US4352836A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for obtaining an abrasive coating
Assignee: RCA Corp
•
Filing: 1981-04-20
•
Granted: 1982-10-05
•
Expires: 2001-04-20
Abstract
Abstract A method of preparing an abrasive silicon oxide coating on a substrate which includes glow discharging silane and N2O in the presence of a substrate whereby a first silicon oxide layer having a refractive index of between about 1.0 and 1.2 as measured by ellipsometry is deposited. A second silicon oxide layer having a refractive index of between about 1.30 and 1.48 as measured by ellipsometry is glow discharge deposited onto the first layer.
Inventors
- 👤 John W. Robinson
- 👤 Grzegorz Kaganowicz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 11:56
CPC Classifications
B; B24; B24D; B24D18/00; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; G; G11; G11B; G11B3/00; G11B3/44; G11B3/56
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
82 words
A method for preparing a silicon oxide (SiO x ) abrasive coating, wherein 1≦x≦2, on a substrate comprising the steps of: subjecting N 2 O and SiH 4 to a glow discharge; depositing a first SiO x layer having a refractive index as measured by ellipsometry of between about 1.0 and 1.2 onto the substrate; and depositing a second SiO x layer having a refractive index as measured by ellipsometry of between about 1.30 and 1.48 onto the first SiO x layer.
Claim 2
Independent Claim
82 words
A method for preparing a silicon oxide (SiO x ) abrasive coating, wherein 1≦x≦2, on a substrate comprising the steps of: subjecting N 2 O and SiH 4 to a glow discharge; depositing a first SiO x layer having a refractive index as measured by ellipsometry of between about 1.0 and 1.2 onto the substrate; and depositing a second SiO x layer having a refractive index as measured by ellipsometry of between about 1.30 and 1.48 onto the first SiO x layer.
Claim 3
Dependent Claim
30 words
A method in accordance with claim 1 wherein the partial pressure ratio of SiH 4 to N 2 O during deposition of the first SiO x layer is about 1:6.
Claim 4
Dependent Claim
30 words
A method in accordance with claim 1 wherein the partial pressure ratio of SiH 4 to N 2 O during deposition of the second SiO x layer is about 1:6.
Claim 5
Dependent Claim
34 words
A method in accordance with claim 1 wherein the ratio of the thickness of the first SiO x layer to the thickness of the second SiO x layer is between about 1:1 and 3:1.
Claim 6
Dependent Claim
18 words
A method in accordance with claim 1 herein the substrate is a homopolymer or copolymer of vinyl chloride.
Claim 7
Dependent Claim
16 words
A method in accordance with claim 5 wherein the substrate is coated with a metal layer.
Claim 8
Dependent Claim
32 words
A method in accordance with claim 1 wherein the partial pressure of N 2 O for the deposition of the first SiO x layer is at least about 60 micrometers of mercury.
Claim 9
Dependent Claim
21 words
A method in accordance with claim 7 wherein the partial pressure of N 2 O is about 133 micrometers of mercury.
Claim 10
Dependent Claim
30 words
A method in accordance with claim 1 wherein the partial pressure of N 2 O for the deposition of the second SiO x layer is about 30-35 micrometers of mercury.
Claim 11
Dependent Claim
20 words
A method in accordance with claim 1 wherein the total thickness of the SiO x coating is about 1,500 angstroms.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-10-04 | 1986-04-05 | 1986-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-10-04 | 1990-04-05 | 1990-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-10-04 | 1994-04-05 | 1994-10-05 | $7700.00 | Window Closed / Lapsed |