Abstract A polishing method suitable for use in working a surface of a magnetic material such as materials of magnetic head into a mirror-finished surface. The work is placed in a treating liquid cell such that its surface to be worked is opposed by the surface of a lap. The treating liquid contains fine polishing grains of magnesium oxide as the polishing agent, by an amount less than 4 wt %, and may contain 10 to 30 wt % of glycerol for increasing the viscosity. As a relative movement occurs between the work and the lap, the treating liquid forms a state of a dynamic-pressure bearing between the opposing surfaces of the work and lap, so that the surface of the work is polished into mirror surface by the action of the magnesium oxide without contacting the lap directly.
A polishing method for mirror-finishing the surface of a work with a surface roughness of less than 0.05 μm comprising the steps of: preparing a treating liquid which contains, as a viscosity increasing agent, from 10 wt% to 30 wt% of glycerol and from 1 wt% to 4 wt% of magnesium oxide particles having a grain size in the order of 0.1 μm; and causing a relative movement between said surface of said work and a lap so as to produce therebetween a state of dynamic-pressure fluid bearing sufficient to float said work in said treating liquid, thereby separating the surface of said work from said lap during the polishing process, while said magnesium oxide particles collide with said surface of said work in association with said treating liquid in a flow state to cause elastic fracture, so that said surface of said work is mirror-finished with no work-affected layer by said magnesium oxide particles.
Claim 2
Dependent Claim
155 words
A polishing method for mirror-finishing the surface of a work with a surface roughness of less than 0.05 μm comprising the steps of: preparing a treating liquid which contains, as a viscosity increasing agent, from 10 wt% to 30 wt% of glycerol and from 1 wt% to 4 wt% of magnesium oxide particles having a grain size in the order of 0.1 μm; and causing a relative movement between said surface of said work and a lap so as to produce therebetween a state of dynamic-pressure fluid bearing sufficient to float said work in said treating liquid, thereby separating the surface of said work from said lap during the polishing process, while said magnesium oxide particles collide with said surface of said work in association with said treating liquid in a flow state to cause elastic fracture, so that said surface of said work is mirror-finished with no work-affected layer by said magnesium oxide particles.