US4352878A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photoresist composition
Assignee: Hitachi Ltd
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Filing: 1980-10-06
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Granted: 1982-10-05
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Expires: 2000-10-06
Abstract
Abstract When a low molecular weight dihydric or trihydric alcohol is added to a photoresist composition comprising a water-soluble polymer substance and a diazide photo-crosslinking agent, the fluidity of the composition is improved and the drying speed is moderately retarded and it enables the formation of a photoresist layer having a uniform film thickness and uniform drying degree. The said alcohol is exemplified by ethylene glycol, glycerol, etc. and is preferably added in an amount of 5-300 parts by weight per 100 parts by weight of the water-soluble polymer substance.
Inventors
- 👤 Kiyoshi Miura
- 👤 Naomitsu Watanabe
- 👤 Yoshifumi Tomita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 10:25
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; G03F7/0085; G03F7/085
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
90 words
A photoresist coated article which comprises a photosensitive photoresist layer on a glass substrate in which a photoresist composition is coated on the substrate by rotation of said substrate and the composition is allowed to dry to form said photoresist layer, the photoresist composition comprising a bisazide photo-crosslinking agent, a water-soluble polymeric substance capable of being photo-crosslinked by said bisazide photo-crosslinking agent, and 5 to 300 parts by weight per 100 parts by weight of said water-soluble polymeric substance of dihydric alcohol having a molecular weight of 60 to 110.
Claim 2
Dependent Claim
90 words
A photoresist coated article which comprises a photosensitive photoresist layer on a glass substrate in which a photoresist composition is coated on the substrate by rotation of said substrate and the composition is allowed to dry to form said photoresist layer, the photoresist composition comprising a bisazide photo-crosslinking agent, a water-soluble polymeric substance capable of being photo-crosslinked by said bisazide photo-crosslinking agent, and 5 to 300 parts by weight per 100 parts by weight of said water-soluble polymeric substance of dihydric alcohol having a molecular weight of 60 to 110.
Claim 3
Dependent Claim
26 words
An article according to claim 1, wherein said alcohol is selected from the group consisting of ethylene glycol, diethylene glycol, propylene glycol, 1,3-butylene glycol, and 1,5-pentanediol.
Claim 4
Dependent Claim
41 words
An article according to claim 1, wherein said water-soluble polymeric substance is selected from the group consisting of gelatine, polyacrylamide, polyvinyl pyrrolidone, polyvinyl methyl ether, polyvinyl acetal, acrylamide-diacetone acrylamide copolymers, acrylamide-vinyl alcohol copolymers, acrylamide-vinylpyrrolidone copolymers and maleic acid-vinyl methyl ether copolymers.
Claim 5
Dependent Claim
26 words
An article according to claim 1, wherein said bisazide photo-crosslinking agent is selected from the group consisting of 4,4'-diazidostilbene-2,2'-disulfonic acid, 4,4'-diazidostilbene-α-carboxylic acid and metal salts thereof.
Claim 6
Dependent Claim
15 words
An article according to claim 1, wherein said photoresist composition further contains an adhesiveness improver.
Claim 7
Dependent Claim
26 words
An article according to claim 5, wherein said composition further contains an adhesion promotor selected from the group consisting of vinyltris (β-methoxyethoxy) silane, N-β-(aminoethyl)-γ-aminopropylmethyldimethoxysilane, and N-β-(aminoethyl)-γ-aminopropyltrimethoxysilane.
Claim 8
Dependent Claim
97 words
A photoresist coated article which comprises a photosensitive photoresist layer on a glass substrate in which a photoresist composition is coated on the substrate by rotation of said substrate and the composition is allowed to dry to form said photoresist layer, the photoresist composition before drying comprising an aqueous solution containing water, a bisazide photo-crosslinking agent, a water-soluble polymeric substance capable of being photo-crosslinked by said bisazide photo-crosslinking agent, and 5 to 300 parts by weight per 100 parts by weight of said water-soluble polymeric substance of dihydric alcohol having a molecular weight of 60 to 110.
Claim 9
Dependent Claim
97 words
A photoresist coated article which comprises a photosensitive photoresist layer on a glass substrate in which a photoresist composition is coated on the substrate by rotation of said substrate and the composition is allowed to dry to form said photoresist layer, the photoresist composition before drying comprising an aqueous solution containing water, a bisazide photo-crosslinking agent, a water-soluble polymeric substance capable of being photo-crosslinked by said bisazide photo-crosslinking agent, and 5 to 300 parts by weight per 100 parts by weight of said water-soluble polymeric substance of dihydric alcohol having a molecular weight of 60 to 110.
Claim 10
Dependent Claim
26 words
An article according to claim 7, wherein said alcohol is selected from the group consisting of ethylene glycol, diethylene glycol, propylene glycol, 1,3-butylene glycol, and 1,5-pentanediol.
Claim 11
Dependent Claim
41 words
An article according to claim 8, wherein said water-soluble polymeric substance is selected from the group consisting of gelatine, polyacrylamide, polyvinyl pyrrolidone, polyvinyl methyl ether, polyvinyl acetal, acrylamide-diacetone acrylamide copolymers, acrylamide-vinyl alcohol copolymers, acrylamide-vinylpyrrolidone copolymers and maleic acid-vinyl methyl ether copolymers.
Claim 12
Dependent Claim
26 words
An article according to claim 9, wherein said bisazide photo-crosslinking agent is selected from the group consisting of 4,4'-diazidostilbene-2,2'-disulfonic acid, 4,4'-diazidostilbene-α-carboxylic acid and metal salts thereof.
Claim 13
Dependent Claim
26 words
An article according to claim 10, wherein said composition further contains an adhesion promotor selected from the group consisting of vinyltris (β-methoxyethoxy) silane, N-β-(aminoethyl)γ-aminopropylmethyldimethoxysilane, and N-β-(aminoethyl)-γ-aminopropyltrimethoxysilane.
Claim 14
Dependent Claim
28 words
An article according to claim 7, wherein said bisazide photo-crosslinking agent, said water-soluble polymeric substance and said dihydric alcohol are dissolved in a solvent consisting essentially of water.
Claim 15
Dependent Claim
12 words
An article according to claim 12, wherein said solvent consists of water.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-10-04 | 1986-04-05 | 1986-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-10-04 | 1990-04-05 | 1990-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-10-04 | 1994-04-05 | 1994-10-05 | $7700.00 | Window Closed / Lapsed |