 1986-06-07 | 1986-12-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-12-06 | 1990-06-07 | 1990-12-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-12-06 | 1994-06-07 | 1994-12-07 | $7700.00 | Window Closed / Lapsed |