US3290192A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of etching semiconductors
Assignee: Motorola Solutions Inc
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Filing: 1965-07-09
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Granted: 1966-12-06
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Expires: 1985-07-09
Abstract
No abstract record available.
Inventors
- 👤 Dale T Kelley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 07:56
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J1/308; C; C23; C23F; C23F1/00; C23F1/02; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
68 words
A METHOD OF ETCHING, INCLUDING THE STEPS OF MOUNTING A SILICON WORK PIECE HAVING A SURFACE MASKED WITH AN ETCH RESISTANT MATERIAL ON HOLDING MEANS, IMMERSING SAID WORK PIECE AND HOLDING MEANS IN AN ETCHANT TO EXPOSE SAID MASKED SURFACE THERETO, MAINTAINING SAID WORK PIECE AT A TEMPERATURE DIFFERENT FROM THAT OF SAID ETCHANT DURING AT LEAST A PART OF SAID IMMERSION, AND AGITATING SAID ETCHANT DURING IMMERSION.
Claim 2
Independent Claim
68 words
A METHOD OF ETCHING, INCLUDING THE STEPS OF MOUNTING A SILICON WORK PIECE HAVING A SURFACE MASKED WITH AN ETCH RESISTANT MATERIAL ON HOLDING MEANS, IMMERSING SAID WORK PIECE AND HOLDING MEANS IN AN ETCHANT TO EXPOSE SAID MASKED SURFACE THERETO, MAINTAINING SAID WORK PIECE AT A TEMPERATURE DIFFERENT FROM THAT OF SAID ETCHANT DURING AT LEAST A PART OF SAID IMMERSION, AND AGITATING SAID ETCHANT DURING IMMERSION.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-12-05 | 1970-06-06 | 1970-12-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-12-05 | 1974-06-06 | 1974-12-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-12-05 | 1978-06-06 | 1978-12-06 | $7700.00 | Window Closed / Lapsed |