Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
192 words
Apparatus comprising means for monitoring the intensity of charged particle beams, said beam intensity monitoring means being disposable in the path of such a charged particle beam, said beam monitoring means including means for preventing the passage of a constant cross-sectional portion of such charged particle beam through said beam monitoring means and for concomitantly permitting the passage of the remaining cross-sectional portion of the charged particle beam through said beam monitoring means without change, said beam monitoring means also including means for providing a signal which is indicative of the intensity of the charged particle beam cross-sectional portion which is prevented from passing therethrough; whereby, the provision of a signal indicative of the intensity of the charged particle beam cross-sectional portion which is permitted to pass through said beam monitoring means and the determination of the ratio of that signal to said signal provided by said beam monitoring means over a predetermined range of charged particle beam intensities will enable the subsequent determination of the intensity of said charged particle beam cross-sectional portion which is permitted to pass through said beam monitoring means by determination of said beam monitoring means signal.
Claim 2
Dependent Claim
192 words
Apparatus comprising means for monitoring the intensity of charged particle beams, said beam intensity monitoring means being disposable in the path of such a charged particle beam, said beam monitoring means including means for preventing the passage of a constant cross-sectional portion of such charged particle beam through said beam monitoring means and for concomitantly permitting the passage of the remaining cross-sectional portion of the charged particle beam through said beam monitoring means without change, said beam monitoring means also including means for providing a signal which is indicative of the intensity of the charged particle beam cross-sectional portion which is prevented from passing therethrough; whereby, the provision of a signal indicative of the intensity of the charged particle beam cross-sectional portion which is permitted to pass through said beam monitoring means and the determination of the ratio of that signal to said signal provided by said beam monitoring means over a predetermined range of charged particle beam intensities will enable the subsequent determination of the intensity of said charged particle beam cross-sectional portion which is permitted to pass through said beam monitoring means by determination of said beam monitoring means signal.
Claim 3
Dependent Claim
29 words
An apparatus as in claim 1, wherein said means to prevent the passage of a beam portion comprises a member of a material through which said beam cannot pass.
Claim 4
Dependent Claim
14 words
An apparatus as in claim 2, wherein an aperture is formed in said member.
Claim 5
Dependent Claim
29 words
An apparatus as in claim 2, wherein said means is operable to output a current proportional in magnitude to the intensity of the beam portion incident on said member.
Claim 6
Dependent Claim
22 words
An apparatus as in claim 3, wherein said member is generally planar and is disposed generally perpendicularly of said charged particle beam.
Claim 7
Dependent Claim
20 words
An apparatus as in claim 3, wherein said member is a disc and said aperture is formed generally centrally thereof.
Claim 8
Dependent Claim
13 words
An apparatus as in claim 3, wherein said material is a foil material.
Claim 9
Dependent Claim
38 words
An apparatus as in claim 5, further comprising tubes extending to both sides of said member and generally perpendicularly thereof with the longitudinal axis of said tubes being in substantial alignment with the longitudinal axis of said aperture.
Claim 10
Dependent Claim
11 words
An apparatus as in claim 7, wherein said material is tantalum.
Claim 11
Dependent Claim
22 words
An apparatus as in claim 8, wherein the inside diameter of said tubes is substantially greater than the diameter of said aperture.
Claim 12
Dependent Claim
42 words
An apparatus as in claim 1, further comprising, calibration means disposable in the path of the beam portion which passes through said beam monitoring means, said calibration means being operable to provide a signal indicative of the intensity of said beam portion.
Claim 13
Dependent Claim
16 words
An apparatus as in claim 11, further comprising, means to determine the ratio between said signals.
Claim 14
Dependent Claim
14 words
An apparatus as in claim 11, wherein said calibration means comprises a Faraday cup.
Claim 15
Independent Claim
166 words
A method for monitoring the intensities of charged particle beams comprising the steps of, preventing the passage of a cross-sectional portion of a charged particle beam through beam intensity monitoring means, concomitantly permitting the passage of another cross-sectional portion of such charged particle beam through said beam intensity monitoring means, and concomitantly providing a signal indicative of the intensity of said charged particle beam cross-sectional portion which is prevented from passing through said beam intensity monitoring means whereby, the provision of a signal indicative of the intensity of said charged particle beam cross-sectional portion which is permitted to pass through said beam monitoring means and the determination of the ratio of that signal to the signal provided by said beam monitoring means over a predetermined range of charged particle beam intensities will enable the subsequent determination of the intensity of the charged particle beam cross-sectional portion which is permitted to pass through the beam intensity monitoring means by determination of said beam intensity monitoring means signal.
Claim 16
Independent Claim
166 words
A method for monitoring the intensities of charged particle beams comprising the steps of, preventing the passage of a cross-sectional portion of a charged particle beam through beam intensity monitoring means, concomitantly permitting the passage of another cross-sectional portion of such charged particle beam through said beam intensity monitoring means, and concomitantly providing a signal indicative of the intensity of said charged particle beam cross-sectional portion which is prevented from passing through said beam intensity monitoring means whereby, the provision of a signal indicative of the intensity of said charged particle beam cross-sectional portion which is permitted to pass through said beam monitoring means and the determination of the ratio of that signal to the signal provided by said beam monitoring means over a predetermined range of charged particle beam intensities will enable the subsequent determination of the intensity of the charged particle beam cross-sectional portion which is permitted to pass through the beam intensity monitoring means by determination of said beam intensity monitoring means signal.
Claim 17
Dependent Claim
41 words
In a method as in claim 14, wherein the step of preventing the passage of said beam portion comprises, the step of disposing a part of said beam monitoring means through which said beam portion cannot pass in the path thereof.
Claim 18
Dependent Claim
34 words
In a method as in claim 14, wherein the step of permitting passage of said another beam portion comprises the step of disposing an aperture in said beam monitoring means in the path thereof.
Claim 19
Dependent Claim
52 words
In a method as in claim 14, further comprising the step of, disposing calibration means which are operable to provide a signal indicative of the intensity of a charged particle beam which is incident thereon in the path of said another beam portion to provide a signal indicative of the intensity thereof.
Claim 20
Dependent Claim
18 words
In a method as in claim 17, further comprising the step of, determining the ratio between said signals.