Patent US4352607A successfully refreshed from Google Patents.
US4352607A
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Automatic wafer processing system and method
Assignee: GCA Corp
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Filing: 1980-12-11
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Granted: 1982-10-05
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Expires: 2000-12-11
Abstract
Abstract An automatic wafer processing system is modular in format and includes wafer treatment units, storage units and air bearing transport track units which are all operatively interconnected in a coplanar configuration to provide an automated wafer flow path. To facilitate such automated system improved variable width air bearing tracks are provided by flexible strips in slots.
Inventors
- 👤 W. L. Loveless
- 👤 Richard J. Trott
- 👤 Robert H. Heath
- 👤 William L. Glick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 19:57
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/36; H10P72/3604; C; C30; C30B; C30B35/00; C30B35/005
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
68 words
A method of producing a variable width track assembly with a flat fluid bearing surface over which fragile articles are transported comprising the following steps: providing a plurality of parallel slot pairs in said flat surface; providing a pair of flexible strips; inserting only a portion of said pair of strips in a slot pair corresponding to a predetermined track width to thereby form guides for said articles.
Claim 2
Independent Claim
68 words
A method of producing a variable width track assembly with a flat fluid bearing surface over which fragile articles are transported comprising the following steps: providing a plurality of parallel slot pairs in said flat surface; providing a pair of flexible strips; inserting only a portion of said pair of strips in a slot pair corresponding to a predetermined track width to thereby form guides for said articles.
Claim 3
Dependent Claim
50 words
A method as in claim 12 where said track assembly is of the "L" type for making left or right turns and where the one of said pair of strips forming the outer radius of the turn is placed in a slot except for a curved portion of the strip.
Claim 4
Dependent Claim
15 words
A method as in claim 1 including the step of clamping said slots by wedging.
References Cited (Backward Citations)
GB1195596A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-10-04 | 1986-04-05 | 1986-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-10-04 | 1990-04-05 | 1990-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-10-04 | 1994-04-05 | 1994-10-05 | $7700.00 | Window Closed / Lapsed |