US4350564A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of etching metallic materials including a major percentage of chromium
Assignee: Lockheed Martin Corp
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Filing: 1980-10-27
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Granted: 1982-09-21
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Expires: 2000-10-27
Abstract
Abstract A method of etching a desired pattern in a thin film of chromium deposited on a substrate is described. A layer of a masking material which is etch-resistant is formed on the film of chromium and provided with the desired pattern. Portions of the thin film of chromium uncovered by the patterned layer of etch-resistant material are covered with a thin layer of aluminum having a multiplicity of holes. The substrate including the layer of aluminum in contact with thin film of chromium is immersed in a dilute hydrochloric acid solution whereby the layer of aluminum and the portion of the thin film of chromium in contact therewith are dissolved thereby providing the desired pattern in the thin film of chromium.
Inventors
- 👤 Ching-Yeu Wei
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 06:09
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/60; H10P50/66; H10P50/663; H10P50/667; C; C23; C23F; C23F1/00; C23F1/02
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
183 words
A method of etching a first pattern in a film of a metal including a major percentage of chromium formed on the surface of a substrate comprising: depositing a layer of a material which is resistant to the etching action of an acidic etchant over the exposed surface of said film of metal, forming in said layer of etch-resistant material a second pattern which is substantially identical to said first pattern to expose portions of said film of metal constituting said first pattern, depositing a thin layer of a metal electropositive with respect to chromium on the portions of said film of metal exposed by said second pattern, said layer being provided with a multiplicity of holes extending between major surfaces thereof, etching the portions of said layer of metal deposited in the portions of said layer of etch-resistant material exposed by said second pattern and the portions of said film of metal lying thereunder with said acidic etchant to remove the portions of said film of metal contained within said first pattern and the portions of said layer of metal lying thereover.
Claim 2
Independent Claim
183 words
A method of etching a first pattern in a film of a metal including a major percentage of chromium formed on the surface of a substrate comprising: depositing a layer of a material which is resistant to the etching action of an acidic etchant over the exposed surface of said film of metal, forming in said layer of etch-resistant material a second pattern which is substantially identical to said first pattern to expose portions of said film of metal constituting said first pattern, depositing a thin layer of a metal electropositive with respect to chromium on the portions of said film of metal exposed by said second pattern, said layer being provided with a multiplicity of holes extending between major surfaces thereof, etching the portions of said layer of metal deposited in the portions of said layer of etch-resistant material exposed by said second pattern and the portions of said film of metal lying thereunder with said acidic etchant to remove the portions of said film of metal contained within said first pattern and the portions of said layer of metal lying thereover.
Claim 3
Dependent Claim
18 words
The method of claim 1 in which said layer of metal electropositive with respect to chromium is aluminum.
Claim 4
Dependent Claim
36 words
The method of claim 2 in which etching of said film of metal and said layer of aluminum is accomplished by immersion of said substrate with said film and said layers thereon in said acidic etchant.
Claim 5
Dependent Claim
21 words
The method of claim 1 in which said film of metal has a coating of chromium oxide on the surface thereof.
Claim 6
Dependent Claim
15 words
The method of claim 1 in which said film of metal is substantially all chromium.
Claim 7
Dependent Claim
17 words
The method of claim 1 in which said film of metal includes a minor percentage of nickel.
Claim 8
Dependent Claim
17 words
The method of claim 1 in which said acidic etchant is a dilute solution of hydrochloric acid.
Claim 9
Dependent Claim
18 words
The method of claim 7 in which the dilutant of said dilute solution of hydrochloric acid is glycerine.
Claim 10
Dependent Claim
31 words
The method of claim 2 in which said layer of aluminum has a thickness less than a value at which voids inherently included in deposited layers of aluminum are substantially nonexistent.
Claim 11
Dependent Claim
18 words
The method of claim 2 in which said layer of aluminum is less than about 400 Angstroms thick.
Claim 12
Dependent Claim
23 words
The method of claim 1 in which said substrate includes a layer of silicon dioxide on which said film of metal is formed.
Claim 13
Dependent Claim
28 words
The method of claim 1 in which said layer of etchresistant material having said second pattern is removed after etching said first pattern in said film of metal.
Claim 14
Independent Claim
180 words
A method of etching a first pattern in a film of a metal including a major percentage of chromium formed on the surface of a substrate comprising: depositing a layer of a metal electropositive with respect to chromium on the exposed surface of said film of metal, said layer being provided with a multiplicity of holes extending between major surfaces thereof, depositing a layer of material which is resistant to the etching action of an acidic etchant over the exposed surface of said layer of metal, forming in said layer of etch-resistant material a second pattern which is substantially identical to said first pattern to expose portions of said layer of metal uncovered thereby, etching the portions of said layer of metal exposed by said second pattern and the portions of said film of metal lying thereunder with said acidic etchant to remove the portions of said film of metal contained within said first pattern and the portions of said layer of metal lying thereover, removing said layer of etch-resistant material, removing the remaining portions of said layer of metal.
Claim 15
Independent Claim
180 words
A method of etching a first pattern in a film of a metal including a major percentage of chromium formed on the surface of a substrate comprising: depositing a layer of a metal electropositive with respect to chromium on the exposed surface of said film of metal, said layer being provided with a multiplicity of holes extending between major surfaces thereof, depositing a layer of material which is resistant to the etching action of an acidic etchant over the exposed surface of said layer of metal, forming in said layer of etch-resistant material a second pattern which is substantially identical to said first pattern to expose portions of said layer of metal uncovered thereby, etching the portions of said layer of metal exposed by said second pattern and the portions of said film of metal lying thereunder with said acidic etchant to remove the portions of said film of metal contained within said first pattern and the portions of said layer of metal lying thereover, removing said layer of etch-resistant material, removing the remaining portions of said layer of metal.
Claim 16
Dependent Claim
18 words
The method of claim 13 in which said layer of metal electropositive with respect to chromium is aluminum.
Claim 17
Dependent Claim
31 words
The method of claim 14 in which said layer of aluminum has a thickness less than a value at which voids inherently included in deposited layers of aluminum are substantially nonexistent.
Claim 18
Dependent Claim
18 words
The method of claim 14 in which said layer of aluminum is less than about 400 Angstroms thick.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-09-20 | 1986-03-22 | 1986-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-09-20 | 1990-03-22 | 1990-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-09-20 | 1994-03-22 | 1994-09-21 | $7700.00 | Window Closed / Lapsed |