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US3539408A Expired / Lapsed US ⏱️ 0.0 years remaining

Methods of etching chromium patterns and photolithographic masks so produced

Assignee: AT&T Inc
•
Filing: 1967-08-11
•
Granted: 1970-11-10
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Expires: 1987-08-11
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Abstract

No abstract record available.

Inventors

  • 👤 George R Cashau
  • 👤 James W George

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 00:45
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/54; C; C23; C23F; C23F1/00; C23F1/10; C23F1/14; C23F1/16; C23F1/26; G03F1/68; G03F1/80

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

US3194704A Cited
US3290192A Cited
US3411999A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1973-11-09 1974-05-11 1974-11-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1977-11-09 1978-05-11 1978-11-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1981-11-09 1982-05-11 1982-11-10 $7700.00 Window Closed / Lapsed

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